Ulvac EMP-14W Instruction Manual

Liquid nitrogen generator
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Liquid Nitrogen Generator
Instruction Manual
EMP-14W
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan's Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.
D/N. MJCE004E, 2019.01
ULVAC CRYOGENICS INCORPORATED

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Summary of Contents for Ulvac EMP-14W

  • Page 1 1 of Japan’s Export Trade Control Order. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting our refrigerators. D/N. MJCE004E, 2019.01 ULVAC CRYOGENICS INCORPORATED...
  • Page 3 General Precautions (1) It is strictly prohibited to duplicate or reproduce this manual either partially or entirely, or disclose or transfer to a third party without written permission from ULVAC CRYOGENICS. (2) Information in this document is subject to change without notice, along with the specification change or improvement of the product.
  • Page 4 There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. Low-temperature area present. There is a risk of frostbite. Do not touch. ULVAC CRYOGENICS INCORPORATED...
  • Page 5: Table Of Contents

    Front view of EMP-14W (Figure 2-1) ··············································· 7 Operation panel of EMP-14W (Figure 2-2) ········································ 7 Inside view of EMP-14W front door and lower panel ························ 10 Inside the lower back panel of EMP-14W ······································· 10 EMP-14W Electric Circuit (Figure 2-4) ··········································· 11 Top of the EMP-14W (Figure 2-5) ···················································...
  • Page 6 Preparation for operation ····························································· 21 Shutdown ··················································································· 22 When suspending for long time (for 1 to 2 weeks) and resuming EMP-14W ····································································· 22 Corrective action in the event of an error ······································· 23 9. Dispense Liquid Nitrogen Manually ·················································· 25 Connecting liquid nitrogen supply flexible hose ·······························...
  • Page 7: Safety Instructions

    (the oxygen concentration of 18% or below is defined as an oxygen-depleted state). Choose a well-ventilated and good-air-circulated location to install the EMP-14W, and install a ventilator with a capacity of at least 1000 m airflow. In addition, do not stay together with a dewar containing liquid nitrogen in a sealed space, such as an elevator or a car.
  • Page 8 (under regular maintenance, there is no need to discharge gas). In addition, never attempt to install the apparatus under the atmosphere of hydrochloric acid-based, chlorine gas-based, and other corrosive gases. ULVAC CRYOGENICS INCORPORATED...
  • Page 9: Disposal Considerations

    The cryocooler may contain residue of hazardous substances resulting from actual use. Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED...
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  • Page 11: General Description Of The System

    Membrane nitrogen generator. Liquid nitrogen generator is hereafter referred to as “EMP-14W” in this manual. Helium gas compressor (model:SW115) This unit is located on the lower part of EMP-14W, compress helium gas to supply to the cold head to provide cryogenic temperatures.
  • Page 12: Component Description

    2. Component Description Emergency Off Button Pressure Gauge Operation Panel LN2 Manual Dispense Port SW115 Display Figure 2-1 Front view of EMP-14W RUN/STOP RESET COMP.AL. OR 80 GN2 AL. 60 Maintenance AUTO AUTO 40 READY SUPPLY 20 0 L MANU MANU...
  • Page 13: Front View Of Emp-14W (Figure 2-1)

    In addition, the light will turn off when the machine is in eco-mode standby. RESET : This switch is used to reset the EMP-14W error state after removing the cause of a trouble. AUTO READY : Use this button to use the optional automatic transfer function.
  • Page 14 : Red light illuminates when nitrogen gas generator stops due to faults. The RUN/STOP switch also blinks. Maintenance : This light turns on when the GN-10i is approaching the maintenance interval. Temperature meter :This shows the temperature inside the dewar. ULVAC CRYOGENICS INCORPORATED...
  • Page 15 OPERATION Switch POWER Light RUNNING TIME OPERATION light He PRESSUREMETER ALARM Light He GAS CHARGE Compressor SW115 Figure 2-3 Inside view of EMP-14W front door and lower panel Auto-Supply Connector 自動供給配管継手 自動供給配管継手 ヒューズ レベル計変換器 Fuse Level Sensor Converter ヒューズ レベル計変換器...
  • Page 16: Inside View Of Emp-14W Front Door And Lower Panel

    Inside view of EMP-14W front door and lower panel (Figure 2-3) Dewar :Stores liquid nitrogen up to 40 litters. Cold head (S050) :The cold head works in conjunction with the compressor to generate ultra-low temperature. The cold head needs maintenance services according to the time in operation.
  • Page 17: Emp-14W Electric Circuit (Figure 2-4)

    EMP-14W Electric Circuit (Figure 2-4) Circuit breaker : The circuit breaker protects the control circuit of EMP-14W. It is tripped when an electric leak or short-circuit occurs. Fuse : The EMP14W has protective fuses for AC circuit (F-1, 2: 3A) and protective fuses for DC circuit (F3: 2A).
  • Page 18: Flow Diagram

    3. Flow Diagram This may vary depending on the customers’ specifications. Figure 3-1 Flow Diagram ULVAC CRYOGENICS INCORPORATED...
  • Page 19: Specifications

    Environment requirement : Ambient temperature: 10 – 35°C Relative humidity: 80% or below (Non-condensation except on LN dispense port)  The EMP-14W must be installed indoors. PSA (Pressure Swing Adsorption) nitrogen gas generator Type : GN-10i Dimensions : 400[W] ×460[D] ×900[H] Weight : Approx.60kg...
  • Page 20: Utilities

    5. Utilities Power source (for EMP-14W) Voltage : 200 VAC , three-phase Power capacity : 20A or above Power consumption : 1.6/1.9 kW ( 50/60 Hz ) Connection : Round type crimping terminal for M5 Cooling water : 4–6L/min, 5-35°C, Maximum pressure 1MPa <NOTE>...
  • Page 21: Installation

    *Spaces other than the front are required ※ 背面以外のスペースは、保守点検時にのみ必要であり、 only at the time of maintenance and check, 常時確保していただく必要はありません。 and do not need to be cleared all the time. Figure 6-1 Maintenance space for EMP-14W (4) Lock the wheels to fix the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 22: Connection Of Gn-10I To Power Source

    Connect the other side of the tube to "AIR IN" connector on the back side of IM-120. Utility connection of EMP-14W Remove the back panel of EMP-14W and locate opening for utility connection on the bottom. Connect cables of power-supply, nitrogen tube and remote cables of nitrogen gas generation system through this opening.
  • Page 23 (3)When the connection to the terminal board is made, attach the power cable to the circuit breaker and supply electricity by turning on the breaker in the electric circuit part of EMP-14W. Be sure to confirm that the power is supplied to the sequencers or other parts in the electric circuit of EMP-14W.
  • Page 24 Nitrogen gas generator. 6.4.3 Connection of “Nitrogen gas generator” remote cable Connect a remote cable to the remote connector inside EMP-14W and the signal connector from the back of GN-10i or “PRESSURE SWITCH OUT” connector on the back of IM-120.
  • Page 25: Electric Wiring

    7. Electric Wiring Figure 7-1 EMP-14W Electric wiring-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 26 Figure 7-2 EMP-14W Electric wiring-2 (Sequencer) ULVAC CRYOGENICS INCORPORATED...
  • Page 27: Operation

    Check the following before starting the operation. (1) The power source of the EMP-14W and GN-10i is connected correctly. (2) The air inlet and outlet openings of EMP-14W and GN-10i are cleared. (3) Cooling water hose is connected properly between EMP-14W and water supply.
  • Page 28: Shutdown

    If production does not start and the COMP.AL. illuminates, the power supply may be connected in reverse phase. In such a case, turn OFF the breakers of main power source and the electric circuit of EMP-14W, alternate two cables out of three on the main power source, and turn on the power again.
  • Page 29: Corrective Action In The Event Of An Error

    “13.Trouble Shooting”. 8.5.1 Corrective action when electric power failure occurs EMP-14W and GN-10i will be automatically restored in the event of a power-failure and they will be rebooted automatically when the electricity comes back. However, when the amount of liquid nitrogen inside is 75% or more, liquid nitrogen production may not be resumed at the time of rebooting.
  • Page 30 (For IM-120) (1) Turn OFF the RUN/STOP switch of EMP-14W. (2) Check that the supply pressure of dry air is 0.5 MPa or above. (3) When the nitrogen gas pressure is 0.2MPa and flow rate is 10NL/min, turn ON the RUN/STOP switch of the EMP-14W to restart.
  • Page 31: Dispense Liquid Nitrogen Manually

    Connect the joint (coupler joint) of attached flexible hose to LN manual dispense port located at the front of EMP-14W. When connecting to the coupler joint, do so while pushing the outer ring part of the EMP-14W side. Dispense liquid nitrogen To manually dispense liquid nitrogen, insert the head end of flexible hose in your liquid nitrogen container, and press-and-hold the MANUAL START button for 3 seconds.
  • Page 32: Disconnection Of The Flexible Hose

    O-ring inside the coupler joint. Disconnect flexible hoses in the opposite procedure to connecting. Push down the outer ring of the joint on the side of EMP-14W and pull out the flexible hose to disconnect. ULVAC CRYOGENICS INCORPORATED...
  • Page 33: Automatic Transfer Of Liquid Nitrogen

    Inspections before starting automatic transfer Before starting automatic supply, make sure of the following: (1) The level indicator cable is correctly connected between EMP-14W and the level sensor of the target device. (2) Liquid nitrogen supply tube is correctly connected between EMP-14W and the container of the target device.
  • Page 34: Eco Mode

    11. eco Mode 11.1 mode The operation of EMP-14W will be turned to eco mode by pressing “eco” button in the operation panel. EMP-14W is operated as follows in eco mode.  When EMP-14W does not receive any requests of LN...
  • Page 35: Maintenance And Inspection

    ✓ Helium tube joint  Check the total operation time of EMP-14W with the hour meter on SW115. *1… Maintenance parts are normally to be replaced “Once every 10,000 hours of operation”, however, even if 10,000 hours is not reached, replace them with new ones once every 5 years as the internal parts may become deteriorated.
  • Page 36: Regular Customer Inspection

    When you have to disassemble or dispose such parts, discharge helium using the optional charging adapter kit. 12.3 Regular customer inspection The EMP-14W is a high pressure manufacturing equipment. Please follow the applicable laws or regulations when operating and maintaining this equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 37: Troubleshooting

    The circuit breaker of Turn ON the circuit breaker. EMP-14W is turned OFF. The fuse of electrical circuit of Replace the fuse with a new EMP-14W is blown. one. If the fuse is blown repeatedly, please contact us.
  • Page 38 EMP does not start LN passed since RUN/STOP is filled from GN-10i. production (Alarm light switch is pressed. is not lit). Level sensor of EMP-14W is Please contact us. damaged. (7)Liquid Nitrogen cannot No liquid nitrogen such as at Please wait until liquid be dispensed.
  • Page 39 The level sensor of the target Please contact us. device breaks down. (11) MANU START button Only 30 seconds left until the Press MANU START button blinks. time limit of 10 minutes of again to continue dispending manual dispense. manually. ULVAC CRYOGENICS INCORPORATED...
  • Page 40 Please contact us if any problem is found. (13) Other failures Please contact us. ULVAC CRYOGENICS INCORPORATED...
  • Page 41: Accessories

    Instruction Manual IM-120 Remote Cable for Nitrogen Generator 1 (5m) Connector for Tubes 1 (Screw size: R1/4) Dry Air Supply Tube 1 (5m) Instruction Manual  The above accessories may be changed according to the directions by customers. ULVAC CRYOGENICS INCORPORATED...
  • Page 42: Warranty

    As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause of the breakdown is found to be a fault of ULVAC CRYOGENICS.
  • Page 43 ULVAC CRYOGENICS products and other services are not covered under warranty. 3. Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. Manufacturer: ULVAC CRYOGENICS INCORPORATED Please refer to the SERVICE NETWORK at the end of this book for our contact information.
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  • Page 45 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
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  • Page 47 Revision History Date Revision Contents 2019 / 1 / 15 2019.01 First edition ULVAC CRYOGENICS INCORPORATED...
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