Corrective Action In The Event Of An Error - Ulvac EMP-14W Instruction Manual

（For IM-120）
(1) Open the dry air valve to supply dry air to IM-120.
(2) Supply nitrogen gas to EMP-14W for at least one hour.
(3) Press the RUN/STOP switch of EMP-14W to reboot the entire system.
NOTE: Please inform us in advance when the system is to be suspended for longer than
two weeks.
8.5

Corrective action in the event of an error

When errors occur in the equipments, please follow the procedure below and in
"13.Trouble Shooting".
8.5.1 Corrective action when electric power failure occurs
EMP-14W and GN-10i will be automatically restored in the event of a power-failure and
they will be rebooted automatically when the electricity comes back. However, when the
amount of liquid nitrogen inside is 75% or more, liquid nitrogen production may not be
resumed at the time of rebooting.
8.5.2 Corrective action when COMP. AL. occurs
(1) Check the electric supply voltage and capacity.
(2) Remove the transparent panel on the compressor display of the EMP-14W, press
down the OPERATION switch, and the press it up.
(3) Press RESET button of EMP-14W.
(4) When the trouble is temporary, SW115 re-starts. When it stops due to abnormal
temperature, it may be unable to re-start about 30 minutes until the temperature of a
detection part falls. When SW115 does not start at all, but COMP.AL lights up again,
check each part according to "14.Trouble shooting."
8.5.3 Corrective action when GN2 AL. occurs
(For GN-10i)
(1) Turn off the RUN/STOP switch of EMP-14W.
(2) Conduct reset operation of GN-10i.
(3) Turn ON the RUN/STOP switch to re-start EMP-14W.
(4) When Nitrogen gas begins to flow from GN-10i, GN2 AL. lights off.
ULVAC CRYOGENICS INCORPORATED 23