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(3) IM-120
Parts
IM-120 Membrane
IM-120 Prefilter
IM-120 tube, joint
IM-120 Fixed throttle valve
IM-120 Check Valve
Be sure to turn off the main power source before performing the maintenance work.
Since helium is filled in this equipment as well as in the maintenance parts (cold head,
oil adsorber), do not disassemble these parts. When you have to disassemble or
dispose such parts, discharge helium using the optional charging adapter kit.
12.3
Regular customer inspection
The EMP-14W is a high pressure manufacturing equipment.
applicable laws or regulations when operating and maintaining this equipment.
30
1year
2years
✓
✓
✓
✓
WARNING
WARNING
ULVAC CRYOGENICS INCORPORATED
5years
✓
Please follow the
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