Specifications; Liquid Nitrogen Generator; Psa (Pressure Swing Adsorption) Nitrogen Gas Generator; Membrane Nitrogen Gas Generator - Ulvac EMP-14W Instruction Manual

4.1

Liquid nitrogen generator

Type
Amount of liquid nitrogen generated
High pressure gas processing capacity
Dimensions
Weight
LN2 storage capacity
Cold head
Compressor
Cooling method
Environment requirement
 The EMP-14W must be installed indoors.
4.2

PSA (Pressure Swing Adsorption) nitrogen gas generator

Type
Dimensions
Weight
Cooling method
 GN-10i must be installed indoors.
 GN-10i must not be used in the atmosphere with organic solvents or corrosive gases.
 Air inhaled from the front is discharged to the backside. Do not block the front and
backside.
4.3

Membrane nitrogen gas generator

Type
Dimensions
Weight
 IM-120 must be installed indoors.
 IM-120 must not be used in the atmosphere with organic solvents or corrosive gases.

4. Specifications

ULVAC CRYOGENICS INCORPORATED
: EMP-14W
: 14L/day (50/60Hz)
3
: 9.1 m /day
: 600[W]*750 [D] * 1688 [H]
: Approx. 230 kg
: Maximum 40L
: S050
: SW115
: Water-cooled
: Ambient temperature: 10 – 35°C
Relative humidity: 80% or below
(Non-condensation except on LN
dispense port)
: GN-10i
: 400[W] ×460[D] ×900[H]
: Approx.60kg
: Air-cooling (Inhale from the front,
exhaust from the back)
: IM-120
: 150[W] ×300[D] ×800[H]
: Approx.20 kg
2
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