Maintenance And Inspection; Daily Inspection; Periodical Maintenance/Inspection - Ulvac EMP-14W Instruction Manual

12. Maintenance and Inspection

12.1

Daily inspection

Check for the following items for daily inspection.
(1) The operation sound generated from each unit is normal.
(2) The pressure and flow rate of nitrogen gas are 0.2 MPa and 10 NL/min. respectively.
(3)The He gas pressure of SW115 is within the appropriate range.
(4) The alarm light of EMP-14W is not lit.
12.2

Periodical maintenance/inspection

(1) EMP-14W
Parts
Coldhead Cylinder *1
Oil adsorber
Helium tube joint

Check the total operation time of EMP-14W with the hour meter on SW115.
*1... Maintenance parts are normally to be replaced "Once every 10,000 hours of
operation", however, even if 10,000 hours is not reached, replace them with new
ones once every 5 years as the internal parts may become deteriorated.
(2) GN-10i
GN-10i Air Compressor
GN-10i Filter *2
GN-10i Solenoid valve

Check the total operation time of the GN-10i shown in the sequencer display in the
electric circuit of EMP-14W. In addition, the GN-10i operation light flashes when
the maintenance interval approaches,
*2...Clean the GN-10i air-intake filter every month.
*3... Maintenance intervals vary according to the operating conditions. As an example,
in the case of use by consecutive running, it replaces them with new ones every
two years.
When suspended: 1.95 – 2.05 MPa
When in operation: 2.10 – 2.30 MPa
10,000 30,000
hours hours
✓
✓
8,000hours or
2 years (Shorter)
✓
✓
ULVAC CRYOGENICS INCORPORATED
40,000
hours
✓
20,000
hours *3
✓
29