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6.1
Environmental requirements
(1) Install the equipment indoors, at a level and stabilized place. Power supply or other
utilities should be located nearby.
(2) Install the equipment at a well-ventilated place where the ambient temperature is 10 –
35°C and humidity is 80% or less (without condensation in other than cooling-water
hoses).
(3) Secure the following spaces for maintenance work.
.
(4) Lock the wheels to fix the equipment.
6. Installation
6 0 0
Back
EMP-14W Top
Front
Figure 6-1 Maintenance space for EMP-14W
ULVAC CRYOGENICS INCORPORATED
3 0 0
*Spaces other than the front are required
※ 背面以外のスペースは、保守点検時にのみ必要であり、
only at the time of maintenance and check,
常時確保していただく必要はありません。
and do not need to be cleared all the time.
15
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