Utilities; Power Source (For Emp-14W); Power Source For Gn-10I (When Using Gn-10I); Dry Air For Im-120 (When Using Im-120) - Ulvac EMP-14W Instruction Manual

5.1

Power source (for EMP-14W)

Voltage
Power capacity
Power consumption
Connection
Cooling water
<NOTE> Refer to the instruction manual of the SW115 for the detailed information on
the cooling water requirements.
Use Class-D earthing for safety.
5.2

Power source for GN-10i (when using GN-10i)

Voltage
Power capacity
Power consumption
Connection
Use Class-D earthing for safety.
5.3

Dry air for IM-120 (when using IM-120)

Pressure
Flow Rate
Dew Point
Air Quality
NOTE: Use compressors equipped with a dryer.
Supply dry air continuously.
14

5. Utilities

: 200 VAC , three-phase
: 20A or above
: 1.6/1.9 kW ( 50/60 Hz )
: Round type crimping terminal for M5
: 4–6L/min, 5-35°C, Maximum pressure 1MPa
CAUTION
: 100 VAC, single phase
: 15 A or above
: 400W ( 50/60 Hz )
: 3-pin outlet plug with ground wire
CAUTION
: 0.5MPa – 1.0MPa
: 120L/min or more
: -17 °C or below (at the atmospheric pressure)
: Oil-free
ULVAC CRYOGENICS INCORPORATED