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(2) Product Overview
1. Purpose of This Product and Actions that are Prohibited
This product is a system that evaporates substances in a vacuum space by means
of resistance heating evaporation source to form a thin film.
To safely and correctly use this product, avoid the following actions that are
prohibited.
Avoid this action
2. Safety Device and its Purpose and Functions
Item
Overload
Short-circuit
Avoid this
action
Using this vacuum coater as a vacuum vessel.
Putting in materials other than evaporation materials and sample
materials in the glass bell jar.
Reselling, repairing, and refurbishing of the product that are not
permitted by us.
Purpose
Protection for the
oil-sealed rotary
vacuum pump, oil
diffusion pump
and short-circuit
Operation with the safety devices above disabled
is prohibited.
Functions
Earth leakage breaker located in
vapor deposition unit main breaker.
Manual reset after troubleshooting
2
How to
Check
N/A
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