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8. List of consumable supplies
Location used
Oil diffusion pump
Oil-sealed rotary
vacuum pump
Rough pipe
Measurement
panel
Bell jar cover
The numbers listed above are for the standard specification. If optional parts are
attached, these numbers will differ.
(6) Disposal
1. Precautions when disposing
Caution
Applicable regulations: The law concerning the disposal and cleaning of waste
matter
Handling method: Entrust
1) transportation to industrial waste collection and transportation contractors
2) handling to industrial waste disposal contractors
Name
Intake flange gasket
Evacuation flange
O-Ring
Hydraulic oil
Oil
RP1 vacuum hose
RP2 vacuum hose
Pirani vacuum gauge
probe
Receiving light
RP, DP, FAN switches
Rubber lip
Follow all
regulations
Specification
For ULK-06A
V-55
D-31
SMR-100
Ø 25 Ø 50 L=370
Ø 25 Ø 50 L=310
WP-01
LMU-6MS
LLK25L2 2P 10A
KV-1297-01-143
Waste oil from the pump must be disposed of
in accordance with all relevant laws and
regulations.
Please handle waste properly in accordance with the
laws and regulations. If anything is unclear, please
contact us directly.
２８
Material
Number
NBR
1
NBR
1
---
0.35 L
1.1 L per
---
nut
Special
1
rubber
Special
1
rubber
---
1
---
1
---
4
EPDM
0.31m
Can
customer
replace?
OK
OK
OK
OK
OK
OK
OK
×
×
OK
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