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RF POWER SUPPLY and MATCHINGBOX
4-1. Explanation of functions of the front panel
Figure 4-1 Explanation of functions of front panel
Table 4-1. Explanation of functions of front panel
Category
(1) POWER LED
(2) FREQ LED
(3) PLS LED
(4) PHASE LED
(5) ENT KEY
(6) DEC KEY
(7) INC KEY
(8) PREV KEY
(9) NEXT KEY
4. Explanation of functions
(6)
Switches on when the power supply is on.
Reserve LED for expanded functionality. Normally not used.
Reserve LED for expanded functionality. Normally not used.
Switches on when phase setting mode has been selected.
Press this key to enable setting changes or complete configuration.
Press this key to decrease a setting value or change a setting.
Press this key to increase a setting value or change a setting.
Press this key to return to the previous item or page.
Press this key to move to the next item or page.
This section explains the functions.
(2)
(1)
(7)
(8)
(9)
Function
11
4. Explanation of functions
(5)
(3)
(4)
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