Cleaning And Inspecting The Pump Heads - Ulvac MD 4U NT Instructions For Use Manual

Diaphragm pump
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No. 47800-2-02-5

Cleaning and inspecting the pump heads

➨ Position the pump on the side. Support pump appropriately if necessary. Open only one side of the
pump at a time.
View of the disassembled pump head parts
1
Pump head parts:
1: Housing cover
2: O-rings (not ME 8 NT)
3: Valves
4: Head cover
5: Diaphragm clamping disc
with square head screw
Documents are only to be used and distributed completely and unchanged. It is strictly the users' responsibility to check carefully
the validity of this document with respect to his product.
page 16 of 24
➨ To check the valves use a hex key to remove eight socket-
head screws from the pump head and remove the housing
cover with head cover, valves and O-rings.
☞ Never remove parts by using a spiky or sharp-edged tool
(e.g. screw driver), we recommend to use a rubber mallet
or compressed air (to be blown carefully into port).
➨ Remove the head cover carefully from the housing cover.
Note the position of the valves and remove them.
☞ Replace valves if necessary.
☞ Use petroleum ether or industrial solvent to remove de-
posits. Do not inhale.
3
2
9
8
6
5
4
6: Diaphragm
7: Diaphragm support disc
8: Washer
9: Connecting rod
10: Housing
11: Connecting tube with O-ring
10
11
7

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