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Brooks Instrument Manuals
Measuring Instruments
SLA5800 Series
Installation & operation manual
Brooks Instrument SLA5800 Series Installation & Operation Manual
Mass flow controllers & meter
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Table of Contents
Section 1 Introduction
Purpose
Specifications
SLA5800 Series Standard Specifications
SLA5800 Series Biotech Specifications
SLA5800 Series Electrical Specifications
Certifications
SLA5800 Series Certifications
Reference Conditions
Biotech Option Packages
PC-Based Support Tools
Fast Response Performance
Calibration Selection
Selectable Soft Start
General Wiring
Response Performance of Brooks Digital MFC
Linear Ramp-Up And/Or Ramp-Down from 200% Per Second down to 0.5% Per Second Setpoint Change
SLA5800 Series RS485 15-Pin Analog Connector and Pinouts
SLA5800 Series Profibus Connections and Pinouts
Ethernet/Ip™ & PROFINET M8 Power Connection and Pinnout
SLA5800 Series Devicenet Connections and Pinouts
SLA5800 Series Ethercat Connections and Pinouts
SLA5850/SLA5851/SLA5860/SLA5861 Dimensions
SLA5853/SLA5863 Dimensions
Section 2 Installation
Receipt of Equipment
Recommended Storage Practice
Return Shipment
Transit Precautions
Removal from Storage
Gas Connections
In-Line Filter
Recommended Filter Size
Installation
Electrical Interface
RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version
Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)
Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)
RS485 Multidrop Interconnection Tmfs and PC
Operation Check Procedure (Analog I/O)
Operation Check Procedure (Digital I/O)
Bus/Network (Devicenet, Profibus, Foundation Fieldbus, Ethercat)
Features (Standard and Biotech)
Analog I/O Mode of Operation
Externally Accessible Adjustment (Zero Button) for All Meters/Controllers
RS485 Communications Features (Analog Versions Only)
Ethernet/Ip™ Communications Features
Devicenet Communications Features
Profibus Communications Features
Ethercat Communications Features
Alarms (Analog Versions Only)
Alarms (Analog Versions Only) Configuration Attributes
Diagnostic Alarms (Analog Versions Only)
General Alarms (Analog Versions Only)
Calibration/Configuration Sets
Special Features
Setpoint Ramping
Low Setpoint Command Cutoff
Low Flow Output Cutoff
Adaptive Control
Flow Totalizer
PC-Based Support Tools
Troubleshooting Analog or Digital
Section 4 Maintenance & Troubleshooting
System Checks
Bench Troubleshooting Circuit
Sensor Troubleshooting
Cleaning Procedures
Calibration Procedure
Troubleshooting
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Installation & Operation Manual
SLA5800 Series
Mass Flow Controllers & Meters
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Troubleshooting
Troubleshooting Analog or Digital
42
Section 4 Maintenance & Troubleshooting
43
Bench Troubleshooting Circuit
44
Troubleshooting
46
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This manual is also suitable for:
Sla5850
Sla5860
Sla5851
Sla5861
Sla5853
Sla5862
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