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Summary of Contents for Pfeiffer Vacuum TM 700
- Page 1 OPERATING INSTRUCTIONS Translation of the Original TM 700 Electronic drive unit...
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Page 2: Telegram Example
Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service. -
Page 3: Table Of Contents
Control commands Status requests Set value settings Additional parameters for the control unit Operation Configuring the connections with the Pfeiffer Vacuum parameter set 7.1.1 Configuring the digital inputs 7.1.2 Configuring digital outputs and relays 7.1.3 Configuring the analog input 3/50... - Page 4 7.5.2 Temperature monitoring Recycling and disposal General disposal information Dispose of electronic drive unit Malfunctions General Error codes Warning and malfunction messages when operating with control units Service solutions by Pfeiffer Vacuum EC Declaration of Conformity UK Declaration of Conformity 4/50...
- Page 5 List of tables List of tables Tbl. 1: Stickers on the product Tbl. 2: Abbreviations used in this document Tbl. 3: Permissible ambient conditions Tbl. 4: Features of the device variants Tbl. 5: Connection description of the electronic drive unit Tbl.
- Page 6 List of figures List of figures Fig. 1: Standard panel TM 700 Fig. 2: Connection diagram for the electronic drive unit. Example: external circuit for "remote" Fig. 3: Rotation speed setting mode pin 7 and pin 11 Fig. 4: Connection options via interface RS-485 Fig.
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Page 7: About This Manual
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status. -
Page 8: Stickers On The Product
1.4.3 Stickers on the product This section describes all the stickers on the product along with their meanings. Rating plate The rating plate is located on the side of the electronic drive unit. TM 700 Mod.: PM C01 850 M.-No.: Ser.-No.: 12345678 48 V ±... -
Page 9: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... -
Page 10: Safety Precautions
Safety DANGER Danger to life from electric shock When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC 60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec- tric shock at the communication interfaces. -
Page 11: Limits Of Use Of The Product
2.5 Proper use ● The electronic drive unit is used exclusively for the operation of Pfeiffer Vacuum turbopumps and their accessories. 2.6 Foreseeable improper use Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular: ●... -
Page 12: Product Description
ID no. 000021320. 3.2 Product features The type TM 700 drive and magnetic bearing controller is an integral component of the turbopump. The purpose of the electronic drive unit is to drive, monitor and control the entire turbopump. Feature... -
Page 13: Connections
Housing connector with bayonet mount for the voltage supply between Pfeiffer Vac- uum power supply packs and the electronic drive unit. accessory M12 bushing with screw lock for the connection of Pfeiffer Vacuum accessories. The use of a Y-connector permits the double pinout of a connector. PV.can M12 socket with screw lock and LED for the connection of an integrated pressure measurement and for Pfeiffer Vacuum service purposes. -
Page 14: Installation
Installation 4 Installation 4.1 Connection diagram DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1. -
Page 15: Connection "Remote
The 26-pin sub-D connection with the "remote" designation offers the possibility to operate the electron- ic drive unit via remote control. The accessible individual functions are mapped to "PLC levels". The fol- lowing specifications are the factory settings for the electronic drive unit. They can be configured with the Pfeiffer Vacuum parameter set. 15/50... -
Page 16: Tbl. 6: Terminal Lay-Out Of 26-Pin "Remote" Connection
= 50 V DC; I = 1 A) DO remote priori- GND: off, V+: Remote priority active RS-485 D+ in accordance with the specification and Pfeiffer Vacuum pro- tocol RS-485 D- in accordance with the specification and Pfeiffer Vacuum pro- tocol... -
Page 17: Voltage Supply
The digital inputs at the "remote" connection are used to switch various electronic drive unit functions. Inputs DI1 to DI2 are assigned functions in the factory. You can configure them via the RS-485 interface and the Pfeiffer Vacuum parameter set. DI1 (release venting)/pin 2... -
Page 18: Outputs
4.2.3 Outputs The digital outputs at the "remote" connection have a maximum load limit of 24 V/50 mA per output. All outputs listed below are configurable with the Pfeiffer Vacuum parameter set via the RS-485 interface (description relates to factory settings). -
Page 19: Rs-485
Installation 4.2.5 RS-485 Pin 24 and pin 25 You can connect a Pfeiffer Vacuum control unit or an external PC via pin 24 and pin 25 at the "remote" connection of the electronic drive unit. 19/50... -
Page 20: Interfaces
5 Interfaces 5.1 Interface RS-485 The interface designated “RS-485” is intended for connecting a Pfeiffer Vacuum control unit or an exter- nal PC. The connections are galvanically safe and are isolated from the maximum supply voltage for the electronic drive unit. The electrical connections are optically decoupled internally. -
Page 21: Cross-Linked Via The Rs-485 Connection
3. Connect all devices to the bus with RS-485 D+ and RS-485 D-. 5.2 Pfeiffer Vacuum protocol for RS-485 interface 5.2.1 Telegram frame The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the telegram C . Basically, a host (e.g. -
Page 22: Telegram Description
● Group address "9xx" for all identical units (no response) ● Global address "000" for all units on the bus (no response) Action according to telegram description n2 – n0 Pfeiffer Vacuum parameter numbers I1 – I0 Data length dn to d0 dn – d0 Data in the respective data type (see chapter “Data types”, page... -
Page 23: Data Types
Interfaces --> ASCII 5.2.5 Data types Data type Description Length Example l1 – l0 boolean_old Logical value (false/true) 000000 is equivalent to false 111111 is equivalent to true u_integer Positive whole number 000000 to 999999 u_real Positive fixed point number 001571 corresponds with 15.71 string Any character string with 6 charac-... -
Page 24: Parameter Set
Each parameter has a three-digit number and a description. The parameter can be accessed via Pfeiffer Vacuum control units or externally via RS-485 using Pfeiffer Vacuum protocol. The vacuum pump starts in standard mode with factory default pre-set parameters. - Page 25 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg DO2 Output DO2 0 = Rotation speed switchpoint configuration reached 1 = No error 2 = Error 3 = Warning 4 = Error and/or warning 5 = Set rotation speed reached 6 = Pump on 7 = Pump accelerating...
- Page 26 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg Acc A1 Configuration 0 = Fan (continuous operation) accessory 1 = Venting valve, closed with- connection out current 2 = Heater 3 = Backing pump 4 = Fan (temperature control- led) 5 = Sealing gas 6 = Always "0"...
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Page 27: Status Requests
Parameter set Display Description Functions Data Unit min. max. type cess fault type CtrlViaInt Operation of 1 = remote the interface 2 = RS-485 4 = PV.can 8 = Fieldbus 16 = E74 255 = Unlock interface selec- tion IntSelLckd Interface se- 0 = off lection locked... -
Page 28: Set Value Settings
Parameter set Display Description Func- Data Access Unit min. max. tions type type fault DrvPower Drive power 999999 PumpCycles Pump cycles 65535 TempPwrStg Final stage temperature °C 999999 TempElec Electronics temperature °C 999999 BearngWear Safety bearing degree of wear TempPmpBot Pump lower part tempera- °C 999999... -
Page 29: Additional Parameters For The Control Unit
The basic parameter set is set in the electronic drive unit ex-factory. For controlling con- nected external components (e.g. vacuum measuring equipment), additional parameters (extended parameter set) are available in the corresponding Pfeiffer Vacuum control units. ● Refer to the corresponding operating instructions of the respective components. -
Page 30: Operation
Operation 7 Operation 7.1 Configuring the connections with the Pfeiffer Vacuum parameter set The electronic drive unit is pre-configured with the factory default basic functions and is ready for opera- tion. For individual requirements, you can configure most connections for the electronic drive unit with the parameter set. -
Page 31: Configuring The Analog Input
● The use of other accessories for turbopumps is possible and requires settings in the configuration of the electronic drive unit. ● The desired accessory output is configured via RS-485 using Pfeiffer Vacuum control units or a PC. ● For detailed information see the “Electronic drive unit TC 400” or “Electronic drive unit TC 700”... -
Page 32: Select Interfaces
Operation Procedure ► Carry out the configuration of the connections via parameter [P:035], [P:036], [P:037] or [P:038]. Option Description 0 = Fan (continuous operation) Control via pumping station parameters 1 = Venting valve, closed with- Control via parameter Enable venting. When using a venting valve out current closed without current 2 = Heater... -
Page 33: Operating Modes
► Make sure that the gas mode is set correctly by [P:027] in the electronic drive unit. ► Consult Pfeiffer Vacuum before you use gases with higher molecular masses (> 80). High gas throughput and high rotation speed lead to strong friction heating of the rotor. To avoid over- heating, power to rotation speed characteristics are implemented in the electronic drive unit. -
Page 34: Run-Up Time
Operation 7.2.3 Run-up time The turbopump run-up is time-monitored ex-factory. There are various causes of prolonged run-up times, for example: ● Excessive gas throughput ● Leak in system ● Setpoint of the run-up time too low Set parameter [P:700] 1. Where applicable, eliminate any external and application-related causes. 2. -
Page 35: Rotation Speed Setting Mode
3. Check the set rotation speed (parameter [P:308] or [P:397]). 7.2.6 Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and production stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbo pump. -
Page 36: Confirming Speed Specification
Fluctuations in the power consumption of idling turbopumps and varying fore-vac- uum pressures of the backing pumps require individual settings of the interval operation. Pfeiffer Vacuum recommends interval operation between 5 and 10 hPa. A pressure gauge and a dosing valve are required to set the switching thresholds. -
Page 37: Backing Pump Standby Mode
2. Use this signal for the control of a fore-vacuum safety valve. 7.2.9 Backing pump standby mode In case you are using a Pfeiffer Vacuum backing pump with rotation speed control, this can be used in standby mode by configuring the digital output [P:019] or [P:024]. The power consumption of the turbo- pump has a direct influence on the rotation speed of the backing pump. -
Page 38: 12Venting Modes
Operation Configuring the heating Activation of the connected housing heating depends on the rotation speed switch point 1 (factory set- ting 80% x f Nominal ► Switch the heating on or off with parameter [P:001]. Configuring the fan 1. Set the selected parameter to “0” for continuous operation of the fan. 2. -
Page 39: 14Balance
7.5.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated error and warning display is only possible for operation with the Pfeiffer Vacuum control unit or a PC. 39/50... -
Page 40: Temperature Monitoring
Operation Symbol LED status Display Meaning Currentless On, flashing "pumping station OFF", rotation speed ≤ 60 rpm Green On, inverse flashing "pumping station ON", set rotation speed not reached On, constant "pumping station ON", set rotation speed reached On, flashing "pumping station OFF", speed >... -
Page 41: Recycling And Disposal
● Help to reduce the wastage of natural resources. ● Prevent contamination. 8.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –... -
Page 42: Malfunctions
Warnings (* Warning F –––– *) do not cause components to be switched off. Handling malfunction messages 1. Read out error codes via Pfeiffer Vacuum control units or a PC. 2. Remove the cause of the malfunction. 3. Reset the malfunction message with parameter [P:009]. - Page 43 Malfunctions Error Problem Possible causes Remedy code Err043 Internal configuration er- ● Device defective ● Contact Pfeiffer Vacuum Service Err044 Excess temperature, ● Insufficient cooling ● Improve the cooling electronics ● Check the operating conditions Err045 Excess temperature, ● Insufficient cooling ●...
- Page 44 Problem Possible causes Remedy code Err800 Magnetic bearing over- ● Impacts, vibrations ● Contact Pfeiffer Vacuum Service flow ● Device defective ● Check the operating conditions ● Only acknowledge for rotational speed f = 0 Err802 Magnetic bearing sen- ● Calibration values invalid ●...
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Page 45: Warning And Malfunction Messages When Operating With Control Units
● Check the operating conditions ● Impermissible thermal radiation ● Impermissible magnetic field Wrn113 Inaccurate rotor tem- ● Internal communication error ● Contact Pfeiffer Vacuum Service perature Wrn115 Pump lower part tem- ● Device defective ● Contact Pfeiffer Vacuum Service... -
Page 46: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 47 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 48: Ec Declaration Of Conformity
This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Electronic drive unit TM 700 We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Electromagnetic compatibility 2014/30/EU... -
Page 49: Declaration Of Conformity
Semi F47-0200 EN IEC 61326-1:2021 Semi S2-0706 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
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