Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
5.2.4 Telegram example 2 5.2.5 Data types Parameter set General Control commands Status requests Set value settings Additional parameters for the control unit Operation Configuring the connections with the Pfeiffer Vacuum parameter set 7.1.1 Configure digital inputs 7.1.2 Configure the digital outputs 3/48...
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7.5.2 Temperature monitoring Recycling and disposal General disposal information Dispose of electronic drive unit Malfunctions General Error codes Warning and malfunction messages when operating with control units Service solutions by Pfeiffer Vacuum EC Declaration of Conformity UK Declaration of Conformity 4/48...
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List of tables List of tables Tbl. 1: Stickers on the product Tbl. 2: Abbreviations used in this document Tbl. 3: Permissible ambient conditions Tbl. 4: Data for use in safety-related applications in accordance with IEC 61508 and IEC 62061 Tbl.
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List of figures List of figures Fig. 1: Connection panel Fig. 2: Connection diagram with connection cable Fig. 3: Connection diagram with connection cable and accessories Fig. 4: Connection diagram with external wiring Fig. 5: Connection of the electronic drive unit via “X3” Fig.
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status.
About this manual 1.3.2 Pictographs Pictographs used in the document indicate useful information. Note 1.3.3 Stickers on the product This section describes all the stickers on the product along with their meanings. Example for a name plate The rating plate is located on the side of the electronic drive unit.
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►...
Safety DANGER Danger to life from electric shock When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC 60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec- tric shock at the communication interfaces.
2.5 Proper use ● The electronic drive unit is used exclusively for the operation of Pfeiffer Vacuum turbopumps and their accessories. 2.6 Foreseeable improper use Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular: ●...
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Safety Characteristics in accordance with EN ISO 13849-1 Characteristic Performance Level Category MTTF Average diagnostic coverage DC Value PL d Cat. 3 high (134 a) medium (90% - < 99%) Tbl. 5: Data for use in safety-related applications in accordance with EN ISO 13849-1 ●...
3 Product description 3.1 Identifying the product ► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand. ► Learn about certifications through test seals on the product or at www.certipedia.com...
Installation 4 Installation 4.1 Connection diagram DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.
The 15-pin sub-D connection with the “X3” designation offers the possibility to operate the electronic drive unit remotely. The following specifications are the factory settings for the electronic drive unit. They can be configured with the Pfeiffer Vacuum parameter set. Required tools ●...
Connection assignment of the 15-pin connection "X3" 4.2.1 Voltage supply Input/pin 1 The electrical connection to “X3” is made using connection cable from the Pfeiffer Vacuum accessory 3)4) program or, by the customer, at pin 1 and pin 15. +24 V DC* output/pin 7 A connection with +24 V DC to pin 7 (active high) activates inputs 2 to 6.
(load R ≥ 10 kΩ). You can assign additional functions (optionally current/power) to the analog output via control units or a PC. 4.2.4 RS-485 Connecting RS-485 via D-Sub ► Connect a Pfeiffer Vacuum control unit or an external PC via pin 13 and pin 14 at the D-Sub con- nection of the electronic drive unit. 18/48...
► Connect only suitable devices to the bus system. The interface designated “RS-485” is intended for connecting a Pfeiffer Vacuum control unit or an exter- nal PC. The connections are galvanically safe and are isolated from the maximum supply voltage for the electronic drive unit.
3. Connect all devices to the bus with RS-485 D+ and RS-485 D-. 5.2 Pfeiffer Vacuum protocol for RS-485 interface 5.2.1 Telegram frame The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the telegram C . Basically, a host (e.g.
Interfaces n2 – n0 Pfeiffer Vacuum parameter numbers I1 – I0 Data length dn to d0 dn – d0 Data in the respective data type (see chapter “Data types”, page 22). c2 – c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 carriage return (ASCII 13) 5.2.2 Telegram description...
Interfaces 5.2.5 Data types Data type Description Length Example l1 – l0 boolean_old Logical value (false/true) 000000 is equivalent to false 111111 is equivalent to true u_integer Positive whole number 000000 to 999999 u_real Positive fixed point number 001571 corresponds with 15.71 string Any character string with 6 charac-...
Each parameter has a three-digit number and a description. The parameter can be accessed via Pfeiffer Vacuum control units or externally via RS-485 using Pfeiffer Vacuum protocol. The vacuum pump starts in standard mode with factory default pre-set parameters.
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Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg DO2 Configura- 0 = rotation speed switch point tion output reached 1 = no error 2 = error 3 = warning 4 = error and/or warning 5 = set rotation speed reached 6 = pump on 7 = pump accelerating...
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Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg Acc A1 Configura- 0 = fan tion acces- 1 = venting valve, closed with- sory connec- out current tion A1 2 = heating 3 = backing pump 4 = fan (temperature controlled) 5 = sealing gas 6 = always "0"...
Parameter set Display Description Func- Data Access Unit min. max. tions type type fault TempMotor Temperature motor °C 999999 ElecName Name of electronic drive unit HW Version Hardware version electron- ic drive unit ErrHist1 Error code history, item 1 ErrHist2 Error code history, item 2 ErrHist3 Error code history, item 3...
The basic parameter set is set in the electronic drive unit ex-factory. For controlling con- nected external components (e.g. vacuum measuring equipment), additional parameters (extended parameter set) are available in the corresponding Pfeiffer Vacuum control units. ● Refer to the corresponding operating instructions of the respective components.
Operation 7 Operation 7.1 Configuring the connections with the Pfeiffer Vacuum parameter set The electronic drive unit is pre-configured with the factory default basic functions and is ready for opera- tion. For individual requirements, you can configure most connections for the electronic drive unit with the parameter set.
7.1.4 Configuring accessory connections Connecting accessory devices to TC ● Use of Pfeiffer Vacuum accessories via the electronic drive unit is enabled via a corre- sponding connection cable or adapter at the “X3” multi-function connection. ● The desired accessory output is configured via RS-485 using Pfeiffer Vacuum control units or a PC.
► Make sure that the gas mode is set correctly by [P:027] in the electronic drive unit. ► Consult Pfeiffer Vacuum before you use gases with higher molecular masses (> 80). High gas throughput and high rotation speed lead to strong friction heating of the rotor. To avoid over- heating, power to rotation speed characteristics are implemented in the electronic drive unit.
Operation P max [P:708] Fig. 7: Schematic diagram of power characteristics, example of heavy gases [P:027] = 0 Power consumption Power characteristic in gas mode "0" (gases with molecu- lar mass > 39, e.g. Argon) Rotation speed Power characteristic in gas mode "1" (gases with molecu- lar mass ≤...
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Operation Rotation speed switch point 1 [P:017] = 0 f (%) [P:701] [P:010] [P:302] Process Fig. 8: Rotation speed switch point 1 active Adjusting rotation speed switch point 1 Signal output and status parameters are based on the set value for the rotation speed switch point 1 [P:701].
3. Check the set rotation speed (parameter [P:308] or [P:397]). 7.2.6 Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and production stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbo pump.
Fluctuations in the power consumption of idling turbopumps and varying fore-vac- uum pressures of the backing pumps require individual settings of the interval operation. Pfeiffer Vacuum recommends interval operation between 5 and 10 hPa. A pressure gauge and a dosing valve are required to set the switching thresholds.
2. Use this signal for the control of a fore-vacuum safety valve. 7.2.9 Backing pump standby mode In case you are using a Pfeiffer Vacuum backing pump with rotation speed control, this can be used in standby mode by configuring the digital output [P:019] or [P:024]. The power consumption of the turbo- pump has a direct influence on the rotation speed of the backing pump.
Operation Configuring the bottom part heating The accessory output controls the heating cartridges that maintain the bottom part of the turbopump at maximum temperature. The control is carried out according to pump-specific requirements, depending on the current power input of the vacuum pump and the switch point. 1.
7.5.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated error and warning display is only possible for operation with the Pfeiffer Vacuum control unit or a PC. Symbol...
● Help to reduce the wastage of natural resources. ● Prevent contamination. 8.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –...
Warnings (* Warning F –––– *) do not cause components to be switched off. Handling malfunction messages 1. Read out error codes via Pfeiffer Vacuum control units or a PC. 2. Remove the cause of the malfunction. 3. Reset the malfunction message with parameter [P:009].
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
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Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Electronic drive unit TC 110 TC 120 We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Low voltage 2014/35/EC Electromagnetic compatibility 2014/30/EU...
Semi F47-0200 EN IEC 61326-1:2021 Semi S2-0706 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
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