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V640-HAM11
User manual
Applicable Semi Standards - Omron V640-HAM11 User Manual
Cidrw system
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Applicable SEMI Standards
This CIDRW system complies with the following standards.
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
INTRODUCTION
CIDRW System
7
User's Manual
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This manual is also suitable for:
V640 series
V640-hs61
V700-l21
V700-l11
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