Features - Omron V640-HAM11 User Manual

Features

CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)
Host
SECS I/II
List of Applicable Standards
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
CIDRW System Conforming to SEMI Standards
CIDRW Controller
V700-L21
Amplifier Unit
V640-HAM11
SECTION 1
Product Outline
ID Tag
CIDRW Head
RI-TRP-DR2B
V640-HS61
(Made by Texas
Instruments)
CIDRW System
13
User's Maual