LEYBOLD TURBOVAC i(X) Manual
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LEYBOLD TURBOVAC i(X) Manual

Turbomolecular pumps with integrated frequency converter
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TURBOVAC i(X)
TURBOVAC 850 i(X), 950 i(X), 1350 i, 1450 i
Turbomolecular Pumps with Integrated
Frequency Converter
Operating Instructions 300855170_002_C8
Part Nos.
84007xVxxxx
84008xVxxxx
84009xVxxxx
84010xVxxxx
850092Vxxxx(U)
850102Vxxxx(U)
850122Vxxxx(U)
850132Vxxxx(U)
x = 0 to 9

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Summary of Contents for LEYBOLD TURBOVAC i(X)

  • Page 1 TURBOVAC i(X) TURBOVAC 850 i(X), 950 i(X), 1350 i, 1450 i Turbomolecular Pumps with Integrated Frequency Converter Operating Instructions 300855170_002_C8 Part Nos. 84007xVxxxx 84008xVxxxx 84009xVxxxx 84010xVxxxx 850092Vxxxx(U) 850102Vxxxx(U) 850122Vxxxx(U) 850132Vxxxx(U) x = 0 to 9...

  • Page 2: Table Of Contents

    Water cooling 3.6.3 Water quality Connect a power failure venting valve or a venting valve Connect purge gas Connect a flange heater 3.10 Connect a vacuum gauge head (only for TURBOVAC iX) 3.11 Electrical connection 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 3 The Operating Instructions 300687441 TURBOVAC iX EtherCAT Interface offers information on the EtherCAT Interface. The Operating Instructions 300905828 TURBOVAC i Interface Module describes the Anybus modules. These Operating Instructions are a translation of the German original instruc- tions 300855170_001_C8. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 4 Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Leybold TURBOVAC has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is...

  • Page 5: Important Safety Information

    The safety symbols that follow are used on the product or in the product documentation. General warning sign Warning vacuum Warning of falling loads Warning - Dangerous voltage Warning - Hot surfaces Warning - Risk of explosion 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 6: Mechanical Hazards

    Do not operate the vacuum pump with open flanges. CAUTION: FALLING PARTS Errors during transport can cause the pump to fall down. Transport the pump only in its transport packaging or at the eye-bolts provided for this purpose. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 7: Electrical Hazards

    Install an emergency shut down switch in the system. The emergency shut down switch must be present in the building installation ■ suitably arranged and easily accessible for the user ■ marked as the disconnecting device for this device. ■ 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 8: Description

    They are suitable for pumping air and clean gases. A forevacuum pump and a power supply are required for their operation. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 9 TURBOVAC 1450 i DN 250 ISO-F TURBOVAC 1450 i DN 250 ISO-K TURBOVAC 1350 i DN 200 ISO-F TURBOVAC 1350 i DN 200 ISO-K TURBOVAC 1350 i with optional interface Fig. 1.2 TURBOVAC models 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 10: Design

    Standard equipment Turbomolecular pump with integrated electronic drive unit, two eye-bolts High and fore-vacuum flanges are protective-capped. Flange mounting elements and the inlet screen are not enclosed, but are available as accessories. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 11: Technical Data

    ** For a high gas throughput with N please contact Leybold. 1) Depending on the ambient temperature, the gas throughput and the type of gas, forced air cooling or water cooling may be necessary. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 12: Technical Data For The Integrated Drive Electronics

    3 pcs M8 connector, 24 V DC Maximum load rating for the 24 V DC outputs 24 V, max. 18 W 24 V, 12 W (powering accessories, e.g. cooling unit or valves) Vacuum gauge head connection – 15 pin Sub-D 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 13: Pumping Speed Curves

    Inlet pressure Fig. 1.3 Pumping speed curves for the TURBOVAC 850 i 1.000 TURBOVAC 950 i Nitrogen Helium Argon Hydrogen mbar Inlet pressure Fig. 1.4 Pumping speed curves for the TURBOVAC 950 i 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 14 Fig. 1.5 Pumping speed curves for the TURBOVAC 1350 i 1600 1400 TURBOVAC 1450 i 1200 1000 Nitrogen Nitrogen Argon Argon Hydrogen Hydrogen Helium Helium mbar Inlet pressure Fig. 1.6 Pumping speed curves for the TURBOVAC 1450 i 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 15: Operation Diagrams

    TRIVAC D 65 B TRIVAC D 65 B SCROLLVAC 7 plus SCROLLVAC 7 plus DIVAC 3.8 HV3 DIVAC 3.8 HV3 Pressure in mbar Druck in mbar Fig. 1.7 Operation diagram for TURBOVAC 850 i 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 16 TRIVAC D 65 B TRIVAC D 65 B SCROLLVAC 7 plus SCROLLVAC 7 plus DIVAC 3.8 HV3 DIVAC 3.8 HV3 Pressure in mbar Druck in mbar Fig. 1.8 Operation diagram for TURBOVAC 850 i 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 17 TRIVAC D 65 B TRIVAC D 65 B SCROLLVAC 7 plus SCROLLVAC 7 plus DIVAC 3.8 HV3 DIVAC 3.8 HV3 Pressure in mbar Druck in mbar Fig. 1.9 Operation diagrams for TURBOVAC 950 i 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 18 Saugleistung TRIVAC D 4 B Saugleistung ECODRY 65 plus Throughput ECODRY 65 plus Saugleistung DIVAC 3.8 HV3 Throughput DIVAC 3.8 HV3 Druck in mbar Pressure in mbar Fig. 1.10 Operation diagrams for TURBOVAC 1350 i and 1450 i 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 19: Ordering Data

    ■ entation in between or horizontally or vertically with the high-vacuum flange on the bottom and in ■ any orientation in between (U versions) 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 20 G 1/8" 186,5 DN 25 KF 65,6 63,3 48 V Power supply cable, 48 V DC Stromanschlusskabel, 0.6 m long incl. plug Länge 0,6 m inkl. Stecker Fig. 1.11 Dimensional drawings, dimensions in mm 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 21 48 V DC Stromanschlusskabel, 0.6 m long incl. plug Länge 0,6 m inkl. Stecker 4x M5 - 8 160 ISO-K 160 CF 202,5 200 ISO-K 250,5 200 CF 261,3 Fig. 1.12 Dimensional drawings, dimensions in mm 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 22 Ø 8 mm Außen-Ø 8 mm 48 V Power supply cable, 48 V DC Stromanschlusskabel, 0.6 m long incl. plug Länge 0,6 m inkl. Stecker Fig. 1.13 Dimensional drawings, dimensions in mm 4x M5 - 8 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 23: Transport And Storing

    The devices are delivered in safe transport packaging. Check whether the packaging has been damaged during transport. If that is the case, notify the freight forwarder and Leybold if necessary. Keep transport packaging for any further transportation and storage of the pump.

  • Page 24: Installation

    The turbomolecular pump must be bolted to a rigid vacuum system and con- nected to a suitable backing pump. It is intended for being operated within closed rooms. The use of any accessories which have not been specified by Leybold is only allowed after approval by Leybold. 3.1.1 Non-conforming utilization...

  • Page 25: Operating Environment

    (for pumps with IP40), no explosive gas atmo spheres Installation altitude up to 4000 m At altitudes over 2000 m heat dissipation by the ambi- ent air is impaired. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 26: Fitting Accessories

    TURBOVAC has received the start command. X203 Venting valve The venting valve opens when the start com- mand is revoked and the frequency drops below 999 Hz. At 5 Hz the valve is closed again (no power failure venting!). 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 27: Attach The Pump To The Vacuum Chamber

    Mount the pump firmly to the vacuum chamber. Never operate the pump without proper flanging to the vacuum chamber (in bench testing, for example). Do not operate the vacuum pump with open flanges. Do not reach into the pump. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 28 If the strength of the component is not sufficient, there is the possibility of providing an additional safeguard via the four threaded holes for the eye-bolts for transport. Ensure that the mountings can withstand the braking torque. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 29 If several turbomolecular pumps are installed to the vacuum chamber of the same system, there is the risk of interference (vibration interference between the pumps). If such a risk exists please contact Leybold Application Support. The standard mounting arrangement for the pump is adequate to ensure earthquake protection.
  • Page 30 13 mm for aluminium 18 mm 23 mm Recommended bolts – ISO 4014 for steel flanges M10x40 for aluminium flanges M10x45 Bolt quality Fastening torque Fig. 3.3 Mounting high vacuum flange ISO-K 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 31 Minimum screw in depth L2 for steel 13 mm for aluminium 18 mm Recommended bolts – ISO 4014 for steel flanges M10x35 for aluminium flanges M10x40 Bolt quality Fastening torque Fig. 3.4 Mounting high vacuum flange ISO-K 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 32 Mount the turbomolecular pump according to Fig 3.6 and tighten the bolts crosswise step-by-step. The contact surfaces of pump housing, vacuum system and centering ring NOTICE must be free of grease and dry so as to ensure adequate strength in case the rotor should seize. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 33 Minimum screw-in depth for steel 12 mm Recommended bolts for steel flanges – DIN 835 M8x30 M8x30 L1 = Bolt quality 8.8 or A2(A4)-70 stainless steel bolts Fastening torque Fig. 3.5 Mounting the CF high vacuum flange 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 34 1350/1450 i Flange DN 200 ISO-F DN 250 ISO-F Number of bolts 12 x M10x35 Minimum bolt strength, > 640 N/mm yield strength Bolt quality Fastening torque Fig. 3.6 Mounting the ISO-F high vacuum flange 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 35: Forevacuum Connection

    Through parameter 643[1] the switch-on delay time and through parameter 644[1] a shutdown delay time in seconds can be set up (the default for both parameters is 0). 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 36: Connect The Cooling

    The accessory con- nection is so pre-configured that the air cooler will always be running when the pump is running. To change this setting, refer to the interface Operating Instructions. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 37: Water Cooling

    With pump downtimes the cooling water has to be turned off. When switching the cooling water supply on and off by means of an electric- ally actuated valve, connect the valve so that it will be switched on and off together with the pump. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 38: Water Quality

    If there is the danger of frost, you may use a water glycol mixture of up to 30 %. DS water (softened or fully desalinated water) can be used for cooling the pump, if the pH value corresponds to the range indicated above. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 39 Example: Max. ambient temperature 25 °C Min. coolant inlet temperature 17 °C ⇒ Max. relative humidity °C Minimum coolant inlet temperature Abb. 3.11 Dewpoint diagram 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 40: Connect A Power Failure Venting Valve Or A Venting Valve

    999 Hz. At 5 Hz this valve is closed again. This is no power failure venting! The limits can be changed through parameter 28[2] (upper switching thresh- 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 41: Connect Purge Gas

    Connect the purge gas supply at the valve’s inlet (G1/8“). Either connect the purge gas valve electrically separately or connect it to an accessory connection and thereafter change the function for the accessory connection. For this refer to the interface Operating Instructions. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 42: Connect A Flange Heater

    Operating Instructions. Alternatively the heating jacket may be connected through the corresponding mains power cable to the power supply. Information on baking out is also given in Section 4.6. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 43: Connect A Vacuum Gauge Head (Only For Turbovac Ix)

    Further parameters (like filter time, CTR vacuum gauge head subtype, gas type correction factor etc., for example) may be set up for the respective vac- uum gauge head. For this refer to the interface Operating Instructions. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 44: Electrical Connection

    The cable protection and voltage drop and the minimum supply voltage must be adhered to when wiring. When operating more than one pump with a single power supply, it may be necessary to fuse each pump separately due to the line protection. 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 45 Anybus interface X120 LEDs Acessory connection X201 Ethernet interface Acessory connection X202 (not usable for customers) Acessory connection X203 USB interface X106 Do not connect a power TURBOVAC iX supply to this connection! Fig. 3.15 Interfaces 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 46 Fig. 3.16 LEDs Earth (ground) connection We recommend fitting a separate earth (ground) conductor. The impedance between the pump body and the earth connection point must be < 0.1 Ω. Earth (ground) connector M6 - 8 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 47 1 and 2 connected (normal position) No error com. 1 and 9 connected Error n. c. Warning relay 14 and 15 connected (normal position) No warning com. 14 and 15 open Warning Fig. 3.17 REMOTE interface X1 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 48 Error has just occurred Start passive active Error is present; pump is at standstill Start passive active flashes Error is present; pump is decelerating Start passive active flashes Error has just occurred 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 49: Operation

    The tool is available for download free of charge on our website. www.leybold.com → Media → Downloads → Download Software → PC Software for Turbomolecular Pumps Operating Instructions 300450826 Serial Interfaces for TURBOVAC i/IX offer a detailed description of the interfaces RS 232, RS 485, Profibus and USB of the TURBOVAC.
  • Page 50 Only for TURBOVAC iX: Different applications for connected Configure the accessory connection, see interface Changing the function of the accessories Operating Instructions accessory outputs 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 51: Switching On

    In the case of critical applications you must consult our Applications Dept. first. After a mains power failure the pump can run up automatically once more if a start command is present. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 52: Shutting Down

    ■ apply a stop command via the interface ■ for the power supply units offered or recommended by Leybold switch off ■ the DC voltage. After switching off, the green status LED will flash until the rotor of the turbo- molecular pump is at standstill.

  • Page 53: Venting

    During venting, the flow Particles must be of the laminar type in both the vacuum chamber and the turbomo- lecular pump. The pump must not be vented to pressures above atmospheric pressure. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 54: Bakeout

    [0] is written to 0 by the electronics. For pumps that have been stored for more than 3 years, we recommend a preventive exchange of the ball bearings, see Section 5 Bearing replace- ment. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 55: Removing The Pump From The System

    Pack the pump so that it cannot be damaged during shipping and storage. Pay particular attention to protection for the flanges and the electrical plug. Observe the instructions in Section 5.2 if you forward the pump to Leybold. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 56: Maintenance

    Leybold Service Center or by the customer: please con- tact us for this. If you wish to exchange the bearings yourself, you will need a Leybold tool kit and spare ball bearings. Immediately after exchanging the bearings, let them run in, see Section 4.7.

  • Page 57: Bearing Monitoring And Conditioning

    Bearing on-site maintenance The bearing of the TURBOVAC can be serviced on-site. Instructions for bearing replacement can be found at https://manuals.leybold. com/en/manual-frontend/products under the part no. of the bearing exchange tool kit.
  • Page 58 LED is permanently ON BRIM is running LED is flashing 0.25 s ON and 0.25 s Pump has been stored for more than 3 years, bearing replacement is required 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 59: Troubleshooting

    The pump can continue to run, as long as opera- tion limits are only exceeded for a short time. In case of longer exceeding send pump and fre- quency converter to the Leybold service. Turbomolecular pump Interface protocol error Use USS protocol.
  • Page 60 * Default values for normal operation threshold (P25) and max. run-up time (P32), can be changed via serial interface. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 61: Waste Disposal

    Separate clean components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request. When sending us any equipment, observe the regulations given in Section “5.2 Leybold service”. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 62: Certificates

    CSA C22.2 No. 61010-1-12 cTUVus Certificate No. CU 72191742.02 The components are in compliance to the tested standards. The TÜV Rheinland of North America is a “Nationally Recognized Testing Laboratory” (NRTL) for the USA and Canada. 300855170_002_C8 - 08/2021 - © Leybold...

  • Page 63: Eu Declaration Of Conformity

    Safety requirements for electrical equipment for measurement, control and laboratory use. General requirements EN 61326-1:2013 Electrical equipment for measurement, control and laboratory use. EMC requirements. General requirements This product has been manufactured under a quality management system certified to ISO 9001:2015 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 64 This declaration becomes invalid if modifications are made to the product without prior agreement. Ian Keech – VP Engineering, Scientific Vacuum Division Axel Guddas – General Manager Burgess Hill Cologne This product has been manufactured under a quality management system certified to ISO 9001:2015 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 65 Safety requirements for electrical equipment for measurement, control and laboratory use. General requirements EN 61326-1:2013 Electrical equipment for measurement, control and laboratory use. EMC requirements. General requirements This product has been manufactured under a quality management system certified to ISO 9001:2015 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 66 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Leybold GmbH Ian Keech – VP Engineering, Scientific Vacuum Division Axel Guddas –...
  • Page 67 X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement of GB/T26572. This product has been manufactured under a quality management system certified to ISO 9001:2015 300855170_002_C8 - 08/2021 - © Leybold...
  • Page 68 Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY T: +49-(0)221-347-0 info@leybold.com www.leybold.com...

This manual is also suitable for:

Turbovac 850 i(x)Turbovac 950 i(x)Turbovac 1350 iTurbovac 1450 i

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