LEYBOLD TURBOVAC TW 250 S Operating Instructions Manual
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LEYBOLD TURBOVAC TW 250 S Operating Instructions Manual

Wide-range turbomolecular pump with integrated or external frequency converter
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LEYBOLD VACUUM
Service
Vacuum Solutions
Application Support
GA05137_1102
View our inventory
TURBOVAC
TW 250 S
Wide-Range Turbomolecular
Pump with Integrated or External
Frequency Converter
Cat. Nos.
113 52, 114 37,
800150V0007 /09 /11 /12 /13 /14 /16
and pumps modified by
Leybold Vacuum
Operating Instructions

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Summary of Contents for LEYBOLD TURBOVAC TW 250 S

  • Page 1 LEYBOLD VACUUM Service Vacuum Solutions Application Support GA05137_1102 View our inventory TURBOVAC TW 250 S Wide-Range Turbomolecular Pump with Integrated or External Frequency Converter Cat. Nos. 113 52, 114 37, 800150V0007 /09 /11 /12 /13 /14 /16 and pumps modified by...

  • Page 2: Table Of Contents

    4.1 Cleaning ....... 38 4.2 Service by LEYBOLD ..... 38 Troubleshooting .

  • Page 3: Safety Information

    Safety Information Safety information Electrical hazards Warning Failure to observe the following precautions could Mains voltage may be present at the power result in serious personal injury: failure airing valve, the purge gas valve or the venting valve. Warning The turbomolecular pump must only be The pump may be operated only with a sui- operated in the proper condition and under table frequency converter and suitable...
  • Page 4 Caution Caution Pumps with integrated frequency converter need to be shipped to the Leybold Service If foreign objects could pass from the vacu- with the frequency converter. Pump and fre- um chamber into the pump, install a wire quency converter must not be separated.

  • Page 5: Description

    Description 1 Description Use and media compatibility The TURBOVAC TW 250 S is a turbomolecular pump with integrated or external frequency converter. It is de- signed to evacuate vacuum chambers down to pressure levels in the high vacuum range. It is suitable for pum- ping air and clean, non-corrosive gases.

  • Page 6: Design

    The pumps exhibit a threaded hole, used as the connec- tion point for venting. This port is sealed at the factory with a screw and gasket ring. The TURBOVAC TW 250 S has an additional purge gas device. The purge gas is also connected at the venting port.
  • Page 7 Description High-vacuum flange Rotor Stator Bearing Motor Venting port (purge gas) Forevacuum Bearing connection Fig. 1 Section through the pump GA 05137_1102 - 12/2003...

  • Page 8: Ordering Data

    Description 1.3 Ordering data 1.3.1 Pumps TURBOVAC TW 250 S DN 100 ISO-K, air cooling, without frequency converter, with coarse splinter guard 113 52 DN 100 ISO-K, water cooling, with TURBO.DRIVE S with Profibus, without splinter guard 114 37 DN 100 ISO-K, air cooling,...
  • Page 9 Description Power supply unit - plug and play TURBO.POWER 300 800100V0002 • supplies the TURBO.DRIVE S with 24 V DC T 5 A ~ 250 V 100 - 240 V AC • plug & play cables • desktop unit or rack mountable T 5 A ~ 250 V TURBO.POWER 300 24V DC Power cable...
  • Page 10 Description Mechanical accessories Plug for connector REMOTE with integrated ON/OFF switch for the pump (Sub-D plug, 9 way) 152 48 Heat sink for frequency converter 800110V0001 Top hat rail adaptor (mounting aid for TURBO.DRIVE S and TURBO.POWER 300) 800110V0003 Accessories for serial interfaces Display PDA* (display unit for parameters, requires the software "Turbo.Drive Panel”)
  • Page 11 Description 1.3.3 Accessories for the pump Splinter guard coarse 800132V0101 Splinter guard fine 800132V0102 Vibration absorber DN 100 ISO-K 800131V0100 DN 100 CF 500 071 Water cooling unit with G 1/8” connection 200 06 255 Adaptor G 1/8“ — 1/4“ Swagelok 200 12 686 Power failure airing valve, 220/240 V AC 280 71...

  • Page 12: Technical Data

    Description 1.4 Technical data 1.4.2 TURBO.DRIVE S Supply voltage 24 V ± 5% 1.4.1 TURBOVAC Residual ripple < 2% High-vacuum connection DN 100 ISO-K When operating a TW 250 S DN 100 CF Max. power consumption 140 W Max. peak current, input side Pumping speed at 10 mbar Required power output from the...
  • Page 13 Description Ø 171 Ø 130 DN 100 ISO-K Ø 116,5 α DN 16 KF M5; 8 tief Ø 160 α Pump without frequency converter ————————————————————————————— 22° Pump with water cooling and frequency converter Frequency converter mounted with distance sleeves Fig. 2 Dimensional drawing for the pump, dimensions in mm GA 05137_1102 - 12/2003...
  • Page 14 Description Boreholes M4, ewindebohrungen 13 mm deep, for 4, 13 tief zur zusätzlichen 120° festigung der Pumpe additional fastening of the pump 7,5° 146,6 Boreholes M4, 8 mm festigungswinkel deep, for fastening of the Ventils power failure airing valve 105° Fig.
  • Page 15 Description DRIVE (X3) 24 V DC (X4) HEAT SINK HEAT SINK 23,5 RS485 (X5) TURBO.DRIVE S ERROR POWER STATUS REMOTE (X1) HEAT SINK HEAT SINK 18,1 63,8 Profibus (X105) HIGH LOW 24 V DC (X4) DRIVE (X3) Rear panel of the HEAT SINK HEAT SINK Profibus version...

  • Page 16: Connections

    Connections 2 Connections 2.1 Operating environment Caution The pumps are not suitable for pumping The maximum permissible ambient temperature of the aggressive or corrosive media or those pump is 40 °C (104 °F). Do not expose the pump or the which contain dust.

  • Page 17: Attach The Pump To The Vacuum Chamber

    Connections Legend for Fig. 6 1 High-vacuum connector flange 2 Wire mesh splinter guard 3 Forevacuum connection 4 Venting port (purge gas), M5 5 Connection for frequency converter Fig. 6 Connection elements 2.2 Attach the pump to the In most applications the pump is flanged to the high- vacuum flange at the apparatus.
  • Page 18 The order numbers for the flange components are given Insert the splinter guard so that the surface curvature is in the Leybold Catalog. at the top and apply some pressure lightly at the rim so that the splinter guard engages. The splinter guard must not touch the rotor.

  • Page 19: Forevacuum Connection

    Connections Clamping yoke Screws Centering ring KF flange from the forevacuum line Fig. 9 Connecting the forevacuum line 2.3 Forevacuum connection A separate safety valve is provided for oil-sealed foreva- cuum pumps without an anti-suckback valve. The safety valve prevents oil flowing back from the forevacuum As forevacuum pump we recommend using the dry pump into the turbomolecular pump when the system is compressing ECODRY M15 piston pump or a TRIVAC...
  • Page 20 DN 100 CF > 40 °C (104 °F) Operation not possible Operation only after consultation air cooling Water cooling Operation with Leybold possible required ≤ 40 °C (104 °F) not possible (Water cooling curve C curve D required, curve B)

  • Page 21: Cooling The Pump

    Connections °C Cooling water temperature Fig. 11 Cooling water requirements Fig. 12 Cooling air flow pattern 2.4 Cooling the pump Cooling water specifications 20 - 40 °C Feed temperature The cooling for the TW 250 S depends on the required Feed pressure 3 to 7 bar absolute pump performance and the ambient temperature;...

  • Page 22: Connect The Purge Gas And Airing Valve

    Fig. 13 Pump with power failure airing valve and mounting kit 2.5 Connect the purge gas Please contact Leybold for assistance in making the decision as to which media can be pumped with or with- and airing valve out purge gas.
  • Page 23 Connections Legend for Fig. 14 1 Turbomolecular pump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 Vent valve 8 High-vacuum valve 9 Valve in the roughing pump line 10 Electronic frequency converter —...

  • Page 24: Electrical Connection

    2.6 Electrical connection Hexagon threaded bolt The TURBO.DRIVE S frequency converter needed to operate the TURBOVAC TW 250 S has either been inte- grated in the pump or is a separate unit. For connection examples see Figs. 19 and 20.
  • Page 25 When connecting several frequency converters to a For special requirements please contact Leybold. single power supply, then each frequency converter must be fused separately.
  • Page 26 Connections REMOTE 93 - 132 / DRIVE (X3) 24 V DC 187 - 264 V~ (X4) HEAT SINK HEAT SINK 50/60 Hz 24 V Recommended for pumps and frequency converters not connected to ground 120 V Optional jumper for operating voltage range 93 - 132 V + 24 V LED POWER...
  • Page 27 Connections 100-240 V~, REMOTE 50/60 Hz max. 20 m DRIVE (X3) + 24 V T 5 A ~ 250 V 24 V DC (X4) 100 - 240 V AC HEAT SINK HEAT SINK T 5 A ~ 250 V TURBO.POWER 300 max.
  • Page 28 Connections Relay status Input data / status Output data Operating mode Start/ Pump Normal Error is Motor Relay Relay Other modes are not possible; they indicate stop rotating frequency present drive ERROR STATUS ERROR a failure affecting the TURBO.DRIVE S. NORMAL ≥...

  • Page 29: Interface Description

    Connections 2.7 Interface description The frequency converter may be equipped with either of the following interfaces (optional): • RS 232 • RS 485 • Profibus DP The TURBO.DRIVE S is configured through the para- meters according to the parameter list. Pxxx denotes parameter value xxx.
  • Page 30 Connections Internally connected Pin 4 to 6 Pin 7 to 8 Links for activation of the bus terminator Fig. 22 Pin assignment for the socket at the frequency converter (female - RS 232) 0,5 A, 24 V DC TxD/RxD + TxD/RxD –...
  • Page 31 Connections + 5 V 390 Ω For longer cable runs: Links for activation of the bus terminator Bus terminator for longer cable runs 150 Ω TxD/RxD – 120 Ω TxD/RxD + 390 Ω TURBO.DRIVE X5 (7) X5 (8) X5 (7) X5 (8) TURBO.
  • Page 32 Connections Parameter list Designation Range Unit Default Format Description Dummy parameter No function Type of frequency 130 / 131 TURBO.DRIVE S = 130 converter TURBO.DRIVE L = 131 Software version 2.x.x Actual rotor frequency 0...1300 Actual converter Nominal value for supply voltage 18...30 TURBO.DRIVE S:...
  • Page 33 Connections Designation Range Unit Default Format Description Bearing temperature Max. permissible bearing temperature shutdown level 30...150 °C P125 > P132 causes the pump to be switched off Motor temperature Max. permissible motor temperature shutdown level 30...150 °C P7 > P133 causes the pump to be switched off Error code memory Sequential permanent memory;...

  • Page 34: Operation

    For the power supply units offered or recommended by vibrations. In the case of critical applica- tions you must consult our Applications by Leybold: If the contacts 7 and 8 at the REMOTE (X1) connector are closed the pump starts automati- Dept. first.

  • Page 35: Shutting Down

    • for the power supply units offered or recommended pump. by Leybold switch off the DC voltage. After switching off, the green status LED will flash until the rotor of the turbomolecular pump is at standstill. This may take several minutes.

  • Page 36: Bakeout

    Operation mbar Time Fig. 27 Maximum rise in pressure 3.4 Bakeout lowest. When doing so, no free jet of gas must be allo- wed to form on the rotor so as to avoid exposing the rotor to additional forces. For TURBOVACs with CF flange When venting the pump through its foreline connec- If pressures in the range of 10 mbar or below are to be...

  • Page 37: Removing The Pump From The System

    Pumps with integrated frequency converter tionary measures before opening the intake need to be shipped to the LEYBOLD Servi- or exhaust connection. ce with the frequency converter. Pump and frequency converter must not be separated.

  • Page 38: Maintenance

    We recommend a standard bearing change after 20,000 operating hours at the latest. Moreover, we are recom- Whenever you send a pump to Leybold, indicate mending an exchange of the rotor unit after 45,000 ope- whether the pump is contaminated or is free of sub- rating hours at the latest.

  • Page 39: Troubleshooting

    After having removed the cause for the error reset the • Staff from Leybold-Service error message at the TURBO.DRIVE S: In some cases also a combination of the above will be needed, for example, check by the operator, rectification of the fault by maintenance staff.
  • Page 40 Possible cause Corrective action Responsible Red ERROR LED is on: Short circuit in the pump’s motor Repair the pump. Leybold service Error code 4: Short circuit Short circuit in the connecting Check to see if the connecting cable is Operator/ error cable undamaged, exchange it if required.
  • Page 41 Wrong Profibus address set. Set address between 0 and 126 Operator/ Maintenance staff Turbomolecular pump pro- Rotor out of balance. Balance the rotor. Leybold service duces loud running noises Bearing defective. Replace the bearing. Leybold service and vibrations. Turbomolecular pump does Measurement instrument Inspect the measurement sensor.

  • Page 42: Spare Parts

    Spare Parts 6 Spare parts Designation Order No. Blind plug with gasket, M5 200 23 006 Clamping yoke DN 16 200 18 372 Screw M4 x 10 200 18 489 O ring 18 x 5, FPM 239 70 176 Centering ring DN 16 KF 231 94 205 Blank flange DN 16 KF 361 20 205...

  • Page 43: Eec Manufacturer's Declaration

    EEC Manufacturer’s Declaration in the sense of EEC Directive on Machinery 89/392/EWG, Annex IIb We - LEYBOLD Vakuum GmbH - herewith declare that Applied harmonized standards: operation of the incomplete machine defined below, is • EN 292 Part 1 & 2 Nov.
  • Page 44 Declaration of Conformity as defined by the EMC guideline 89/336/EWG with revisions 91/263/EWG and 93/68/EWG RIR-TDS2-EMV Product: TURBO.DRIVE S 2000-12-07 We herewith declare sole responsibility for the product meet the requirements outlined in the EG requirements on 89/336/ EWG (EMC guideline) with revisions 91/263/EWG and 1.
  • Page 45 Declaration of Conformity as per EG Low-Voltage Guidelines 73/23/EWG, Attachment lll B RIR-TDS2-NSR Product: TURBO.DRIVE S 2000-12-07 We herewith declare sole responsibility for the product including the required accessories, as agreeing with EG guide- lines 72/23/EWG, and 93/68/EWG. 1. Product: Inverter 2.
  • Page 46 The system TURBOVAC TW 250 S / TURBO.DRIVE S, turbomolecular pump with frequency converter, has been tested by the TÜV Rheinland of North America according to the requirements of • NRTL (applied standards UL 3101-1/10.93) It is in compliance to the tested standards.
  • Page 47 Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- tion.

  • Page 48: Index

    Index Index fan 6, 7, 21, 39 ON/OFF switch 10, 34 forevacuum connection 7, 12, 17, 19 acceleration 28 forevacuum pressure 6, 12, 14, 20, 36, adsorption trap 19, 23, 38 particles 35, 36 forevacuum pump 5, 19, 23, 34-36, 39, aggressive 5, 16, 35 polarity 25, 40 airing 3, 11, 14, 22...
  • Page 49 Notes GA 05137_1102 - 12/2003...
  • Page 50 EUROPE AMERICAS ASIA Germany: Italy: USA: P.R. China: Japan: LEYBOLD VAKUUM GmbH LEYBOLD VACUUM LEYBOLD VACUUM USA INC. LEYBOLD VACUUM Sales: Bonner Straße 498 (Bayent- ITALIA S.p.A. 5700 Mellon Road (Tianjin) LEYBOLD VACUUM hal) 8, Via Trasimeno Export, PA 15632 International Trade Co., Ltd.

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