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Table of Contents
Related Manuals for LEYBOLD TURBOLAB 90
Summarization of Contents
Safety Information
Obligation to Provide Information
User must read and follow operating instructions for safe operation.
Safety Level Definitions
Defines DANGER, WARNING, CAUTION, NOTICE for hazard communication.
0 Important Safety Information
0.1 Mechanical Hazards
Details hazards related to mechanical aspects of the pump system.
0.2 Electrical Hazards
Details hazards related to electrical connections and components.
0.3 Hazards Caused by Materials and Substances
Details hazards from handling specific materials and substances.
0.4 Danger of Damages to the Pump System
Details potential damages to the pump system and how to avoid them.
Description
1 Description
Introduces the TURBOLAB pump systems as vacuum units.
1.1 Design
Details the components that make up the TURBOLAB pump systems.
1.2 Standard Specification
Outlines the standard components supplied with the pump system.
1.3 Technical Data
Provides technical specifications for pumps and systems.
1.3.1 Backing pumps
Provides technical data for various backing pump types.
1.3.2 Pump systems
Provides technical data for different TURBOLAB pump system configurations.
1.4 Ordering Information
Lists part numbers for various TURBOLAB system configurations.
1.5 Accessories
Lists available accessories and their part numbers.
Transport and Storing
2 Transport and Storing
Instructions for safe handling, transport, and storage of the pump system.
Installation
3 Installation
General guidance on installing the TURBOLAB pump system.
3.1 Placement
Guidance on selecting an appropriate location for installing the pump system.
3.2 Conforming Use
Defines the intended applications and limitations of the pump systems.
3.3 Ambient Conditions
Specifies environmental conditions suitable for pump operation.
3.4 Installing the Backing Pump
Instructions for connecting and installing the backing pump.
3.5 High Vacuum Connection
Instructions for establishing the high vacuum connection to the pump.
3.5.1 Removing the TURBOVAC Pump from the Pump System
Procedure for detaching the TURBOVAC pump from the system.
3.6 Connecting the Exhaust Line
Guidance on connecting the exhaust line from the backing pump.
3.7 Connect the Cooling
Instructions for connecting cooling systems (air/water) for the pump.
3.7.1 Cooling Water
Specifications and guidelines for cooling water quality and connection.
3.8 Connect a Power Failure Venting Valve or a Venting Valve
Instructions for connecting venting valves.
3.9 Connect Purge Gas
Instructions for connecting purge gas systems.
3.10 Connect a Flange Heater
Instructions for connecting a flange heater for bakeout.
3.11 Connect a Gauge
Instructions for connecting vacuum gauges.
3.12 Connect a PC/Mobile Device
Instructions for connecting a PC or mobile device for control.
3.13 Electrical Connection
Instructions for making the main electrical connections to the pump system.
Operation
4 Operation
Overview of operating the TURBOLAB pump system.
4.1 Media Compatibility / Purge Gas
Information on compatible media and purge gas usage.
4.2 Interfaces
Details the available interfaces and their functions.
4.3 Switching On
Steps to safely switch on the pump system.
4.4 Operation
Detailed operational procedures and system controls.
4.4.1 Menu
Overview of the main menu structure and navigation.
Turbopump menu
Details on configuring turbopump start functions and parameters.
Gauges menu
Details on configuring vacuum gauges and their settings.
Parameter menu
Information on accessing and changing system parameters.
System menu
Details on system settings like language, clock, and network.
4.4.2 Function Codes of the Accessory Connections
Explains function codes for accessory outputs (e.g., Fan).
Function X204 Purge gas valve
Details function codes for the purge gas valve.
Function X203 Venting valve
Details function codes for the venting valve.
Functions 24VDC Output backing pump (X206, X210, X211)
Explains function codes for 24VDC backing pump outputs.
Function pressure dependent switch-on of the turbo pump
Details pressure-dependent start-up for the turbo pump.
4.4.3 Relay Functions
Explains normal operation, error, and warning relay functions.
4.4.4 Parameter list
Lists and defines various operational parameters.
4.4.5 Monitoring of the Operation Conditions
Explains how to interpret LED status indicators for operation monitoring.
4.5 Shut-down
Procedures for safely shutting down the pump system.
4.6 Venting
Methods and considerations for venting the pump system.
4.7 Bakeout
Instructions for performing bakeout procedures on the pump.
4.8 Webserver
Instructions for connecting and using the webserver interface.
Start Screen
Overview of the start screen for pump operation and control.
LCD View
How to view pump system information via the web server.
Error Memory
How to access and interpret the pump's error log.
DataViewer
Tool for analyzing and visualizing recorded pump data.
Establishing the Link
Steps to establish a connection with the pump system via IP address.
Configuration Menu
How to change accessory functions and save settings.
X1 Interface (Menu I/O X1)
How to configure relay functions and analog outputs for the X1 interface.
Gauges
Details on selecting gauge units, types, and correction factors.
Turbomolecular pump (Menu TMP)
Options for starting the turbomolecular pump based on command or pressure.
Parameters
How to select and change parameters using the menu.
System Menu
User profile management for the web server.
File Upload
Instructions for loading or removing files, including software updates.
Data List
How to view and interpret recorded data points.
Logging Cycle
Information on setting the data logging interval.
Maintenance
5 Maintenance
Recommendations for maintenance and service of the pump system.
Rotor exchange
Information on rotor unit exchange and Leybold Service.
Purge gas filter
Maintenance for the purge gas filter, including exchange intervals.
Adsorption trap
Maintenance for adsorption traps, including regeneration and renewal.
5.1 Cleaning
Instructions for cleaning the pump system surfaces.
Cleaning the frequency converter internally
Internal cleaning of the frequency converter by Leybold Service.
Cleaning the TURBOVAC internally
Internal cleaning of the TURBOVAC, including bakeout.
5.2 Oil of the Rotary Vane Pump
Guidelines for checking and changing the rotary vane pump oil.
5.3 Removing the Backing pump
Steps for detaching and removing the backing pump.
5.4 Leybold Service
Procedures for sending equipment for service, including contamination declaration.
Troubleshooting
6 Troubleshooting
Guidance for diagnosing and resolving pump system issues.
Error Code Reference
Lists error codes, designations, possible causes, and remedies.
Disposal
7 Waste Disposal
Information and procedures for waste disposal of the equipment.
Contamination
Procedures for decontaminating equipment before disposal or service.
Disposal of Waste Oil
Guidelines for the proper disposal of waste oil.
EU Declaration of Conformity
EU Declaration of Conformity
States compliance with EU directives and harmonized standards.
Sales and Service Locations
Global Sales and Service Network
Lists contact information for Leybold offices worldwide.
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