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Table of Contents
Related Manuals for LEYBOLD TURBOVAC 340 M
Summary of Contents for LEYBOLD TURBOVAC 340 M
- Page 1 LEYBOLD VACUUM Vacuum Pumps Instrumentation Fittings and Valves GA 05.123/3.02 TURBOVAC 340 M 340 MC Pumps International 340 MCT 341 MCT www.PumpsInt.com Turbomolecular Pumps with Magnetic Bearing Cat. No. 855 80/81/82/83 894 32, 855 97 894 33 894 34 Operating Instructions...
- Page 2 4.2 Removing the pump from the system ..26 4.3 Service at Leybold’s ....26...
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Page 3: Description
TURBOVAC 340 MC 1 Description www.PumpsInt.com The TURBOVAC 340 M, 340 MC, 340 MCT, and 341 The TURBOVAC are fitted with purge gas device. The MCT are turbomolecular pumps utilizing magnetic bea- gas protects only the bearing section and the TURBO- rings.They are designed to evacuate vacuum chambers... -
Page 4: Design Of The Turbovac
Description 1.1 Design of the 1.2 Temperature control - TURBOVAC TURBOVAC MCT The TURBOVAC is similar in design to the turbomole- The TURBOVAC MCT are equipped with a temperature cular pumps equipped with ball bearings; it comprises control to keep the temperature at the TURBOVAC con- basically the pump housing, the multi-stage rotor with stant within a narrow control range. - Page 5 2 Upper touch-down bearing 3 Rotor 4 Stator elements 5 Permanent-magnet bearing at center of gravity 6 DC motor 7 Bottom touch-down bearings 8 Purge gas connection 9 Stabilizer 10 Axial sensor Fig. 3 TURBOVAC 340 M turbomolecular pump GA 05.123/3.02 - 12/95...
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Page 6: Purge Gas
Description Key to Fig. 4 1 Purge gas connecting flange 2 Throttle nozzle 3 Sintered metal filter 4 O-rings 5 Diaphragm filter 6 Hose nozzle 7 Venting bypass 8 Solenoid valve 9 Plug 10 Pin Fig. 4 Purge gas and venting valve fitted to a TURBOVAC (schematic) Pumps International 1.3 Purge gas... -
Page 7: Technical Data
Description 1.5 Technical data TURBOVAC 340 M 340 M 340 MC 340 MC 340 MCT 341 MCT High-vacuum connection flange 100 ISO-K 160 ISO-K 100 ISO-K 160 ISO-K 100 ISO-K 100 ISO-K 100 CF 160 CF Pumping speed for l·s l·s l·s Compression for... - Page 8 D = Purge gas flange E = Connection for cooling ø178 ø178 = Connection for DC motor = Connection for stabilizer = Connection for axial sensor Dimensions in mm Pumps International TURBOVAC 340 M TURBOVAC 340 MC www.PumpsInt.com 60˚ 60˚ 60˚ 60˚ ø178 ø178...
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Page 9: Ordering Data
Description 1.6 Ordering data TURBOVAC 340 M 340 MC 340 MCT 341 MCT with high vacuum connection flange DN 100 ISO-K 855 80 894 32 894 33 894 34 DN 100 CF 855 81 DN 160 ISO-K 855 82 855 97 DN 160 CF 855 83 Electronic frequency converter... -
Page 10: Installation
You will find the order numbers for the (clamping) bolts ceed 5 mT, up to 8 mT is permissible for intermittent in the Leybold-Catalog. exposure; (1 mT (milliTesla) = 10 G (Gauß)) Exceeding this limit value can cause excessive rotor... - Page 11 Installation Weight of the vacuum chamber > 100 kg (220 Ibs) max. 100 mm (4 inch) max. 100 mm (4 inch) Weight of the vacuum chamber > 100 kg (220 Ibs) max. 100 mm Wrong (4 inch) Pumps International Fig. 7 Flanging the TURBOVAC permanently to the vacuum chamber www.PumpsInt.com The TURBOVAC runs low in vibration and noise.
- Page 12 100 mm (4 inch) max. 100 mm (4 inch) max. 100 mm (4 inch) Permissible only for TURBOVAC 340 M Pumps International www.PumpsInt.com Fig. 8 Flange mounting using vibration absorbers Integrating the outer centering ring Fig. 9 Using ISO-K flanges...
- Page 13 Installation Key to Fig. 10 1 Cooling water connection 2 Connection for axial sensor 3 Stabilizer connection 4 Forevacuum connection flange 5 Red LED, lights when the magnetic bearing is active 6 DC motor connection 7 Venting flange 8 High-vacuum connection flange 9 Splinter guard 10 Purge gas connection flange Pumps International...
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Page 14: Connecting The Backing Pump
Installation Torque with rotating-out-direction < 35 Nm (26 ft-lb) Torque with fixed direction of rotation M < 54 Nm (40 ft-lb) Torque diagonally versus forevacuum connection axis < 50 Nm (37 ft-lb) View A Fig. 11 Maximum torques for the screwed-in forevacuum connection flange 2.3 Connecting the backing We recommend installing a sorption trap in the fore-line to insure that the forevacuum chamber in the TURBO-... -
Page 15: Connecting The Cooling
Installation Key to Fig. 12 Turbomolecular pump Forevacuum gauge point Backing pump Anti-vibration bellows Sorption trap Forevacuum valve Pumps International Venting valve High-vacuum valve Purge gas connection 10 Valve in the roughing line www.PumpsInt.com 11 Electronic frequency converter — — — — roughing line; recommended if shorter cycle times are to be achieved —... - Page 16 Installation Key to Fig. 13 1 Cooling coil for pump housing 2 Heating collar 3 Temperature sensor Pt 100 4 Magnetic valve for water cooling Pumps International www.PumpsInt.com Fig. 13 TURBOVAC 341 MCT; 340 MCT similar Temperature control Slightly higher temperatures (between 25°C and 30°C; (for TURBOVAC 340/341 MCT only) 77°F and 86°F) are also acceptable and present no hazard to the pump.
- Page 17 Installation = 250 °C Vacuum chamber (482 °F) = 100 °C (212 °F) Pump flange = 100 °C (212 °F) Pump flange = 150 °C (302 Vacuum chamber With water cooling in all mounting positions = 250 °C (482 °F) Vacuum chamber = 100 °C (212 °F) Pump flange...
- Page 18 Connect the purge gas valve to the TURBOTRONIK. Connect a purge gas valve when pumping reactive media. Leybold will provide technical support when making the decision as to which media can be pumped with or with- out purge gas. When using purge gas, the larger volume of gas at the...
- Page 19 Installation Key to Fig. 16 1 Purge gas connecting flange 2 Throttle nozzle 3 Sintered metal filter 4 O-rings 5 Diaphragm filter 6 Hose nozzle 7 Venting bypass 8 Solenoid valve 9 Plug 10 Pin Pumps International www.PumpsInt.com Fig. 16 Purge gas and venting valve fitted to a TURBOVAC (schematic) Ar, Air, N Purge gas flow...
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Page 20: Attaching The Flange Heater
Installation 2.6 Attaching the flange 2.7 Connecting the TUR- heater BOTRONIK Refer to the TURBOTRONIK Operating Instructions for (only for pumps with CF flange) details regarding its mounting, connection and operation. The flange heater is used to bake out, under automatic The electronics for the magnetic bearings will have to be control, the high-vacuum port at the TURBOVAC and the adjusted to accommodate the particular pump mounting... -
Page 21: Switching On
Operation mbar Time/s Fig. 18 Minimum pump out time for the TURBOVAC Pumps International 3 Operation www.PumpsInt.com 3.1 Switching on 3.2 Operation First of all, open the purge gas supply, then press the The magnetic bearing in the TURBOVAC are immune to START button at the TURBOTRONIK;... -
Page 22: Bake-Out
Operation Warning 3.4 Switching off Monitor the purge gas flow continuously. Insufficient purge gas flow can result in: See the TURBOTRONIK Operating Instructions. - Process gases entering the motor and Vent the TURBOVAC before it comes to a full standstill; bearing area of the TURBOVAC see Section 3.5. - Page 23 Operation mbar Time/s Fig. 19 Curve for safe venting of the TURBOVAC; pressure rise as a function of venting time Pumps International 3.5 Venting Caution www.PumpsInt.com The pressure in the motor and bearing chamber of the TURBOVAC must always Vent the TURBOVAC each time it is shut down, in order be higher than that in the forevacuum to prevent any return diffusion of oil vapors out of the chamber.
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Page 24: Power Failure - Cable Break
Operation 3.6 Power failure - Cable break If there is a power failure or if the mains plug is accident- ally disconnected, the TURBOTRONIK automatically switches over to generator operation to drive the TURBOVAC. In this way the active magnetic bearing control circuits will be kept in operation as the pump runs down, until the rotor seats on the touch-down bearings once it has reached a low speed. -
Page 25: Maintenance
Reconnect the purge gas hose to the hose nozzle. If you send a purge gas valve to Leybold for repair, in- dicate any harmful substances which may be in or at the valve. -
Page 26: Removing The Pump From The System
- polyethylene bag with cable ties. 4.3 Service at Leybold’s Warning If you send a pump to Leybold indicate whether the If the pump has previously pumped hazard- pump is free of substances damaging to health or ous gases take the appropriate safety mea- whether it is contaminated. - Page 27 Maintenance Pumps International www.PumpsInt.com Key to Fig. 21 1 Polyethylene bag 2 Cable tie 3 Plastic caps 4 Plastic adhesive film 5 Venting connection flange (blanked off) 6 Dry cartridge Fig. 21 Sealing the TURBOVAC tightly GA 05.123/3.02 - 12/95...
- Page 28 Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- tion.
- Page 29 Was the turbopump replaced? Yes; Pumps International If yes, replacement pump P/N: replacement pump S/N: Date Installed: Date Removed: Date Received: www.PumpsInt.com Date Examined: Examined by: Received Condition: Findings: Cause of Failure: Recommendations: Remarks/Questions: LEYBOLD AG GA 05.123/3.02 - 12/95...
- Page 30 EEC Manufacturer’s Declaration in the sense of EEC Directive on Machinery 89/392/EWG, Annex IIb We - Leybold Vacuum GmbH - herewith declare that Catalog Numbers: 855 80/81/82/83 operation of the incomplete machine defined below, is 894 32, 855 97 not permiss-ible until it has been determined that the...
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