LEYBOLD TURBOLAB 80 Operating Instructions Manual
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LEYBOLD TURBOLAB 80 Operating Instructions Manual

Turbomolecular pump systems
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LEYBOLD TURBOLAB 80 Operating Instructions Manual

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Summary of Contents for LEYBOLD TURBOLAB 80

  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 TURBOLAB TURBOLAB 80, 90, 250, 350, 450 Turbomolecular Pump Systems Operating Instructions 300554859_002_C0 Part Nos. 501592Vxxxxxxxx Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 3: Table Of Contents

    Connect a Power Failure Venting Valve or a Venting Valve Connect Purge Gas 3.10 Connect a Flange Heater 3.11 Connect a Gauge 3.12 Connect a PC/Mobile Device 3.13 Electrical Connection 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 4 Removing the Backing pump Leybold Service Troubleshooting Waste Disposal EC Declaration of Conformity These Operating Instructions are a translation of the German instructions 300554859_001_C0. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Leybold turbomolecular pump system has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and through- out the Operating Instructions.

  • Page 6: Important Safety Information

    Do not open the switchbox and do not remove any covers from the electrical equipment. Do not disconnect any earth connections. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 7: Hazards Caused By Materials And Substances

    Applications Dept. first. The pump must only be opened by such persons who have been authorised by Leybold to do so. Ensure that no items like bolts, nuts, washers, pieces of wire, for example, enter into the inlet of the pump. Foreign objects which enter into the pump will generally cause severe damage.
  • Page 8 Description TURBOLAB 350/450 TURBOLAB 80 TURBOLAB 80 Cart TURBOLAB 350/450 Cart Fig. 1.1 Turbomolecular pump systems TURBOLAB 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 9 Description TURBOLAB 90 TURBOLAB 90 Cart TURBOLAB 90 Cart without backing pump Fig. 1.2 Turbomolecular pump systems TURBOLAB 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 10 Description TURBOLAB 250 TURBOLAB 250 Cart TURBOLAB 250 Cart without backing pump Fig. 1.3 Turbomolecular pump systems TURBOLAB 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 11: Description

    The function for the accessory connection is set by default to “Active at Start Command” and this setting can be changed through Menu → Accessory → VV Pump. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 12: Standard Specification

    This must be removed before initial startup. Mains cables are not supplied, and must be ordered separately. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 13 TPU not shown Metal hose Adsorption trap Backing pump Exhaust filter Fig. 1.4 Schematic diagram of the turbomolecular pump systems TURBOLAB 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 14: Technical Data

    3680 3680 Product identification To correctly identify the product when communicating with Leybold, always have the information from the rating plate available. The nameplate is located next to the power supply connection MAINS X20. 300554859_002_C0 - 11/2016 - © Leybold...
  • Page 15 Description Fig. 1.5 Dimensional drawing TURBOLAB 80, dimensions in mm Fig. 1.6 Dimensional drawing TURBOLAB 80 Cart, dimensions in mm 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 16 DN 63 ISO-K DN 16 KF MAINS (X20) DN 25 KF Fig. 1.8 Dimensional drawing TURBOLAB 90 Cart, dimensions in mm 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 17 Fig. 1.9 Dimensional drawing TURBOLAB 250, dimensions in mm Ø 130 DN 100 ISO-K DN 16 KF MAINS (X20) Fig. 1.10 Dimensional drawing TURBOLAB 250 Cart, dimensions in mm 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 18 Description Fig. 1.11 Dimensional drawing TURBOLAB 350/450, dimensions in mm Fig. 1.12 Dimensional drawing TURBOLAB 350/450 Cart, dimensions in mm 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 19: Ordering Information

    DN 63 ISO-K 501592V00200000 Table without DN 63 CF 501592V01200000 backing DN 63 ISO-K 501592V00210000 pump Cart DN 63 CF 501592V01210000 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 20 DN 100 ISO-K 501592V08200000 Table without DN 100 CF 501592V09200000 backing DN 100 ISO-K 501592V08210000 pump Cart DN 100 CF 501592V09210000 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 21 DN 160 ISO-K 501592V06200000 Table without DN 160 CF 501592V07200000 backing DN 160 ISO-K 501592V06210000 pump Cart DN 160 CF 501592V07210000 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 22: Accessories

    Accessory cable TURBOLAB - TURBOVAC 90/250 i (24 V DC voltage supply), 0.55 m 800103V0042 Connection cable Type A, 1.5 m 800103V0032 12426 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 23 For space reasons, when the frequency converter is installed at the side, 800110V0011 800152V0013 800110V0012 only either the air-cooler or a purge gas valve can be connected. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 24 800132V0021 DN 160 CF 800132V0031 Splinter guard (0.8 mm) DN 63 CF 800132V0012 DN 100 CF 800132V0022 DN 160 CF 800132V0032 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 25: Transport And Storing

    Remove the equipment from the transportation box and keep the packaging. Make sure that the product has not been damaged during transportation. If this unit is damaged contact your carrier and inform Leybold if necessary. For storage of the product, use the packaging pro vided.

  • Page 26: Installation

    Install the pump system such that a clearance of at least 10 cm is left on each side of the pump system for ventilation. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 27 Only put the TURBOLAB 90 and 250 into operation if the pump is fastened securely on the TURBOLAB by means of the safety strap. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 28: Conforming Use

    The pump system must only be used in indoor rooms. Protect the pump sys- tem and the connecting lines against splash water and condensing water. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 29: Installing The Backing Pump

    The laying of the connection line must comply with general safety regula- ■ tions. Take note of the rotational direction of the backing pump. ■ 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 30 Cable connector 0° 03pol. Sti MediSnap S1 S21M07-P03MPN9-657S ODU Black nozzle: 701.023.208.965.070 Fig. 3.4 Assignment X206 FV DC (view from outside) 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 31: High Vacuum Connection

    Do not remove the transport covers on the pump until shortly before fitting, to ensure that the TURBOVAC is fitted under the cleanest conditions. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 32 To decouple extremely sensitive equipment and to pre- vent transfer of external vibrations to the pump a special resonance damper is available for mounting at the high-vacuum flange. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 33: Removing The Turbovac Pump From The Pump System

    Fit in the mounting panel to the pump system to a tightening torque of 5 Nm. 5 m long wiring between the removed pump and the TURBOLAB pump sys- tem is available. See Section Accessories. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 34 Installation TURBOLAB 90 drawn, TURBOLAB 80 similar Fig. 3.7 Removing the mounting panel 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 35: Connecting The Exhaust Line

    The accessory connection is so pre-configured that the air cooler will always be running when the pump is running. To change this setting: Menu → Accessory → Fan. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 36: Cooling Water

    If there is the danger of frost, you may use a water glycol mixture of up to 30 %. DS water can be used for cooling the pump, if the pH value corresponds to the range indicated above. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 37 Forevacuum connection Accessory connection DC OUT (M8) X201 Fig. 3.10 Connections at the TURBOVAC 90 i, TURBOVAC 250 i is similar 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 38: Connect A Power Failure Venting Valve Or A Venting Valve

    (via the TPU interface). The pressure in the pump must not exceed atmospheric pressure. WARNING Observe Safety Information 0.1.2 to 0.1.5. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 39: Connect Purge Gas

    Observe Safety Information 0.1.2 to 0.1.5. The purge gas is fed either through an activated valve or a manually operated throttle. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 40 Unscrew and remove the locking screw and the gasket from the purge gas connection of the pump. Then screw in the throttle and the gasket into the thread. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 41: Connect A Flange Heater

    MAINS (X20) FV AC (X211) Fig. 3.14 Electric connections, fuses and switches (bottom view onto TURBOLAB 80, 90, 250, 80 Cart, 90 Cart and 250 Cart) 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 42: Connect A Gauge

    X1 Ethernet. Otherwise, it will only be possible to read parameters. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 43: Electrical Connection

    Plug the mains cable into the mains socket. For an overview of the connections, see fig. 3.14 and 3.15. When connecting accessories, use only original Leybold oil filters and gas admission filters since the design of these components is such that proper earthing is ensured.

  • Page 44: Operation

    In individual cases and after consultation also dry, filtered, oil-free air or filte- red ambient air may be used (filter mesh < 1µm). Change the filters after some time, at least annually. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 45: Interfaces

    110/230VAC power supply for backing pump (swit- ched via internal relay) (default: active for start com- mand). 110-230VAC power supply for TURBOLAB (plus On/ Off switch). 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 46 Warning relay 14 and 15 connected (normal position) No warning com. 14 and 15 open Warning Fig. 4.1 REMOTE interface X1 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 47: Switching On

    For water cooled TURBOVACs open the cooling water supply. Avoid causing jolts or vibration when operating the pump system. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 48: Operation

    To simplify the diagram, setting up of the relay errors, warnings and the analogue output is not described here. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 49 X101 Further functions for the turbomolecular pump are described in one of the following chapters. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 50 Saving can take several seconds. During this time, the pump must not be disconnected from its power supply. Initiating the saving process will cause all preceding changes to be saved. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 51 For opening the webserver QR Link Display the QR link Resets all parameter changes to factory defaults. Factory defaults F3, reset to factory defaults 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 52: Function Codes Of The Accessory Connections

    Unterschreiten des Wertes. Upper limit = Obere Grenze = lower limit Untere Grenze Output Ausgang 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 53 Ausschaltverzögerungszeit > 0 Switch-on delay time > 0 Einschaltverzögerungszeit > 0 Status-, Steuerwort Bit Zubehöranschluss Ausschaltverzögerungszeit > 0 Einschaltverzögerungszeit > 0 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 54 Startsignal Lower limit Untere Grenze Control word bit 00 Steuerwort Bit 00 Control word bit Output Steuerwort Bit Ausgang Ausgang Output 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 55 (maximum current): (current is increas- (max. Strom): (Strom steigt): ing): backing pump backing pump Vorpumpe dreht Vorpumpe dreht is turning is turning 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 56 Start signal Startsignal Speed Drehzahl Normal Op. Normal op. Pressure Druck Upper limit Obere Grenze Lower limit Untere Grenze Output Ausgang 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 57 Start command Startbefehl Pressure Druck Lower Untere pressure limit Druckgrenze Pump start Pumpe Start Delay times = 0 Verzögerungszeiten = 0 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 58: Relay Functions

    Function Default Active at error Inactive at error Warning Relay Function code Function Active at warning Default Inactive at warning 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 59: Parameter List

    1 = 1st phase active tion 2 = 2nd phase active 4 = 3rd phase active 8 = 4th phase active 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 60 Converter part number Converter part number. One ASCII character per index. [0..17] Converter serial number [1..17] Pump serial number not used [0..17] 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 61: Monitoring Of The Operation Conditions

    Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn (the green LED is off). 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 62: Venting

    The pump must not be vented to pressures above atmospheric pressure. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 63: Bakeout

    When baking out the pump, operate it with the water-cooling system on. Following bakeout, retighten the clamp screws on the flange heater, if required. Leave the flange heater on the TURBOVAC. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 64: Webserver

    ETH Remote. Otherwise, it will only be possible to read parameters Logging in Username: user Password: user Then press LOGIN. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 65 Pump type Status indicators System name Process data Function keys of system control Function keys for the accessories Fig. 4.6 Start screen 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 66 The operating time at the point of time the error has occurred is also indicat- ed. By clicking on the corresponding line of the error, a detailed description will be displayed. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 67 Through parameter I900 you may modify the LoggingCycle. Through the LoggingCycle you may define the distance in time the individual data records are recorded. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 68 Section “Relay Functions”. For the analog output you may select between six different functions. Through SET and SAVE the values are saved. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 69 System Menu User Profile Through the user profile you may change the log-in data for the web server. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 70 This file with the current settings may then be imported to a different device or used for backing up data. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 71 A software update can be run on the same principle as described in the “File Upload”. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 72 Fig. 4.15 Webserver views: Accessory setting You may also operate the web server on a smart phone; then the menus will look slightly different, see above. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 73: Data Viewer

    IP address is correct then it will be displayed in the “Devices Window. To establish the link, click on the IP address and confirm through Connect. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 74 ALT + left mouse button. To remove or show the data, switch the checkmark at the corresponding data off or on. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 75 When wanting to remove any added devices from the device list, remove these entries from the file “device.txt”. This file can be found in the DataViewer Folder. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 76: Maintenance

    (dust, humidity). Such contami- nation can result in malfunctions, overheating or short circuits and therefore needs to be avoided as far as possible. The Leybold Service can clean the frequency converter. Here we are recommending clean ing intervals of approx- imately 5 years.

  • Page 77: Oil Of The Rotary Vane Pump

    Maintenance The pump will have to be disassembled if there is more extensive contamina- tion. The Leybold Customer Service Department will have to be consulted here in all cases. Oil of the Rotary Vane Pump The TRIVAC or SOGEVAC requires for proper operation sufficiently fresh and suitable oil.

  • Page 78: Troubleshooting

    Gas flow too high Seal leak, check process Rotor blocked Check if the rotor turns freely. Contact Leybold Service if the rotor is damaged or blocked. Bearing temperature error. The maxi- Forevacuum pressure too Check the ultimate pressure of the backing high.
  • Page 79 F4 has blown. and 3.10. Reset error, try to restart. If this is not possible inform Leybold Service or send in the pump. EEPROM error (CRC) inconsistent data Reset error, try to restart. If this is not possible in the EEPROM inform Leybold Service or send in the pump.
  • Page 80 Check fuse F5 (2 A slow-blow) and replace as required. The location of the fuses is indicated in fig. 3.14 and 3.15. 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 81: Waste Disposal

    Waste oil from vacuum pumps must not be mixed with other substances or materials. Waste oil from vacuum pumps (Leybold oils which are based on mineral oils) which are subject to normal wear and which are contaminated due to the influence of oxygen in the air, high temperatures or mechanical wear must be disposed of through the locally available waste oil disposal system.

  • Page 82: Ec Declaration Of Conformity

    EC Declaration of Conformity 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 83 Notes 300554859_002_C0 - 11/2016 - © Leybold Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 84 Person to contact: Calibration: Factory-calibr. Phone : Fax: Quality test certificate DIN 55350-18-4.2.1 End user: A. Description of the Leybold product: Failure description: Material description : Catalog number: Additional parts: Serial number: Application-Tool: Type of oil (ForeVacuum-Pumps) : Application- Process: B.
  • Page 85 Sales and Service Germany America Great Britain Leybold Japan Co., Ltd. Tsukuba Technical Service Center 1959, Kami-yokoba Leybold UK LTD. Leybold GmbH Tsukuba-shi, Ibaraki-shi 305-0854 Unit 9 Sales, Service, Support Center (3SC) Japan Silverglade Business Park Bonner Strasse 498 Leybold USA Inc.
  • Page 86 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

This manual is also suitable for:

Turbolab 90Turbolab 350Turbolab 450Turbolab 250

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