LEYBOLD TURBOVAC 950 i Manuals

Manuals and User Guides for LEYBOLD TURBOVAC 950 i. We have 2 LEYBOLD TURBOVAC 950 i manuals available for free PDF download: Manual, Operating Instructions Manual

LEYBOLD TURBOVAC 950 i Manual (68 pages)

Turbomolecular Pumps with Integrated Frequency Converter

Brand: LEYBOLD | Category: Water Pump | Size: 4 MB

Table of Contents
2
Important Safety Information
5
Safety Symbols
5
Mechanical Hazards
6
Electrical Hazards
7
Thermal Hazards
7
Danger through Materials and Substances
7
Dangers in Connection with Safety-Related Measures and Precautions
7
Description
8
Design
10
Standard Equipment
10
Technical Data
11
Technical Data for the Integrated Drive Electronics
12
Pumping Speed Curves
13
Operation Diagrams
15
Ordering Data
19
Transport and Storing
23
Installation
24
Conforming Utilization
24
Non-Conforming Utilization
24
Operating Environment
25
Fitting Accessories
26
Attach the Pump to the Vacuum Chamber
27
Forevacuum Connection
35
Connect the Cooling
36
Air Cooling
36
Water Cooling
37
Water Quality
38
Connect a Power Failure Venting Valve or a Venting Valve
40
Connect Purge Gas
41
Connect a Flange Heater
42
Connect a Vacuum Gauge Head (Only for TURBOVAC IX)
43
Electrical Connection
44
Operation
49
Media Compatibility / Purge Gas
49
Interfaces
49
Switching on
51
Shutting down
52
Venting
53
Bakeout
54
Operation after a Longer Storage Period
54
Removing the Pump from the System
55
Maintenance
56
Cleaning
56
Leybold Service
56
Bearing Monitoring and Conditioning
57
Troubleshooting
59
Waste Disposal
61
Certificates
62
EU Declaration of Conformity
63

LEYBOLD TURBOVAC 950 i Operating Instructions Manual (54 pages)

Turbomolecular Pumps with Integrated Frequency Converter

Brand: LEYBOLD | Category: Water Pump | Size: 3 MB

Table of Contents
2
Important Safety Information

5
1 Description

8
- Design
  9
- Standard Equipment
  9
- Technical Data
  10
- Technical Data for the Integrated Drive Electronics
  11
- Pumping Speed Curves
  12
- Operation Diagrams
  13
- Ordering Data
  16
- Accessories
  16
2 Transport and Storing

19
3 Installation

20
- Conforming Utilization
  20
- Non-Conforming Utilization
  20
- Operating Environment
  21
- Fitting Accessories
  21
- Attach the Pump to the Vacuum Chamber
  22
- Forevacuum Connection
  27
- Connect the Cooling
  28
- Air Cooling
  28
- Water Cooling
  29
- Water Quality
  30
- Connect a Power Failure Venting Valve or a Venting Valve
  32
- Connect Purge Gas
  33
- Connect a Flange Heater
  34
- Electrical Connection
  34
4 Operation

39
- Media Compatibility / Purge Gas
  39
- Interfaces
  39
- Switching on
  41
- Shutting down
  42
- Venting
  43
- Bakeout
  44
- Operation after a Longer Storage Period
  44
- Removing the Pump from the System
  45
5 Maintenance

46
- Cleaning
  46
- Leybold Service
  46
- Bearing Monitoring and Conditioning
  47
6 Troubleshooting

49
7 Waste Disposal

51
- China Rohs Material Content Declaration
  51
- Certificates
  
  52
- EU Declaration of Conformity
  
  53

LEYBOLD Categories

Water Pump Transmitter Measuring Instruments Controller

Power Supply

More LEYBOLD Manuals

LEYBOLD TURBOVAC 950 i Manuals

LEYBOLD TURBOVAC 950 i Manual (68 pages)

Table of Contents

LEYBOLD TURBOVAC 950 i Operating Instructions Manual (54 pages)

Table of Contents

Important Safety Information

1 Description

2 Transport and Storing

3 Installation

4 Operation

5 Maintenance

6 Troubleshooting

7 Waste Disposal

Certificates

EU Declaration of Conformity

Related Products

LEYBOLD Categories