Connection Diagrams - Siemens ULTRAMAT 23 Series Equipment Manual

The positions of the connections on the devices are shown in the connection diagrams in section
Connection diagrams (Page 51).
3.5.3

Connection diagrams

Bench-top unit
①
Power connector
②
Gas connections: 6 mm nozzles; see section Gas connections (Page 50)
③
-X45: ELAN (RS485) 9-pin connector
④
-X90: 9-pin interface connector (option board with PROFIBUS-DP/PA)
⑤
-X50: 37-pin connector: Option board; binary inputs/relay outputs
⑥
-X80: 37-pin connector: Analog and digital inputs and outputs
Figure 3-18 Connections of bench-top unit
ULTRAMAT 23
Equipment Manual, 04/2022, A5E37100388-012
Description
3.5 Wiring diagrams
51