Siemens ULTRAMAT 23 Series Equipment Manual page 193

Figure 13-5 Gas path elements at front, 19" rack unit
Figure 13-6 Gas path elements at front, bench-top unit
Part No. Designation
7 Electrochemical oxygen sensor
8 Flowmeter
9.1 Condensation trap
9.2 Spare filter condensation trap
.
ULTRAMAT 23
Equipment Manual, 04/2022, A5E37100388-012
Spare parts/accessories
Remarks
mounted behind the cover
In the condensation trap,
package size: 3 units
13.3 Gas path
193