User Responsibility; Guidelines And Good Practices - ferrotec Temescal FC-4400 Facility And Installation Manual

This equipment will perform in accordance with the instructions and information contained in the
user's manual and its referenced documents when such equipment is installed, operated, and
maintained in compliance with such instructions. The equipment must be checked periodically.
Defective equipment shall not be used. Parts that are broken, missing, plainly worn, distorted, or
contaminated, shall be replaced immediately. Should such repair or replacement become
necessary, a telephone or written request for service should be made to Temescal, Livermore, CA,
a division of Ferrotec (USA) Corp.
The equipment, or any of its parts, shall not be altered without the prior written approval of
Temescal. The user and/or purchaser of this equipment shall have the sole responsibility for any
malfunction which results from improper use, faulty maintenance, damage, improper repair, or
alteration by any party other than Temescal.
1. Follow applicable clean room procedures (smocks, masks, gloves, etc.).
2. Do not expose the vent and purge valves to excessive pressures. The nitrogen line regulator is
factory set at 15 psi and must not be adjusted above 20 psi.
3. Prevent oil, grease, water, sweat, etc. from getting into the vacuum chamber.
4. Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage
feedthroughs are protected from being coated.
5. Clean all mechanical parts and seals with lint-free paper/cloth soaked with isopropyl alcohol
(IPA). Dispose all IPA-exposed cleaning paper/cloth in a fireproof container, while ensuring
proper safety precautions are being followed.
6. Polish scratched surfaces with Scotch-Brite, taking care not to produce any cross scratches.
7. Shaft seals are all ferromagnetic. No lubrication is required.
8. Check the chamber door's seal and sealing surfaces each time before closing it.
9. Check and clean with IPA the source tray seals and sealing surfaces each time before raising
the source tray into place.
10. Train staff by competent personnel. DO NOT allow staff to operate or do maintenance and
recovery work on the machine until they are trained by competent personnel.
11. Document all alarms, deviations, breakdowns, and servicings done on either a hardcopy or an
electronic equipment-log system.
0101-9030-0, Rev. D

USER RESPONSIBILITY

GUIDELINES AND GOOD PRACTICES

v FC-4400 F & I Guide