Facility Requirements; Environment; Water - ferrotec Temescal FC-4400 Facility And Installation Manual

Evaporation systems

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Table Of Contents

Table of Contents

This section of the Guide specifies the requirements for the various facilities services,

including:

 Environment (subsection 2.1)

 Water (subsection 2.2)

 Compressed gases (subsection 2.3)

 Electrical power (subsection 2.4)

 Electrical grounding (subsection 2.5)

The customer is responsible for properly preparing the site for the delivery, installation,

and operation of the system ordered. Site preparation includes providing properly rated

power, water, air, compressed gases to their appropriate facility termination points.

Before system installation can be scheduled, site preparation must be completed, and the

Site Preparation Checklist (see Section 1.4) must be completed and returned to

Temescal.

2.1

Environment

Ambient Air Temperature:

Relative Humidity:

Air Conditioning:

2.2

Water

Both cold and hot water must be filtered to 50 microns. In addition, the water supplied to

the system must have a ph level of between 6.0 and 8.0. To prevent hard water deposits,

it must be conditioned to maintain a calcium carbonate (CaCo3) content of less than 75

ppm. Actual water-flow requirements may vary, depending on your system and its

components.

2.2.1

Cold Water

Note: Condensation on water lines can impair the performance of the

equipment and cause damage. Therefore, the cold water temperature should

not exceed the dew point.

Cold Water Supply #1 (Vacuum cubicle)

Filtered to 50 microns

Maximum inlet pressure

Minimum delta pressure

Maximum inlet temperature

Flow Rate Requirements

 Chamber walls and doors

 Each e-beam source

 5-cm ion beam source

 Each crystal monitor

Cold Water Supply #2 (Cryopump Compressors)

0101-9030-0, Rev. D