Installation Drawings - ferrotec Temescal FC-4400 Facility And Installation Manual

Section 3: Unpacking and Installation
3.3.6 System Ready for Startup
System installation should be complete when:
 all system components are properly positioned
 all required service connections have been made and verified
 all necessary adjustments have been made.
The system is then ready for inspection and startup by a Temescal service
representative.
3.4

Installation Drawings

The following illustrations are provided to facilitate system installation:
 Figures 3-1 and 3-2: Component dimensions
 Figure 3-3: Utility connection panel on rear of vacuum cubicle
 Figures 3-4 and 3-5: Routing of customer-supplied cables and plumbing lines
 Figure 3-6: Routing of lines supplying helium to cryopump compressors
 Figures 3-7 through 3-12: Routing of electrical and data cables between major system
components on systems equipped with a Simba 2 e-beam power supply
 Figures 3-13 and 3-14: Routing of electrical and data cables between major system
components on systems equipped with either the CV-6SLX or the CV-12SLX e-beam
power supply
Unless otherwise specified, all electrical cables are supplied with the system in 10-foot
lengths.
Figures 3-2 through 3-14 do not necessarily show system components to scale or in
their actual positions in a typical installation. For example, the optional Simba 2 control
console often stands on top of the Simba 2 power module, rather than alongside it.
Figure 3-1 Elevation View, Showing Vacuum Cubicle Dimensions
0101-9030-0, Rev. D
FC-4400 Facility and Installation Guide
NOTE
3-7 FC-4400 F & I Guide