Table of Contents
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Section
Table of Contents......................................................................................... i
Safety Instructions for Operating and Service Personnel ............................ iii
Special Amendment for U.K. Users: Electrical Safety Precautions ............. iv
User Responsibility.......................................................................................v
Guidelines and Good Practices ....................................................................v
Health Hazard ............................................................................................. vi
1
1.1
Scope and Purpose of this Guide............................................................... 1-1
1.2
Temescal Contact information.................................................................... 1-1
1.3
General Safety Information......................................................................... 1-2
1.4
Site Preparation Checklist .......................................................................... 1-2
2
2.1
Environment ............................................................................................... 2-1
2.2
Water ......................................................................................................... 2-1
2.3
Compressed Gases.................................................................................... 2-2
2.4
Electrical Power Requirements .................................................................. 2-2
2.5
Electrical Grounding Requirements............................................................ 2-3
3
3.1
Unpacking by Customer ..............................................................................3-1
3.2
Customer's Site Preparation Responsibilities..............................................3-2
3.3
Temescal Installation Responsibilities .........................................................3-5
3.4
Installation Drawings ................................................................................... 3-7
Fig. Number
2-1
Facility and System Grounding Requirements
2-2
Vacuum Cubicle Grounding for Simba 2 Power Supply
2-3
Low-Z Grounding Requirements on Systems with a CV-6SLX or CV-12SLX Power Supply
3-1
Elevation View of Vacuum Cubicle, Showing Vacuum Cubicle Height
3-2
System Plan View, Showing Dimensions of Main System Components
3-3
Utility Connection Points on Rear of Vacuum Cubicle
3-4
Routing of Customer-Supplied Service Lines in 208-V Installations
3-5
Routing of Customer-Supplied Service Lines in 400-V Installations
3-6
Routing of Temescal-Supplied Helium Lines to Cryopump Compressors
3-7
Routing of Control/Data Cables on Systems with the Simba 2 Power Supply
3-8
Routing of Electrical Power Cables on Systems with the Simba 2 Power Supply
3-9
Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Supply
3-10
Routing of Power and Control/Data Cables on Systems With Either the CV-6SLX
or the CV-12SLX Power Supply
3-11
Routing of EMO Cables and Copper Grounding Straps on Systems With Either
the CV-6SLX or the CV-12SLX Power Supply
0101-9030-0, Rev. D
TABLE OF CONTENTS
LIST OF ILLUSTRATIONS
i
Page
Page
2-4
2-5
2-6
3-7
3-8
3-9
3-10
3-11
3-12
3-13
3-14
3-15
3-16
3-17
FC-4400 F & I Guide
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Table of Contents
