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Section 1: Introduction and Site Preparation Checklist
(FC-4400)
The Customer is responsible for providing properly rated power, water, air, and gases
services to their appropriate termination points at the System prior to installation. Please
read this Guide for more specific details.
As each requirement is completed, place a check mark in the appropriate check box below. When
ALL requirements have been completed, sign and date this page, then fax this checklist back to
Temescal (925 449-4096), Attn: Customer Support Coordinator.
Environment: For additional information, see section 2.1.
Water (conditioned): For additional information, see section 2.2.
Cold Water Supply #1 (Vacuum Cubicle)
Cold Water Supply #2 (Cryopump Compressors)
Cold Water Supply #3
Optional Hot Water
0101-9030-0, Rev. D
SITE PREPARATION CHECKLIST
Ambient Air Temperature: 55ºF to 90ºF (12ºC to 32ºC),
Relative Humidity: 50% maximum
Air conditioning: Capable of 5 kW cooling
100 psig (6.89 bar) maximum inlet pressure
50 psig (3.45 bar) minimum delta pressure
50º–70º F (10º–21º C) maximum inlet temperature
Filtered to 50 microns
Flow Rate Requirements:
Chamber walls and doors
Each e-beam source
5-cm ion beam source
Each crystal monitor
Min./max. inlet pressure
Inlet temperature
Min. flow rate
For Edwards Model iGX100L and iGX3/100 pumps:
Min./max. inlet pressure
Inlet temperature
Min. flow rate requirements
Edwards Model iGX100L
Edwards Model iGX3/100
For water requirements for mech. pumps other than those supplied
by Temescal, consult the manufacturer of the pump in question.
90 psig (6.21 Bar) maximum inlet pressure
50 psig (3.45 Bar) minimum delta pressure
5 gpm (18.9 L/min.) flow rate
140° F (60° C) approximate temperature
Filtered to 50 microns
FC-4400 Facility and Installation Guide
6.0 gpm (22.7 L/min.)
2.75 to 5.0 gpm (10.4 to 18.9 L/min.)
0.5 gpm (1.9 L/min.)
0.5 gpm (1.9 L/min.)
30/100 psig (2.07/6.89 bar)
10º–30º C
2.75 gpm (10.4 L/min.) for each
compressor
40/100 psig (2.77/6.89 bar)
10º–30º C
0.3 gpm (1.1 L/min.)
0.6 gpm (2.2 L/min.)
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FC-4400 F & I Guide
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