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The condensates deposited on the tank walls of a vacuum system are generally in the form of
extremely fine particles. The nature, as well as the form, of the materials poses the following
potential health hazards:
a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a
protective respirator mask with fine filter that has been approved by the National Institute for
Occupational Safety and Health (NIOSH) and the federal Mine Safety and Health
Administration (MSHA).
b) Some substances are toxic and inhaling them should be avoided. Take steps to ascertain
whether or not the material being deposited is a known toxic substance. Refer to the Material
Safety Data Sheet(s) covering the evaporant(s) in question.
c) Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or
other oxidizers. Therefore, when opening the chamber door after a deposition cycle, exercise
extreme caution and allow time for the coating surface to oxidize. Breakage of some of the
more reactive condensates may be hazardous, even when the above precautions are observed.
In this situation, fire-protective clothing should be worn.
d) Certain powders (platinum, for instance) are known to catalyze methyl alcohol vapors upon
contact, generating heat in the process and possibly causing a fire to erupt. Therefore, never
use methyl alcohol to wipe down or clean any internal tank surfaces of a vacuum system.
Use isopropyl alcohol (IPA), instead. Dispose of all IPA-exposed lint-free paper/cloth into a
fireproof container, while ensuring all proper safety procedures and precautions are being
followed.
FC-4400 F & I Guide
HEALTH HAZARD
vi
0101-9030-0, Rev. D
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