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FC-4400 Facility and Installation Guide
Cold Water Supply #3
2.2.2
Optional Hot Water
2.3
Compressed Gases
2.3.1
Vent Gas (for process and/or purging): Clean Dry Air (CDA) or Dry Nitrogen (N2)
60 to 120 psig (4.14 to 8.27 bar)
2.3.2
Pneumatic Air (oil free) for activation of valves: 90 to 120 psig (6.21 to 8.27 bar)
2.3.3
Helium: One bottle, 99.999% pure (For additional details, see section 3.3.1.)
2.3.4
Optional Process Gas: Argon (99.99% minimum purity)
2.4
Electrical Power Requirements
The Customer is responsible for providing reliable electrical power to supply the
requirements of the system ordered. The facility's operating voltage must be specified
when the equipment is purchased. Main system power (Drop #1) and high-voltage power
(Drop #2) must be properly connected to the power distribution box prior to the actual
system installation. Circuit breakers must be of a type designed to handle the currents
indicated. General power requirements are as specified below. Actual requirements may
vary, depending on system accessories and options.
2.4.1
Drop #1 (Main System): (15 kVA)
208 VAC, 50/60 Hz, 3-phase 4-wire wye, 150 A
400 VAC, 50/60 Hz, 3-phase 4-wire wye, 90 A
2.4.2
Drop #2 (High Voltage Supply):
Simba 2
FC-4400 F & I Guide
For Edwards Model iGX100 and iGX3/100 pumps:
Min./max. inlet pressure
Inlet temperature
Min. flow rate requirements
Edwards Model iGX100
Edwards Model iGX3/100
Regarding water requirements for mechanical pumps other than
those supplied by Temescal, consult the specific pump manufacturer.
5 gpm (18.9 l/min) flow rate
90 psig (6.21 bar) maximum inlet pressure
50 psig (3.45 bar) minimum delta pressure
140º F (60º C) approximate temperature
Filtered to 50 microns
Note: Hot water must not be hot enough to cause scalding or burning
to the touch.
Note: To minimize pressure fluctuations in the system, a vent gas
supply pressure of 60 to 120 psig is recommended. The actual
venting pressure within the system is lower. The FC-4400 system
features built-in regulation to reduce this pressure as required.
3 to 5 sccm, for FC ion beam source without PBN, or
5 to 8 sccm, for FC ion beam source with PBN
®
Power Supply (15 kVA)
208-220 VAC, 50/60 Hz, 3-phase 4-wire, 90 A
380 VAC 50/60 Hz, 3-phase 5-wire wye, 60 A
480 VAC, 50/60 Hz, 3-phase 5-wire delta, 50 A
2-2
Section 2: Facility Requirements
40/100 psig (2.77/6.89 bar)
10º–30º C
0.3 gpm (1.1 L/min.)
0.6 gpm (2.2 L/min.)
0101-9030-0, Rev. D
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