Unpacking And Installation; Unpacking By Customer - ferrotec Temescal FC-4400 Facility And Installation Manual

Evaporation systems

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Table Of Contents

Table of Contents

This section provides information and guidance about what to do with your new system

when it has arrived on site, but prior to installation.

The customer is responsible for unpacking and preparing the site, as outlined in

sections 3.1 and 3.2. Temescal is responsible for making equipment

interconnections and for energizing and testing the equipment prior to acceptance,

as described in section 3.3.

This section contains the following subsections:

3.1

Unpacking by Customer

3.2

Customer Site Preparation Responsibilities

3.3

Temescal Installation Responsibilities

3.4

Installation Drawings

3.1

Unpacking by Customer

3.1.1

Uncrating

The equipment described in this F& I Guide and listed in the shipping documents was

released to the carrier in good condition and properly packed. It is essential to all

concerned that the contents of the shipment be examined carefully when it is unpacked,

to make sure that no damage has occurred in transit. First check the materials received

against the packing list to be certain that all elements are accounted for. Then check

each component for damage.

Normally, the major components of the system as shipped will be:

 Vacuum cubicle

 Operator station

 Power distribution box

 Mechanical (i.e., roughing) pump

 Cryopump compressors

 Optional blower pump

 Simba 2

 Optional control console (only with Simba 2 power supply)

 Other accessories as specified

Many smaller items are packed separately, as indicated on your packing list.

These items may include ionization gauge tubes, cables, substrate carrier,

piping, and fittings. In discarding packing materials, take care to avoid losing

any such parts. Wait to discard packing materials until after the initial system

startup procedure.

The system is shipped under vacuum. On delivery, verify that it is still under vacuum

by attempting to open the vacuum chamber door. If the door can be opened easily,

there is no vacuum. If that is the case, it is highly likely that some damage has

occurred.

0101-8604-0, Rev. D