Ulvac CRYO-U Series Instruction Manual page 57

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CRYO-U

Cryopump Instruction Manual

・The warm-up time required for the 15K cryopanel to reach room temperature

depends on the kind and quantity of the gas captured in the cryopump, or the

warm-up method.

・If a large amount of the gas is amassed by the cryopump, the inner pressure of the

cryopump may become higher than atmospheric pressure during warm-up

process in the regeneration because most captured gas evaporates for a short

time.

In this case, the pressure relief valve will open according to the following condition

to release the gas. The pressure at which the pressure relief valve begins to open

is 10 kPaG, and full open is 20 kPaG.

†For Your Information†

ULVAC CRYOGENICS INCORPORATED

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Cryo-u4h