Page 2
Publication number Vacuum pump and vacuum system safety P40040100 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Fomblin® is a registered trademark of Ausimont SpA. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
Page 3
CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW The following product AXXX - Pump type Variant Motor description 656 = nRV4i 01 to 99 983 = 110/240V EMC 50/60Hz Single Phase 657 = nRV6i...
Page 4
Documentation Officer: Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic, : +42(0) 734 418 896, : documentation@edwardsvacuum.com This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product serial numbers from this date on: 21 May 2020.
Page 5
Additional Legislation and Compliance Information EU RoHS Directive: Material Exemption Information This product is compliant with the following Annex III Exemptions 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight • 6(c) Copper alloy containing up to 4% lead by weight •...
Page 6
This page has been intentionally left blank.
Contents 1. Introduction..........8 1.1 Definition of Warnings and Cautions.
Page 8
4.9 Connect the analogue speed control....... . 42 4.10 Connection for serial control and monitoring......44 4.10.1 Connect the serial interface to the customer control equipment.
Page 9
6.9 Operation with a valve..........60 6.10 Use of the mode selector and gas ballast control.
Page 10
8.13 The pump has failed to achieve the specified performance (has failed to reach ultimate vacuum)..........74 8.14 The pump is noisy.
Page 11
Figure 1: General view of the nRVi pump........
A65901880_D - Introduction 1. Introduction This manual provides installation, operation and maintenance instructions for the RV3, RV5, RV8 and RV12 Rotary Vane Pumps. The pump must be used as specified in this manual. 1.1 Definition of Warnings and Cautions NOTICE: This manual meets our obligation to provide you with information.
A65901880_D - Introduction The safety symbols that follow are used on the product or in the product documentation. Warning/Caution A safety instruction which must be followed. Warning - Heavy object Identifies a possible hazard from a heavy object. Warning - Dangerous voltage Identifies possible hazards from dangerous voltages.
Page 14
A65901880_D - Introduction When flammable or pyrophoric materials are present within the equipment: ▪ Do not allow air to enter the equipment. ▪ Ensure that the system is leak tight. For further information, please contact us: refer to our website www.edwardsvacuum.com for details of your nearest company.
When the pump is switched off, an inlet valve seals the inlet and prevents the suck back of air and oil into the vacuum system. All nRVi pump variants are fitted with a lifting bracket for use with suitable lifting equipment.
A65901880_D - General description Figure 1 General view of the nRVi pump 1. Lifting eye 1. Lifting eye 2. NW25 inlet port 2. NW25 inlet port 3. Gas ballast control 3. Gas ballast control 4. Oil filler plug 4. Oil filler plug 5.
A65901880_D - General description Item Number Description Details Start button The pump will accelerate up to full running speed. * The run indicator will flash while accelerating. The run indicator will remain on when the pump reaches full speed. Run indicator Indicates that the pump is running.
A65901880_D - General description With the mode selector set to High Vacuum mode, pressurised oil is fed to the low vacuum stage only. In this mode of operation, the pump provides the best possible ultimate vacuum. With the mode selector set to High Throughput mode, pressurised oil is fed to the high vacuum and low vacuum stages.
A65901880_D - Technical data 3. Technical data 3.1 Operating and storage conditions Table 2 Operating and storage conditions Parameter Value Units 12 to + 40 °C Ambient operating temperature range Ambient storage temperature range - 30 to + 70 °C Normal surface temperature of the pump + 50 to + 70 °C...
A65901880_D - Technical data Figure 5 nRV10i performance graph 1. Speed 1. Speed 2. Supply power (kW) 2. Supply power (kW) Figure 6 nRV14i performance graph 1. Speed 1. Speed 2. Supply power (kW) 2. Supply power (kW) Table 5 Performance data Value Parameter Units...
Page 24
A65901880_D - Technical data Value Parameter Units nRVi4i nRV6i nRV10i nRV14i Maximum pumping speed 10.0 14.2 m3h-1 Maximum permitted inlet bar gauge pressure and gas ballast inlet 1.5 x 10 1.5 x 10 1.5 x 10 1.5 x 10 pressure bar gauge Maximum permitted outlet pressure...
Page 25
A65901880_D - Technical data Value Parameter Units nRV4i nRV6i nRV10i nRV14i Gas ballast control low mbar 6 x 10 6 x 10 4 x 10 4 x 10 flow (position ‘I’) ultimate total pressure Gas ballast flow Litres Maximum water vapour 0.04 0.04 0.04...
A65901880_D - Technical data Table 9 Gas ballast control - High throughput mode Gas ballast control - High Throughput mode Ultimate total pressure mbar mbar mbar 1.2 x 10 6 (nRV4/6i) 6 x 10 (nRV4/6i) 1.2 x 10 (nRV4i) (nRV4i) 1.0 x 10 3 x 10 1.0 x 10...
3.7 Electrical data Note: Use of fuses with the maximum rating specified in Table: Recommended fuses on page is recommended. The nRVi pump controller includes an integrated 10 A fuse which is not replaceable. Page 23...
Consequently, the installation of branch circuit protection fuses greater than 10 A could result in permanent damage to the nRVi pump controller. For universal voltage applications, a 10 A fuse can be used for both 100 V and 200 V installations.
Page 29
A65901880_D - Technical data Logic interface items for example, 0 V = 0 Hz, 10 V = 30 Hz Voltage accuracy ± 5% full scale NORMAL status output: Type Open collector transistor plus pull up resistor < Normal speed (default 65%) OFF (4.7 k pull up + diode to 12 V d.c.) ≥...
A65901880_D - Technical data Pin number Signal Polarity 0 V Control Reference 0 V reference for ALL control and status signals listed within this table. Analogue Speed – Control 0-10 V Analogue Input Input 0 V = 0% Speed; + 10 V = 100% Speed Chassis / Screen Screen + 10 V Analogue...
A65901880_D - Technical data Figure 7 Valve connector showing pin numbers Pin number Signal Polarity Colour Valve control output Positive Brown Not used Return Negative Blue Not used 3.10 Indicator LEDs Table 18 Indicator LEDs Description Service indicator LED If a service is due, this LED flashes in a sequence to indicate which service operation is required.
Page 32
Multi-drop address Address (RS485) !S800 0 = disable multi-drop mode; Pump type ?S801 [1..8] String ASCII Pump type (nRVi ) Characters [1..11] String ASCII Motor Control Software Version number Characters (Dxxxxxxxx Y) (where Dxxxxxxxx is the drawing number and Y is the revision) 1..255...
Page 33
Multi-drop address Address (RS485) !S800 0 = disable multi- drop mode; Pump type ?S801 [1..8] String ASCII Pump type (nRVi ) Characters [1..11] String ASCII Motor Control Software Version number Characters (Dxxxxxxxx Y) (where Dxxxxxxxx is the drawing number and Y is the revision) 1..255...
Page 34
A65901880_D - Technical data Object Command Comments Parameter Factory Data type Units name range setting Standby ?S805 67..100 Decimal Standby speed of speed pump: Percentage (%) !S805 setting of full mechanical speed (see 801) ! S stores standby speed to non- volatile memory (use !C805 for real-time speed control, faster...
Page 35
A65901880_D - Technical data Object Command Comments Parameter Factory Data type Units name range setting overhaul clean and overhaul service service due. Decreases indicator until due at zero Clean and !C814 Decimal Command to reset overhaul service indicator, 'time service since' to zero and 'time indicator to' to service interval...
Page 36
A65901880_D - Technical data Object Command Comments Parameter Factory Data type Units name range setting <0000..FFFF>; register 02; warning register 01 and fault <0000..FFFF> register 01 Fault history ?V819 0..99999 64- Decimal Hours Fault history at 4th last trip: bits encoded Hexidecimal as four 16-bit pump controller...
Page 37
A65901880_D - Technical data Object Command Comments Parameter Factory Data type Units name range setting service status word on page 81 Service ?S835 [1..30] String ASCII Serial numbers: pump; drive module and Characters power/control PCA (fixed at manufacture, 9 characters each) [1..36] String ASCII...
Table 20 Typical installation system configurations Configuration Control mode Manual/Section Manual control via nRVi Refer to Figure: Pump user interface controls and indicators on page 13...
A65901880_D - Installation Configuration Control mode Manual/Section Serial control via RS232 Refer to Operation or RS485 Comms with serial control and Interface monitoring on page 55 M = Manual control; P = Parallel control; S = Serial control 4.1 System design recommendations Points to be considered when designing the pumping system.
A65901880_D - Installation 4.2 Installation safety WARNING: Ensure that the system design does not allow the exhaust pipeline to become blocked. WARNING: Risk of injury or damage to equipment. Follow the safety instructions and take note of all appropriate precautions. WARNING: Do not expose any part of the human body to the vacuum as this could result in injury to or death of people.
A65901880_D - Installation WARNING: Risk of injury and damage to equipment. Instructions must be obeyed and note taken of precautions to ensure that pumped gases do not enter their flammable ranges. Switch off the purge flow at the end of the process only after any remaining flammable gases or vapours have been purged from the pump and exhaust pipeline.
A65901880_D - Installation Attach suitable lifting equipment. Do not lift the pump by hand; attach the mechanical lifting equipment to the lifting eye on the pump. Locate the pump so that the oil level sight glass is visible and the oil filler plug, oil drain plug, mode selector and gas ballast control are accessible.
A65901880_D - Installation ▪ If operating the pump with an inlet pressure greater than 10 mbar (1 x 10 Pa) for extended periods. ▪ If the pump is frequently pumped down from atmospheric pressure. The oil mist filter will trap the oil exhausted from the pump; the oil can be reused if it is not contaminated.
A65901880_D - Installation 4.8 Connect the parallel control and monitoring Connections for parallel control and monitoring must be made using a suitable mating half that is not supplied. CAUTION: If using the normal and fail lines to drive the coils of d.c. relays, include a back EMF suppression diode in parallel with each relay coil to protect the pump.
Connect a suitably calibrated analogue voltage source (0 to +10 V), for example (DAC), to the analogue speed control input (pin 9). Alternatively connect the output of a potentiometer referenced to the nRVi reference voltage (pin 11) to the analogue speed control input (pin 9). Refer to Figure: Logic interface connections - analogue speed control on page 43.
6 to pin 2) of the logic interface mating half. Figure 11 Logic interface connections - RS232 serial control 1. RS232 interface on control equipment or 2. nRVi pump logic interface PC 1. RS232 interface on control equipment or 2. nRVi pump logic interface PC Figure 12 Logic interface connections - RS485 serial control 1.
Figure 13 Logic interface connections - mixed parallel and serial control 1. RS232 interface on control equipment or 1. RS232 interface on control equipment or 2. nRVi pump logic interface 2. nRVi pump logic interface 3. Start / Stop switch 3.
Operation with multi-drop on page Figure 14 RS485 multi-drop connections 1. RS485 interface on control equipment or 1. RS485 interface on control equipment or 2. nRVi pump logic interface PC 2. nRVi pump logic interface PC 4.13 Leak test the system WARNING:...
A65901880_D - Configuration 5. Configuration Before operating the pump configure the motor controller settings so that they are suitable for the application. If the system is designed to operate with parallel control and monitoring, there is no facility to change the majority of the motor controller settings once the pump is installed on the system.
A65901880_D - Configuration ▪ for some commands only, a data field, comprising a sequence of characters separated from the object number by a space, followed by ▪ a terminating carriage return. 5.1.2 Command and reply table definitions Table 22 Command abbreviations Meaning Abbreviation Carriage return character...
A65901880_D - Configuration 5.1.3 Standby speed setting The pump can be run at standby speed rather than full rotational speed. The standby speed is a user-configurable option and can be set to any value between 67% and 100% full rotational speed. When the pump is shipped, it is configured with a standby speed of 83% full rotational speed.
A65901880_D - Configuration 5.1.5 Factory settings The pump can be reconfigured to its original factory settings with one serial command. To reset the motor controller to factory settings, send the following command: Command The reply will be as follows: Reply The factory settings are restored in the memory within the pump.
A65901880_D - Configuration Multi-drop mode can be disabled by assigning the pump an address 0. To do this, send the command that follows (where dd shows the multi-drop address of the pump. XX shows the address of the node that is sending the command): Command The reply will be as follows: Reply...
A65901880_D - Operation 6. Operation CAUTION: The controlling interface is determined by the interface that starts the pump. Once started, the pump can only be stopped or put in standby mode by the interface that it was started from, except in auto run. With auto run, the stop button on the user interface panel will override it and stop the pump.
A65901880_D - Operation the concentration of flammable gases or vapours in the pump and in the exhaust pipeline to less than one quarter of the gases' published Lower Explosive Limits (LEL). ▪ Use an inert gas purge into the pump gas ballast connection to prevent the condensation of flammable vapours within the pump mechanism and exhaust pipeline.
A65901880_D - Operation 6.2 Before starting the pump Carry out pre-checks before starting the pump. Inspect the power supply cable prior to use, ensuring it is in good condition. Check that the pump oil level is between the MAX and MIN marks on the bezel of the oil level sight glass;...
A65901880_D - Operation Start the pump by linking the start/stop control input to the 0 V control reference on the logic interface connector. 6.4.2 Run the pump at standby speed with parallel control Standby mode enables the pump to be run at a reduced speed to improve the service life of the pump.
A65901880_D - Operation until it reaches standby speed. If it is running faster than standby speed, it will decelerate until standby speed is reached. To run the pump at standby speed, send the following command over the serial communications link: Command The reply will be as follows: Reply...
A65901880_D - Operation 6.5.6 Monitor measured motor speed with serial control The measured rotational speed of the motor inside the pump can be monitored. Send the following query: Command The reply will be as follows, where the first returned number refers to motor rotational speed in revolutions per second (Hz): Reply sp d...
Each pump must be assigned its own individual address, or node, before it can be fitted into a multi-drop system. The command to assign the multi-drop address is sent in standard nRVi message format and is detailed in Assigning a multi-drop address on page...
A65901880_D - Operation The message protocol in multi-drop mode is marginally different to that described for serial messages in single pump systems (Message structure on page 47). The main differences in multi-drop message protocol are detailed below: ▪ All multi-drop commands, queries or replies have the start character #. ▪...
A65901880_D - Operation Command The reply will be as follows, where dd denotes the multi-drop address of the pump: Reply Multi-drop mode can be disabled by assigning the pump an address 0. To do this, send the following command (where dd denotes the multi-drop address of the pump and xx denotes the address of the node that is sending the command): Command The reply will be as follows:...
A65901880_D - Operation 6.11.1 Mode selector The mode selector controls the flow of pressurised oil to the high vacuum stage of the pump. Note: The pump is supplied with High Vacuum mode selected. If High Vacuum mode is selected and the mode selector cannot be turned by hand to select the High Throughput mode, use a suitable tool fitted to the flat part of the mode selector to turn the selector.
A65901880_D - Operation The vapour pressure of all materials used in the vacuum system (including pump oil) must be much lower than the specified ultimate vacuum of the pump. Refer to Fault finding on page 72 for a list of possible causes for failure to achieve the specified performance.
A65901880_D - Operation 6.15 Shut down the pump Decontaminating the oil before shutting down the pump is recommended; this will prevent damage to the pump by the contaminates in the oil. Refer to Decontaminate the oil on page 66 and decontaminate the oil, as required. Stop the pump.
A65901880_D - Maintenance 7. Maintenance 7.1 Maintenance safety WARNING: Risk of injury or death. Wear the correct PPE during inspection or maintenance. If the pump is PFPE-prepared, refer to PFPE-prepared rotary vane pumps on page 90 before maintaining the pump. ▪...
A65901880_D - Maintenance The item numbers of the spares and kits are given in Spares on page Note: Service kit descriptions and fitting instruction descriptions are in line with 50 Hz pumping capacity. Therefore the RV3 kit should be used for nRV4i, RV5 for nRV6i, RV8 for nRV10i and RV12 for nRV14i.
A65901880_D - Maintenance If the oil is contaminated, drain and refill the pump with clean oil as described in Replace the oil on page 7.2.2 Replace the oil Refer to Figure: General view of the pump on page Operate the pump for approximately ten minutes to warm the oil, then switch off the pump.
A65901880_D - Maintenance Refit the centring ring and filter assembly and the O-ring to the inlet port. Refit the vacuum system to the pump inlet port. Figure 16 Inlet filter assembly 1. Centring ring and filter assembly 1. Centring ring and filter assembly 2.
A65901880_D - Maintenance Figure 17 Gas ballast control assembly 1. Gas ballast control 1. Gas ballast control 2. O-ring 2. O-ring 3. Air hole 3. Air hole 4. O-ring 4. O-ring 5. Bayonet lugs 5. Bayonet lugs 6. Compression spring 6.
A65901880_D - Maintenance 7.2.10 Replace the pump controller Contact us for further details. 7.2.11 Electrical safety check Test the earth continuity and the insulation resistance of the pump system. The earth continuity should be less than 0.1 ohm and the d.c. insulation resistance greater than 1.0 Mohm.
A65901880_D - Maintenance 7.3.3 Replace the oil, clean and overhaul the pump and replace the blades The service indicator, (flashing ON 3s / OFF 1s) is triggered as a reminder to replace the oil, clean and overhaul the pump and replace the blades. For more information on how to replace the oil in the pump, refer to Replace the oil on page...
A65901880_D - Fault finding 8. Fault finding Fault The controller LEDs do not flash for 0.5 seconds when the system is switched on Cause The electrical supply has failed. Remedy Make sure that the electrical supply is set to on and the fuses (and current limiting devices) are not tripped.
A65901880_D - Fault finding Remedy Check that the electrical supply is on, that the serial link is connected and that the serial enable line is active. Cause Interface connection for RS232 or RS485 not working. Remedy Check that the electrical supply is on, that the serial link is connected and that the serial enable line is active.
A65901880_D - Fault finding Cause The outlet pipeline or the outlet filter (if fitted) is blocked. Remedy Clear exhaust path (replace or clear exhaust filter). Cause The pump temperature is below 12 °C. Remedy Warm pump to operate ambient temperature range (12 °C ~ 40 °C). Cause The oil is too viscous or it is contaminated.
A65901880_D - Fault finding Cause The inlet filter is blocked. Remedy Clean or replace the inlet filter. Cause The pump has not warmed up. Remedy Warm the pump to operate at an ambient temperature range (12 °C ~ 40 °C). Fault The pump is noisy Cause...
A65901880_D - Fault finding Fault The pumping speed is poor Cause The connecting pipelines are too small or too long in diameter. Remedy Connect the pump using suitable length pipelines with the correct diameter. Cause The inlet filter is blocked. Remedy Clean or replace the inlet filter.
A65901880_D - Fault finding Table 26 Flashing error codes Comments Actions Error flash Error flash position sequence ssssss Overload timeout. Check whether the pump is not running under constant high pressure or the inlet or outlet is not blocked. Lsssss Controller software error.
Page 82
A65901880_D - Fault finding Reply sp d The system status word returned is made up of 4 separate status words, each made up of 4 hexadecimal digits and are separated by a semi-colon ';'. The first status word is 'System status register 1', then 'System status register 2', then 'Warning register' and the final status word is 'Fault register'.
Page 83
A65901880_D - Fault finding Hexadecimal Binary Decimal 1100 1101 1110 1111 Table 28 System status register 1 flags Bit number Status flag Active flags mean 0 (lsb) Deceleration Stop command received and pump controller is in the deceleration/ ramp down process Acceleration/running Accelerating or running Standby speed...
Page 84
A65901880_D - Fault finding Bit number Status flag Active flags mean Reserved Warning Warning condition - see Table: Warning register 2 flags on page 80 for detail Alarm Fault condition - see Table: Fault register flags on page 81 for detail Reserved Reserved Reserved...
A65901880_D - Fault finding Table 31 Fault register flags Bit number Status flag Active flags mean 0 (lsb) Reserved Over voltage trip Fault due to excessive link voltage Over current trip Fault due to excessive motor current Over temperature trip Fault due to excessive pump controller temperature Under temperature trip...
Page 86
A65901880_D - Fault finding Each binary digit (bit) represents a flag that is either active (state 1) or not active (state 0). To help decode the service status word, each bit is numbered (starting with 0 for the least significant to 15 for the most significant) as shown in Decoding system status words on page 77.
A65901880_D - Storage 9. Storage CAUTION: Observe the storage temperature limits. Storage below -30 °C will permanently damage the pump seals. Avoid long-term storage if possible. When long-term storage is necessary, the pump should be set up and run for at least eight hours every six months. Note: If a new pump is to be stored in conditions of high humidity, remove the pump from its cardboard packaging box;...
A65901880_D - Disposal 10. Disposal Dispose of the pump and any components and accessories safely and in accordance with all local and national safety and environmental requirements. Particular care must be taken with any components that have been contaminated with dangerous process substances.
A65901880_D - Spares and accessories 11. Spares and accessories Our products, spares and accessories are available from our companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ service engineers who have undergone comprehensive our training courses.
A65901880_D - Spares and accessories Item numbers Spare Hydrocarbon-prepared PFPE-prepared pumps pumps Outer shaft seal kit A65201134 A65201134 Rotor sleeve kit A65201136 A65209136 * Service kit descriptions and fitting instruction descriptions are in line with 50 Hz pumping capacity. Therefore the RV3 kit should be used for nRV4i, RV5 for nRV6i, RV8 for nRV10i and RV12 for nRV14i.
A65901880_D - Spares and accessories 11.2.4 Inlet chemical trap The inlet chemical trap protects the pump against chemically active gases. 11.2.5 Foreline trap Use a foreline trap on a clean pumping system to prevent back migration of pump oil vapour into the vacuum system. 11.2.6 Outlet mist filter The outlet mist filter separates and traps oil droplets in the pump outlet to prevent oil mist discharge.
A65901880_D - Spares and accessories 11.2.13 Solenoid operated pipeline valve Fit the pipeline valve between the vacuum system and the pump inlet to provide additional system protection when the pump is switched off. 11.2.14 Electrical cables Electrical cables are available as accessories and should be used to connect the pump to the electrical supply.
A65901880_D - PFPE-prepared rotary vane pumps 12. PFPE-prepared rotary vane pumps If a PFPE-prepared RV pump has been ordered, the pump will be supplied prepared for use with PFPE mechanical pump oils, such as Fomblin YVAC 06/6 and Krytox 1506. PFPE oils are not supplied with the pump and need to be purchased separately.
Page 95
A65901880_D - PFPE-prepared rotary vane pumps ▪ If the PFPE-prepared RV pump is filled with Fomblin oil, carrying out regular checks for oil leaks is recommended, particularly around the shaft seals. ▪ If an oil leak is detected, contact us or the supplier for advice. Page 91...
A65901880_D - Service 13. Service Our products are supported by a world‑wide network of our service centres. Each service centre offers a wide range of options including equipment decontamination, service exchange, repair, rebuild and testing to factory specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.
Need help?
Do you have a question about the nRVi and is the answer not in the manual?
Questions and answers