Basic Specifications; Table 1-3: Pro560Sl/Sle Series Specifications (-0300 To -0500) - Aerotech PRO560SL Hardware Manual

1.3. Basic Specifications

1.3. Basic Specifications
Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3: PRO560SL/SLE Series Specifications (-0300 to -0500)
Travel
(1)
Accuracy
Resolution
(Minimum
Incremental
Motion)
Bidirectional
(1)
Repeatability
Horizontal Straightness
Vertical Straightness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration
(5)
Load Capacity
Moving Mass
(with tabletop)
Stage Mass
(no motor)
Material
Mean Time Before Failure (MTBF)
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is
payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is
used.
16
Standard
SL
Calibrated
Standard
SLE
Calibrated
SL
SLE
SL
SLE
(1)
(1)
(4)
(4)
Horizontal
Vertical (Axial)
Side
SL
SLE
SL
SLE
PRO560SL/SLE Hardware Manual
-0300
300 mm
±9.5 µm
±1.5 µm
±10 µm
±1 µm
0.1 µm
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
±3 µm
±3 µm
49 µrad
(10.1 arc·sec) (12.4 arc·sec)
39 µrad
(8.0 arc·sec) (9.1 arc·sec)
49 µrad
(10.1 arc·sec) (12.4 arc·sec)
220 mm/s
Function of motor, amplifier, payload, and maximum axial load
63.7 kg
65.5 kg
Anodized Aluminum
20,000 Hours
-0400 -0500
400 mm 500 mm
±11 µm ±13 µm
±1.5 µm ±2 µm
±12 µm ±14 µm
±1 µm ±1.5 µm
(2) (3)
, 1.0 µm
encoder)
±1 µm
±0.5 µm
±4 µm ±5 µm
±4 µm ±5 µm
60 µrad 70 µrad
(14.4 arc·sec)
44 µrad 53 µrad
(10.9 arc·sec)
60 µrad 70 µrad
(14.4 arc·sec)
150 kg
70 kg
150 kg
24.6 kg
24.8 kg
68.6 kg 73.5 kg
70.7 kg 75.9 kg
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