Table 3-16: Rotary Encoder Specifications For Pro560Sl/Sle Stages; Table 3-17: Linear Encoder Specifications For Pro560Sl/Slee Stages - Aerotech PRO560SL Hardware Manual

PRO560SL/SLE Hardware Manual
Table 3-16: Rotary Encoder Specifications for PRO560SL/SLE Stages
Encoder Option
-M1, -M2, -M5, -M6
(2500 line TTL signal)
-M3, -M4, -M7, -M8
(1000 line 1Vpp Amplified Sine signal)
-M3, -M4, -M7, -M8 with 1000x Interpolation
(1000 line 1Vpp Amplified Sine signal)
-M3, -M4, -M7, -M8 with 4000x Interpolation
(1000 line 1Vpp Amplified Sine signal)
1. Quadrature decoding included in interpolated resolution calculations
Table 3-17: Linear Encoder Specifications for PRO560SL/SLEE Stages
Encoder Option
-E1
-E1 with x4000 Interpolation
-E1 with x16000 Interpolation
-E2
-E3
-E4
1. Quadrature decoding included in interpolated resolution calculations
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Fundamental Signal
(1)
(1)
Fundamental Signal
(1)
(1)
3.3. Motor and Feedback Specifications
Period
2 µm
5 µm
5 µm
5 µm
Period
20 µm
20 µm
20 µm
20 µm
--
20 µm
Digital Resolution
0.5 µm
--
5 nm
1.25 nm
Digital Resolution
--
5 nm
1.25 nm
100 nm
1 nm
0.5 µm
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