VAT 670 Series Installation, Operating, & Maintenance Instructions
Symmetrical flow control & isolation valve
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Summary of Contents for VAT 670 Series
- Page 1 Installation, Operating & Maintenance Instructions Symmetrical flow control & isolation valve Series 670 DN 320 mm (I. D. 12" ) This manual is valid for the following product ordering number 67050-PH52-ABR2 899078EA Edition 2017-10-11...
- Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
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Page 3: Table Of Contents
Series 670 Contents Description of product ................ 4 Identification of product ....................4 Use of product ......................... 4 Used abbreviations ......................4 Related documents......................4 Important information....................... 4 Technical data ......................... 5 1.6.1 Valve unit ......................5 Safety ....................6 Compulsory reading material ................... -
Page 4: Description Of Product
Product data sheet • Dimensional drawing • External controller manual (846473EA) Important information This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging. 4/31 Edition 2017-10-11 899078EA... -
Page 5: Technical Data
Series 670 DESCRIPTION OF PRODUCT Technical data 1.6.1 Valve unit Describtion Symmetrical flow functional principle (given) Pressure range at 20 °C 1 × 10E-6 mbar to 1.2 bar (abs) Leak rate to outside at 20 °C 1 × 10E-5 mbar l/s Leak rate valve seat at 20 °C 1 ×... -
Page 6: Safety
SAFETY Series 670 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. -
Page 7: Personnel Qualifications
Series 670 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering the T-9001-156 valve opening 899078EA... -
Page 8: Design And Function
DESIGN AND FUNCTION Series 670 Design and Function Design Flange seal Intermediate piece Plate screw Actuator shaft with bellows Plate Actuator (stepper motor) Plate seal Valve seat side Flange Function The valve plate (3) acts as a throttling element and varies the conductance of the valve opening. The controller calculates the required plate position to achieve the set point pressure. -
Page 9: Installation
Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT. - Page 10 INSTALLATION Series 670 Open the transport case and remove inside packing material as far as necessary. Use a crane and lifting attachments (4 × M10 thru) to lift the valve. See example figure below. Lift the valve carefully and place it on a clean place. Do not remove protective foils from valve opening 10/31 Edition 2017-10-11...
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Page 11: Installation Into The System
Series 670 INSTALLATION Installation into the system CAUTION Valve opening Risk of injury. Do not connect the controller to power before the valve is installed complete into the system. NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following schematic. -
Page 12: Installation Space Condition
INSTALLATION Series 670 4.2.1 Installation space condition Install the valve with actuators with space for dismantling and air circulation as shown in figure below. 12/31 Edition 2017-10-11 899078EA... -
Page 13: Installation Overview
Series 670 INSTALLATION 4.2.2 Installation overview Chamber Symmetrical flow valve [1] Pump side Actuator cables [2] External Controller (3) Sample picture 899078EA Edition 2017-10-11 13/31... -
Page 14: Installation Procedure
Install actuator cables [2] to actuators and then to the External Controller [3]. Refer to chapter «Installation overview». Install all electrical connections at External Controller. Refer to «External Controller manual» 846473EA This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. 14/31 Edition 2017-10-11... -
Page 15: Tightening Torque
«F » lbf. 4000 For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1x thread diameter. Please contact VAT for more information. 899078EA Edition 2017-10-11 15/31... -
Page 16: Operation
OPERATION Series 670 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. CAUTION Valve opening Risk of injury. Do not operating before the valve is installed complete into system. For «Operation»... -
Page 17: Trouble Shooting
Series 670 TROUBLE SHOOTING Trouble shooting For «Trouble shooting » refer to «External Controller manual» 846473EA. If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. 899078EA Edition 2017-10-11 17/31... -
Page 18: Maintenance
MAINTENANCE Series 670 Maintenance WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. CAUTION Hot surfaces Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work. -
Page 19: Maintenance Intervals
Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT www.vatvalve.com. The fabrication number on the valve has always to be specified. Refer to chapter «1.1 Identification of product»... -
Page 20: Removing The Plate And Plate Seal Replacement
MAINTENANCE Series 670 7.2.1 Removing the plate and plate seal replacement 7.2.1.1 Required tools • • Cleanroom wiper Allen wrench 5 mm • • Isopropyl alcohol O-ring removal tool • • Clean room gloves Electrical power is required. Description Required tool Open the service cover. - Page 21 Series 670 MAINTENANCE Description Required tool Loosen the plate screws at plate complete. Do not remove the Allen wrench 5 mm screws. Hold the plate by hand and remove it from chamber. Take care to sealing surface and valve surface. Place the plate (seal side up) on a clean surface.
- Page 22 MAINTENANCE Series 670 Description Required tool 18. Select [CLOSE], the valve is synchronizing and moves to close position. 19. Close the service cover. Refer to manual of customized process chamber. 20. Valve is ready for use. 22/31 Edition 2017-10-11 899078EA...
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Page 23: Repairs
REPAIRS Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. -
Page 24: Dismounting And Storage
DISMOUNTING AND STORAGE Series 670 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve could be contaminated. Always wear clean room gloves when handling the valve. -
Page 25: Storage
Series 670 DISMOUNTING AND STORAGE Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. -
Page 26: Packaging And Transport
If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontamination procedure at the customer's expense. 10.1 Packaging Cover all valve openings with a protective foil. -
Page 27: Transport
10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 899078EA Edition 2017-10-11 27/31... -
Page 28: Disposal
DISPOSAL Series 670 Disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. 28/31 Edition 2017-10-11 899078EA... -
Page 29: Spare Parts
«1.1 Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •... -
Page 30: Appendix
APPENDIX Series 670 Appendix No information entered on time. 30/31 Edition 2017-10-11 899078EA... - Page 31 Series 670 This Page Intentionally Left Blank 899078EA Edition 2017-10-11 31/31...
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