SMC Networks CYV Series Manual page 3

in vacuum environments
Carefully designed for low particulate generation, low leakage,
and low outgassing.
Leakage:
Employs a
1
magnetically
coupled rodless
cylinder with no
air leakage from
moving parts.
Reduced outgassing
Reduction of outgassing
1 due to surface treatment
All the external parts (made of
aluminum alloy) such as the body
and slide table are electroless nickel
plated.
Furthermore, external magnets are
coated with titanium nitride.
Note 1) Consult SMC if other specifications
for surface treatment are required.
Low leakage
1.3 x 10 1.3 x 10
⁷
-
10
⁸
-
10
⁹
-
10
¹⁰
-
10
0
2
Note 1) The chart above shows the leakage test results
based on a test conducted using this cylinder
construction.
Note 2) To allow fine stroke adjustments, O-ring seals
are installed to separate vacuum and atmos-
phere. Consult SMC if the sealing method
needs to be altered.
Resin materials
2
eliminated
Laser marking is employed for
the model designation.
Laser marking
⁷ Pa⋅m ³ /sec
⁷ Pa⋅m ³ /sec
-
-
(at normal temperatures, excluding gas permeation)
Standard value
Leakage test result
5
Time [min]
O-ring seals separate vacuum and atmosphere.
Static O-ring seals are used for
all the seals between vacuum
and atmosphere.
(1.3 x 10 -⁴ Pa)
or less
Note 1) The data indicates the leakage
measured in a vacuum environment
of 10 - ⁵ Pa.
Note 2) The leakage test result shown is
based on a test conducted for 10
minutes after the cylinder was
pressurized with helium at 0.1 MPa.
Note 3) This data is considered typical but
not guaranteed.
10
O-ring seal
Fine adjustments
at the end of the stroke
Fine adjustments between –2 to 0mm
can be made on one side (–4 to 0mm
for both sides).
Hexagon wrench
Features 2