SMC Networks CYV Series Manual page 2

Rodless Cylinder for Vacuum
CYV
Series
ø15, ø32
5.0
0.0
0
1
Non-contact construction
There is no particulate generation due
to friction, since the construction does
not allow contact between the cylinder
tube's exterior surface and the slide
table's internal surface.
Slide table
Cylinder tube
Special cylinder tube
Long strokes
(Max. 700mm)
A special cylinder tube using extruded
aluminum material is employed.
No deflection or contact occurs even
for long strokes, since the cylinder is
rigidly attached to the base and the
slide table is independently supported
by a linear guide.
Features 1
Air cylinder for transfer
Low particulate generation
Average particle generation
is 0.1 particles/cycle.
0.1
100000 200000
Operation cycles
No contact
4
(Atmospheric conditions)
Note 1) This data indicates deterioration with age of the average number
of particles per operation under the following test conditions.
<Test conditions>
• Cylinder: CYV32-100
• Average speed: 100mm/s
• Measurement environment: Operation in the atmosphere after
Note 2) This data is considered typical but not guaranteed.
Note 3) A particulate generation test has been conducted in a vacuum
environment of 10 - ⁵Pa.
2
1000000
Low particulate generation at the stroke ends
Particulate generation
has been reduced at
5
the stroke ends by
reducing impact using
a sine cushion and by
stopping the stroke
using an internal
0
50
stopper.
Relationship between speed and impact acceleration
(particles >0.1 µ)
• Work piece weight: 5kg
baking at 150°C for 48 hours.
Stainless steel
linear guide &
low particulate generation
vacuum grease
Particulate generation from the linear
guide unit has been reduced with the use
of a stainless steel linear guide and low
particulate generating vacuum grease.
Reduced initial
3
particulate
generation
Cleaned, assembled,
inspected and first-stage
packaged in a clean
environment.
100 150 200 250
Speed [mm/s]
300