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Summary of Contents for MKS Micro-Baratron 870B
- Page 1 123655-P1 Rev A, 4/99 Instruction Manual MKS Type 870B/872B ® Micro-Baratron Absolute Pressure Transducer Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Page 2 WARRANTY CONCERNING DATE-RELATED OPERATIONS. For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
- Page 3 123655-P1 Rev B, 06/01 MKS Type 870B/872B ® Micro-Baratron Absolute Pressure Transducer...
- Page 4 MKS Instruments, Inc. Printed in the United States of America ® Baratron is a registered trademark of MKS Instruments, Inc., Andover, MA ® Bendix is a registered trademark of Amphenol Corp., Bendix Connector Operations., Sidney, ®...
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Page 5: Table Of Contents
Table of Contents Table of Contents Pressure Transducer Safety Information ................2 Symbols Used in This Instruction Manual..............2 Symbols Found on the Unit ..................3 Safety Procedures and Precautions................4 Sicherheitshinweise für den Druckmeßumformer..............6 In dieser Betriebsanleitung vorkommende Symbole ...........6 Erklärung der am Gerät angebrachten Symbole ............7 Sicherheitsvorschriften und Vorsichtsmaßnahmen.............8 Informations relatives à... - Page 6 Table of Contents Interface Cables.....................23 Generic Shielded Cables................24 Setup ........................25 Dimensions ....................25 Mounting Instructions..................29 Welded Connections ...................29 Mechanical Connections ................29 Electrical Information....................30 Voltage Unit....................30 Current Unit ....................31 Connectors......................33 Flying Leads....................34 Bendix Connectors ..................35 Type “D” Connectors .................36 Startup........................38 Chapter Three: Overview....................39 General Information....................39 Sensor ........................39 Signal Conditioner....................39...
- Page 7 Table of Contents Performance Specifications ..................49 Electrical Specifications ..................49 Physical Specifications ....................50 Environmental Specifications ...................51 Appendix B: Model Code Explanation .................53 Model Code ......................53 Index..........................57...
- Page 9 List of Figures List of Figures Figure 1: Dimensions of the Type 870 Transducer..............25 Figure 2: Dimensions of Additional Fittings for the Type 870 Transducer .......26 Figure 3: Dimensions of the Type 872 Transducer..............27 Figure 4: Dimensions of Additional Fittings for the Type 872 Transducer .......28 Figure 5: Electrical Scheme for a Voltage Unit ..............30 Figure 6: Line Resistance Equation ..................31 Figure 7: Total Resistance in Line ..................31...
- Page 11 Pressure Transducer Safety Information Symbols Used in This Instruction Manual List of Tables Table 1: Definition of Symbols Found on the Unit ..............3 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ............7 Tableau 3: Définition des symboles apparaissant sur l'unité ............. 11 Tabla 4: Definición de los símbolos hallados en la unidad ............
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Page 12: Pressure Transducer Safety Information
Symbols Used in This Instruction Manual Pressure Transducer Safety Information Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 13: Symbols Found On The Unit
Pressure Transducer Safety Information Symbols Found on the Unit Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019... -
Page 14: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 15 Pressure Transducer Safety Information Safety Procedures and Precautions CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).
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Page 16: Sicherheitshinweise Für Den Druckmeßumformer
In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Page 17: Erklärung Der Am Gerät Angebrachten Symbole
Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß... -
Page 18: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. - Page 19 Sicherheitshinweise für den Druckmeßumformer Sicherheitsvorschriften und Vorsichtsmaßnahmen Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
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Page 20: Informations Relatives À La Sécurité Pour Le Transducteur De Pression
Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. -
Page 21: Symboles Apparaissant Sur L'unité
Informations relatives à la sécurité pour le Symboles apparaissant sur l'unité transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) -
Page 22: Mesures De Sécurité Et Précautions
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. - Page 23 Informations relatives à la sécurité pour le Mesures de sécurité et précautions transducteur de pression VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
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Page 24: Medidas De Seguridad Del Transductor De Presión
Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Page 25: Símbolos Hallados En La Unidad
Medidas de seguridad del transductor de presión Símbolos hallados en la unidad Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra... -
Page 26: Procedimientos Y Precauciones De Seguridad
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. - Page 27 Medidas de seguridad del transductor de presión Procedimientos y precauciones de seguridad USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
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Page 29: Chapter One: General Information
The MKS Type 870B and 872B Micro-Baratron Absolute Pressure Transducers are part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements from 1000 Torr (≈20 psia) to 3000 psia. The 870 unit has a “single-ended”... -
Page 30: How This Manual Is Organized
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. All returns to MKS Instruments must be free of harmful, Warning corrosive, radioactive, or toxic materials. -
Page 31: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. -
Page 32: Unpacking Checklist
872A-K1 • Interface cables (refer to Table 6, page 24) • MKS Local Display Module (Type LDM) Product Location and Requirements Operating Temperature The acceptable operating temperature for the 870/872 unit is 0° to 50° C (32° to 122° F). -
Page 33: Interface Cables
Interface cables to connect the 870/872 unit to a MKS controller or power supply/readout can be purchased from MKS (refer to Table 6), or cables can be made provided that the appropriate specifications contained herein are maintained. For cables connecting to non- MKS products, MKS can provide normal shielding or braided shielded cable assemblies in a nominal 6’... -
Page 34: Generic Shielded Cables
Table 6: Interface Cables Generic Shielded Cables MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;... -
Page 35: Setup
Chapter Two: Installation Setup Setup Dimensions The diameter and height of the 870/872 transducer body are the same on all units. The overall height of the unit varies with each fitting, as shown in Figures 1 through 4, pages 25 to 28. The length of each fitting is measured from mating face to mating face. -
Page 36: Figure 2: Dimensions Of Additional Fittings For The Type 870 Transducer
Setup Chapter Two: Installation 1.33 1.33 1.14 (33.9) (33.9) (29.1) 0.56 (14.2) 4-VCR Male Rotatable (Model Code CB) 0.82 (20.8) 0.81 (20.6) 1/4" Weld "T" 1/4" 90 Elbow (Model Code BD) (Model Code BF) 0.97 0.93 0.70 0.66 (24.6) (23.6) (17.8) (16.7) 1/2"... -
Page 37: Figure 3: Dimensions Of The Type 872 Transducer
Chapter Two: Installation Setup 1.12 dia. (28.3) 9" Braided Shielded Cable (shown with 9-Pin Type "D" Connector) 1.20 dia. (30.4) Zero Pot 2.40 2.44 (60.8) (61.9) 1/4" Weld Stub (Model Code BE) 0.51 (13.1) 1.85 (47) NEMA 4 Enclosure Figure 3: Dimensions of the Type 872 Transducer... -
Page 38: Figure 4: Dimensions Of Additional Fittings For The Type 872 Transducer
Setup Chapter Two: Installation (16.5) (16.5) (16.5) 2.78 2.24 (56.9) 2.04 (51.9) (70.6) 4-VCR Fixed Male 4-VCR Fixed Male 4-VCR Fixed Male/1/4" Weld Stub (Model Code CL) (Model Code CA) (Model Code CH) 0.51 0.51 0.51 (13.1) (13.1) (13.1) 2.95 (7.49) 3.045 (77.34) 2.045 (51.94) 4-VCR Female... -
Page 39: Mounting Instructions
Chapter Two: Installation Setup Mounting Instructions The 870/872 transducer can be mounted in any position; it is fully functional regardless of its orientation. When mounting the unit, be sure to consider accessibility to the user adjustable zero potentiometer, which is located on the side of the transducer. Refer to Figure 1, page 25 for the 870 unit. -
Page 40: Electrical Information
Electrical Information Chapter Two: Installation Electrical Information Voltage Unit The 870/872 transducer with a voltage output requires an external power source capable of supplying the voltages listed in Table 5, page 22. Noise and ripple should be less than 2 mV (peak-to-peak) over a 10 kHz bandwidth. -
Page 41: Current Unit
Chapter Two: Installation Electrical Information Current Unit The 870/872 transducer with the 4 to 20 mA output requires an external power source capable of supplying the voltages listed in Table 5, page 22. Refer to Figure 8, page 32, for the electrical scheme for a current (4 to 20 mA) unit. -
Page 42: Figure 8: Electrical Scheme For A Current (4 To 20 Ma) Unit
Electrical Information Chapter Two: Installation Note If the unit is considerably out of calibration, it may take more than one calibration cycle to accurately complete the zero adjustment. Excitation Power Supply 13 to 36 V sampling resistor Voltage Return Readout Sensor Port Chassis Ground... -
Page 43: Connectors
Chapter Two: Installation Connectors Connectors The 870/872 unit has a fixed cable with a flying lead located on its top panel. The unit is available with just the flying lead, or with an optional Bendix or Type “D” connector attached to the flying lead (refer to Figure 1, page 25 and Figure 3, page 27). -
Page 44: Flying Leads
Connectors Chapter Two: Installation Flying Leads The 870/872 transducer is available with a flying lead at the end of either a 6’ or 10’ cable (refer to Figure 9). The two cable lengths have different configurations, as noted in Tables 8 and 9. 6' (1.8 m) Model Code "F"... -
Page 45: Bendix Connectors
Chapter Two: Installation Connectors Bendix Connectors The 870/872 transducer is available with a Bendix connector attached to the flying lead at the end of the 9” cable (refer to Figure 10). 9" Braided Shielded Cable Bendix Connector Side View End View Figure 10: Bendix Connector Warning To prevent possible sparking, do not disconnect the Bendix... -
Page 46: Type "D" Connectors
Connectors Chapter Two: Installation Table 11: Bendix Connector Pinout (Model Code H) Type “D” Connectors 9-Pin Standard Type “D” Connector The 870/872 transducer is available with a 9-pin male standard Type “D” connector attached to the flying lead at the end of the 9” cable (refer to Figure 11). 9-Pin Standard 9"... -
Page 47: Figure 12: 15-Pin High Density Type "D" Connector
Chapter Two: Installation Connectors 15-Pin High Density Type “D” Connector The 870/872 transducer is available with a 15-pin male high density Type “D” connector attached to the flying lead at the end of the 9” cable (refer to Figure 12). 15-Pin High Density 9"... -
Page 48: Startup
Startup Chapter Two: Installation Startup After installation, allow your transducer to warm up until it is stabilized, then check the transducer zero to verify the proper output. Refer to How To Adjust the Zero, page 43, for complete instructions on adjusting the potentiometer. -
Page 49: Chapter Three: Overview
The 870/872 transducer contains two of the required components: the sensor and signal conditioner. An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage or mA current conversion. For a direct readout of the pressure measurement, a meter (analog or digital) is required. -
Page 50: Labels
Labels Chapter Three: Overview Labels Serial Number Label The serial number label, located on the transducer body, lists the unit’s serial number, model number, input power requirement, and full scale range. MADE IN USA Serial #: 0123456789 Model #: 870B12PBA2GA1 Input: +13 - 32 VDC Output:... -
Page 51: Bendix Connector Warning Label
Chapter Three: Overview Labels Bendix Connector Warning Label This warning label is attached to the fixed 9” cable located on top of the unit only when a Bendix connector is attached to the flying lead. To prevent possible sparking, never disconnect the Bendix connector while the circuit is live unless the area is known to be non-hazardous. - Page 52 Labels Chapter Three: Overview This page intentionally left blank.
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Page 53: Chapter Four: Operation
ZERO (refer to Figure 1, page 25, and Figure 3, page 27) or at the front panel of any MKS Power Supply/Readout being used. To achieve the full dynamic range specified for the transducer, the zero adjustment must be made at a pressure one decade lower than the transducer’s minimum resolution (0.001% of FS). -
Page 54: Table 14: Highest Pressures Suggested For Proper Zero Adjustment
How To Adjust the Zero Chapter Four: Operation To properly zero the 870/872 transducer: 1. Install the 870/872 transducer in a system and connect a power supply/readout. 2. Power the transducer and allow it to stabilize. Note Ensure that the transducer is fully stabilized before you adjust the zero. 3. -
Page 55: Chapter Five: Maintenance And Troubleshooting
MKS for service, obtain an ERA Number (Equipment Return Authorization Number) from any MKS Calibration and Service center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. -
Page 56: Troubleshooting
If no continuity is present (infinite resistance) then sensor element is OK, refer to next possible cause or return the Transducer to the MKS factory for service. Output Signal "Stuck" - no Broken Ground connection Remove the enclosure and inspect the response from panel. -
Page 57: Table 15: Troubleshooting Chart
Measurement slowly goes Buildup of contamination in Remove Transducer from service and positive over time. the Px cavity. return to MKS factory for repair. Unstable output at zero pressure. Excessive ambient Measure the ambient temperature and temperature or ambient temp... - Page 58 Troubleshooting Chapter Five: Maintenance and Troubleshooting This page intentionally left blank.
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Page 59: Appendix A: Product Specifications
Appendix A: Product Specifications Performance Specifications Appendix A: Product Specifications Performance Specifications Accuracy 1% of Reading ≥ 50 to 3000 psia Drift < 50 psia ± Short Term± < 0.04% FS / day± < 0.02% FS / day ±0.12% F.S. / 6 months ±0.06% F.S. -
Page 60: Physical Specifications
Physical Specifications Appendix A: Product Specifications Reverse Wire Protection Immune to reverse power wiring effects Physical Specifications Attitude (Orientation) Sensitivity Fully functional without regard to operating orientation < 0.15% of reading per 180° of rotation Burst Pressure 1000 Torr to 100 psi 10 times full scale 101 to 3000 psi 5 times full scale... -
Page 61: Environmental Specifications
Appendix A: Product Specifications Environmental Specifications Overpressure Limit 1000 Torr to 500 psi 1.5 times full scale 501 to 3000 psi 1.2 times full scale Weight (any configuration) < 10 oz. (284 g) Zero Adjustment Access Located on the side of the unit; 45° from flow direction Environmental Specifications Environmental Options Standard unit (indoor use) - Page 62 Environmental Specifications Appendix A: Product Specifications This page intentionally left blank.
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Page 63: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options for your transducer are identified in the model code when you order the unit. All parts of the model code apply to both the 870 and 872 units, except where noted. The model code is identified as follows: #### XXX YY W G Z E where:... - Page 64 Model Code Appendix B: Model Code Explanation Full Scale Range (XXX) The full scale range is indicated by a three character code. Full Scale Range Ordering Code 1000 Torr 60 psia 100 psia 250 psia 1000 psia 3000 psia Fittings (YY) Several fittings are available, designated by a two letter code.
- Page 65 Appendix B: Model Code Explanation Model Code Power (W) The input/output power is designated by a single number code. Power Ordering Code +13 to +32 VDC input / 0 to 10 VDC output +12 to +32 VDC input / 0 to 5 VDC output +13 to +36 VDC excitation / 4 to 20 mA output Accuracy (G) The accuracy is designated by a single letter code.
- Page 66 Model Code Appendix B: Model Code Explanation This page intentionally left blank.
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Page 67: Index
Index Index Accuracy, 55 Labels nonincendive device, 40 serial number, 40 Burst pressure, 50 warning, 41 Line resistance, 31 Cables generic shielded, 24 Manual organization, 20 interface, 23 Model code, 40, 53 CE compliance, 49 Mounting instructions, 19, 29 Connections mechanical, 29 welded, 29 NEMA 4/4X, 19, 55... - Page 68 Index Sensor operation, 39 Serial number label, 40 Signal conditioner, 39 Startup pressures for proper zero adjustment, 44 zero adjustment, 37–38 Temperature, operating, 22, 51 Troubleshooting, 47 Ultraclean processing, 19, 21 Warning label, Bendix connector, 41 Zero adjustment, 37–38, 45...
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