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Mass-Flo 1179A
User Manuals: MKS Mass-Flo 1179A Mass Flow Controller
Manuals and User Guides for MKS Mass-Flo 1179A Mass Flow Controller. We have
1
MKS Mass-Flo 1179A Mass Flow Controller manual available for free PDF download: Instruction Manual
MKS Mass-Flo 1179A Instruction Manual (88 pages)
Controller and Meter
Brand:
MKS
| Category:
Measuring Instruments
| Size: 0 MB
Table of Contents
Table of Contents
5
Mass Flow Controller Safety Information
11
Symbols Used in this Instruction Manual
11
Symbols Found on the Unit
12
Table 1: Definition of Symbols Found on the Unit
12
Safety Procedures and Precautions
13
Sicherheitshinweise für den Massenflußregler
15
In dieser Betriebsanleitung Vorkommende Symbole
15
Erklärung der am Gerät Angebrachten Symbole
16
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
16
Sicherheitsvorschriften und Vorsichtsmaßnahmen
17
Informations Relatives À la Sécurité Pour Le Contrôleur de Débit de Masse
19
Symboles Utilisés Dans Ce Manuel D'utilisation
19
Symboles Apparaissant Sur L'unité
20
Tableau 3: Définition des Symboles Apparaissant Sur L'unité
20
Mesures de Sécurité Et Précautions
21
Medidas de Seguridad del Controlador de Flujo de Masa
23
Símbolos Usados en Este Manual de Instrucciones
23
Símbolos Hallados en la Unidad
24
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
24
Procedimientos y Precauciones de Seguridad
25
Chapter One: General Information
27
Introduction
27
Design Features
27
Reliability
28
Cleanliness Features
28
How this Manual Is Organized
29
Customer Support
30
Chapter Two: Installation
31
How to Unpack the Type 1179 Series Unit
31
Opening the Package
31
Unpacking Checklist
32
Environmental Requirements
33
Interface Cables
34
Table 5: MKS Cables
34
Generic Shielded Cable Description
35
Setup
36
Dimensions
37
Figure 1: Outline Dimensions of the Type 1179 MFC and Type 179 MFM
37
Figure 2: Side View of the Type 1179 MFC and Type 179 MFM
38
Figure 3: Outline Dimensions of the Type 2179 MFC (with Optional Mounting Plate)
38
Gas Line Connections
39
Standard Fittings
39
Optional Fittings
39
Mounting a Type 1179 MFC
39
Figure 4: Mounting Dimensions of the 1179 Flow Controller
39
Mounting a Type 2179 MFC
40
Figure 5: Mounting Dimensions of the Base Aluminum Plate
40
Figure 6: Mounting Dimensions of the Type 2179 Flow Controller
40
Chapter Three: Overview
41
Type 2179 MFC with a Positive Shutoff Valve
41
Electrical Connections
41
9-Pin Type "D" Connector
42
Table 6: 9-Pin Type "D" Connector Pinout
42
P.C. Edge Card Connector
43
Table 7: 20-Pin Edge Card Connector Pinout
43
15-Pin Type "D" Connector
44
Table 8: 15-Pin Type "D" Connector Pinout
44
The Gas Correction Factor (GCF)
45
How to Calculate the GCF for Pure Gases
45
How to Calculate the GCF for Gas Mixtures
46
How to Read Mass Flow at a Different Reference Temperature
47
Labels
48
Control Valve (MFC Only)
48
Figure 7: Serial Number Label
48
Chapter Four: Operation
49
How to Start up the MFC/MFM
49
How to Zero the Flow Controller
50
How to Adjust the Controller Gain (MFC Only)
51
How to Override the Valve (MFC Only)
52
Priority of the Commands
52
How to Use the Optional Input (MFC Only)
53
Chapter Five: Theory of Operation
55
General Information
55
Flow Path
55
Measurement Technique
55
Control Circuitry
56
Chapter Six: Maintenance
57
General
57
Zero Adjustment
57
Repair
58
Chapter Seven: Troubleshooting
59
Troubleshooting Chart
59
Table 9: Troubleshooting Chart
59
How to Adjust the Valve Preload (MFC Only)
60
Figure 8: Location of the Retaining Screws
61
Figure 9: Location of the Lock Nut and Centershaft
62
Table 10: Maximum Valve Currents
64
Table 11: Valve Current Headroom
64
Figure 10: Location of the R85 Potentiometer on the PC Board
65
Appendix A: Product Specifications
67
Performance Specifications
67
Environmental Specifications
68
Electrical Specifications
68
Physical Specifications
69
Appendix B: Model Code Explanation
71
Model Code
71
Appendix C: Gas Correction Factors
75
Common Gases
75
Appendix D: MFC Sizing Guidelines
79
General Information
79
How to Determine the Flow Controller Range
80
How to Determine the Valve Configuration
81
Table 12: C V Pressure Factors
81
Table 13: Valve Configuration Selection Guide
82
Example
83
Appendix E: Positive Shutoff Valve Information
85
How to Operate the Positive Shutoff Valve
85
Table 14: Suitable Two-Way Solenoid Valves
85
Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve
86
Index
87
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