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5. Maintenance and inspection
Danger of failure and bodily injury
Conduct periodical maintenance and inspection.
If not, it can cause insufficient performance, failure of vacuum pump, and bodily injury.
Danger of burns
Conduct maintenance and inspection only after vacuum pump becomes cool
enough.
Maintenance and inspection soon after vacuum pump stops can cause burn injury.
Danger of electric shock
Be sure to conduct maintenance and inspection after you turn off electric source.
If not, it can cause bodily injury from electric shock or turning object.
Danger of accident, failure and shorter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident, failure or shorter operating lifetime.
5.1 Daily maintenance and inspection
Conduct the following daily maintenance and inspection.
Items
Vacuum pump itself
Air-muffler
Electric wire
WARNING
Contents
Abnormal sound
Abnormal vibration
Abnormal temperature
Cooling fins are dirty or clogged
Dirty, clogged
Deteriorated
-23-
Conduct periodical
maintenance and
inspection
Be careful about
high temperature
Turn off electric
source
Ask specialist to
perform repairs
Measures
Ask specialist to repair.
Ask specialist to repair.
Ask specialist to repair.
Blowing air, cleaning
Replace
Replace
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