Anest Iwata DVSL-100C Instruction Manual page 7

For safe operation
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the
Start or stop
open position can draw back gas and
after closing
debris attached to inside of pump to
isolation valve
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.
Danger of remaining moisture
When evacuating moisture, be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port is
closed, condensed moisture will remain
Operate while
inside vacuum pump and cause failure.
opening air-flush
port
Danger of exceeding permissible
intake gas volume
When sending N
air-flush port, pressure should be the
same as atmospheric pressure and flow
Beware of intake
rate should be less than 10NL/min. If not,
gas volume
it can increase pressure inside vacuum
pump, resulting in failure.
CAUTION
exhausting vapor
gas or dry air into
2
-5-
Danger of exceeding permissible
temperature of intake gas
If intake gas temperature is over 50℃, be
sure to install a chiller or trap between
vacuum pump and vacuum chamber so
B e w a r e
that gas intake temperature of vacuum
t e m p e r a t u r e
pump keeps below 50℃. If not, vacuum
pump temperature can increase, resulting
o f i n t a k e g a s
in failure.
Danger of insufficient vapor
exhaust
After evacuating vapor, do air-flush
operation for at least one hour. If you close
air-flush port or stop vacuum pump soon
Caution after
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.