Related Manuals for Varian HS-20
Summary of Contents for Varian HS-20
- Page 1 Varian Vacuum Technologies 121 Hartwell Avenue HS-20 Lexington, MA 02421 (781)861-7200 Diffusion Pump Instruction Manual Manual No. 6999-01-120 Revision G October 2000...
- Page 2 Fax: (61) 2 9452 2600 Hong Kong Spain Tel: (852) 26206173 Brazil Varian Iberica Fax: (852) 26206338 Varian Industria e Comercio Ltda. Avda Pedro Diez 25 India Avenida Dr. Cardoso de Mello 1644 28019 Madrid Vila Olimpia Varian India PVT LTD...
- Page 3 Varian, Inc. All rights reserved. © This manual may not, in whole or in part, be copied, photocopied. reproduced, translated, or converted to any electronic or machine-readable form without prior written consent of Varian Vacuum Technologies, Lexington, MA 02421-3133...
- Page 4 Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion of the purchase price of the Product.
- Page 5 Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved. It is the sole responsibility of users of Varian equipment to comply with all local, state, and federal safe- ty requirements (laws and regulations) applicable to their system. Employ the services of an industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.
- Page 6 SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL.
- Page 7 THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient backup water and power supply as neces- sary to effect a safe shutdown under worst case conditions.
- Page 8 Hazard Suggested Corrective Action a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C) pump can cause an explosion.
- Page 9 Prohibited Action Explosion-Causing Condition Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures powders, or reactive materials Remove, defeat, or override safety counter- Overtemperature, overpressure, more measures such as pressure and thermal combustible mixtures switches and valve sequencer interlocks Machine or weld without removing all oil Source of ignition or solvent residue in pump...
- Page 10 d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corro- sive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death.
- Page 11 i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tis- sues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of lique- fied nitrogen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid may produce the same effect.
- Page 12 WARNING _____________ Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive.
- Page 13 WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equipment and trained moving/installation personnel to avoid dropping, slipping, and/or overturning the pump and severely injuring personnel. Check weight of equipment before lifting and do not stand under equipment being moved.
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Page 14: Table Of Contents
Table of Contents Section Page Safety Considerations ............Section I –... - Page 15 200/240/400/430/440/480 V Wiring Diagram – HS-20 Diffusion Pump ....1-9 380/415V Wiring Diagram – HS-20 Diffusion Pump ......1-10 Sight Glass Assembly .
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Page 16: Section I - Installation
OPERATING SPECIFICATIONS (See Figure 1-1) Table 1-1 lists the specifications for all standard models of the HS-20 diffusion pump. Table 1-1. HS-20 Diffusion Pump Specifications Model... -
Page 17: Physical Specifications
Installation Figure 1-1. Speed and Throughput Curves – HS-20 Diffusion Pump PHYSICAL SPECIFICATIONS (See Figure 1-2) Flange dimensions (inches): ISO 630k ISO 160k Inlet Foreline Inlet Foreline 27.50 27.17 7.09 21.25 5.06 21.25 5.06 Thickness 1.12 0.75 0.78 0.47 Bolt Circle 25.0... -
Page 18: Outline Drawing - Hs-20 Diffusion Pump
Installation Figure 1-2. Outline Drawing – HS-20 Diffusion Pump, with ASA Flanges... -
Page 19: Unpacking
WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. check weight of equipment before lifting and do not stand under equip- ment being moved. - Page 20 Installation WARNING _____________ Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents. When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use near high temperature source. Ventilate work- ing area with a blower and use in large, well-ventilated room.
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Page 21: Utility And System Connections
UTILITY AND SYSTEM CONNECTIONS 1-6-1 Safety Considerations and Interlocks Large pumps are equipped with two thermal switches. Both thermal switches on the HS-20 diffusion pump are mounted on a thermal strap located on the side of the pump. These ther- mal switches are supplied normally closed. - Page 22 Installation The cooling water discharge should, if possible, be connected to an open drain so that cooling water flow can readily be checked. The temperature of the discharged cooling water should not exceed 130°F (54°C). The quick-cool coil at the boiler plate must be connected to an open drain and the feed line controlled by a separate water 3-way valve (open, closed, and vent to atmosphere).
- Page 23 Installation 1-6-4 Electrical Connections (See Figure 1-4 and 1-5, Diffusion Pump Wiring Diagram) WARNING _____________ High voltages (up to 480V) can kill. Always break the primary circuit to the pump before starting to work on the heater and/or its wiring. The pump heater has been designed to operate at a certain voltage.
- Page 24 Installation Figure 1-4. 200/240/400/430/440/480 V Wiring Diagram – HS-20 Diffusion Pump...
- Page 25 Installation Figure 1-5. 380/415 V Wiring Diagram – HS-20 Diffusion Pump 1-10...
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Page 26: Adding Pump Fluid
(usually 10 to 50 microns (1.33 to 6.65 Pa)). If it does not, examine for leakage. If leakage is suspected, follow standard procedures for leak testing. These will depend on the type of vacuum gauges and/or leak detection equipment available. The most effective are Varian's heli- um leak detectors. -
Page 27: Sight Glass Assembly
Once the pump is running, the oil level should be in the FULL HOT operating range as indi- cated on the sight glass assembly. Figure 1-6. Sight Glass Assembly NOTE ________ It is not recommended that Santovac 5 diffusion pump fluid be used with the HS-20. 1-12... -
Page 28: Section Ii - Operation
SECTION II OPERATION During initial installation, the newly installed pump fluid may be subjected to a degassing process. This may result in foreline pressure fluctuations and "bursts". Such fluctuations are considered normal. START-UP PROCEDURE WARNING _____________ The following conditions increase the risk of explosion: •... -
Page 29: Shutdown Procedure
Operation Check inlet and forepressure performance by means of the system instrumentation. During operation, the gas load at the inlet of the diffusion pump should not exceed the maxi- mum throughput capability of the pump. This means that the pressure at the inlet flange should not (except in transient conditions) exceed approximately 1 x 10 Torr (.133 Pa). -
Page 30: Section Iii - Maintenance
SECTION III MAINTENANCE GENERAL Diffusion pumps generally require little attention when correctly operated. However, it is advisable to perform some periodic checks to insure continued trouble-free operation. By simple preventive main- tenance, costly down-time and cleaning procedures can be avoided. A day-to-day log of pump and system performance will indicate the condition of the pump and marked variations will show the need for corrective action. -
Page 31: Cleaning
Maintenance When the pump is cold, check that the heaters are bolted snugly to the boiler plate and that all heater terminal connections are tightly fastened inside the junction box. Check the total heater input and balance of load if a multi-phase heater is used. Check to insure that cooling water flow is unobstructed and not below specified quantities. -
Page 32: Disassembling And Reassembling The Cold Cap
Maintenance Disconnect all water cooling lines and break the primary circuit supplying power to the pump heaters. Unbolt the inlet and foreline connections and remove the pump from the system. Drain the pump of all fluid. Remove the cold cap and jet assembly following the procedures outlined. Thoroughly clean the pump body interior using acetone followed by an isopropyl alcohol rinse. -
Page 33: External Fittings - Cold Cap Assembly
Maintenance Figure 3-1. External Fittings – Cold Cap Assembly NOTE ________ Customer to supply water tubing to be connected to coupling with FPT threads shown above. - Page 34 Maintenance JET ASSEMBLY The HS-20 jet assembly consists of several subassemblies. The lower jet assembly consists of the jet base and stages 3 and 4. A jet shield is provided for the third stage jet. The second stage jet is secured to the central tube and forms a subassembly.
- Page 35 Maintenance Figure 3-2. 20-inch Jet Assembly...
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Page 36: Heater Replacement
Jet Coupling. HEATER REPLACEMENT The HS-20 diffusion pump heater array consists of six elements arranged to give as close a balanced load as practical over the three supply phases. The heater design employs a long, convoluted tubular heating element which is clamped directly to the boiler plate. A thin, stainless steel membrane with a number of elongated dimples, referred to as a crush plate, is placed in contact with the opposite side of the heating element. -
Page 37: Jet Coupling
Maintenance Note: If the jet coupling loosens from the jet rod during disassembly, position it so that the top of the jet coupling is flush with the bottom of the orifice plug. Figure 3-3 Jet Coupling... -
Page 38: Heater Element Assembly
Maintenance Figure 3-4. Heater Element Assembly NOTE ________ Tighten clamping nuts to 250 in.-lbs. - Page 39 Maintenance WARNING High voltages (up to 480V) can kill. Always break the primary circuit to the power supply before starting to work on the heater and/or its wiring. CAUTION Poor clamping resulting in inadequate thermal contact may result in reduced heater life and poor pump performance. Tighten nuts finger- tight on clamping plate, then gradually and evenly tighten them to 250 in-pounds of torque.
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Page 40: Replaceable Parts
Maintenance REPLACEABLE PARTS The following is a list of replaceable parts for the Varian HS-20 Diffusion Pump. Part Number Description 84358301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST 660811494 Cold cap gasket (see Figure 3-2) - Page 41 Maintenance 3-12...
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Page 42: Section Iv - Troubleshooting
SECTION IV TROUBLESHOOTING LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to the incidence of leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance. Inlet and foreline connections. - Page 43 Troubleshooting Table 4-1 Troubleshooting (Cont’d) Fault Probable Cause Corrective Action Poor ultimate Contaminated pump fluid Examine and clean pump; pressure replace fluid. Low heat input Check voltage. Check for continuity, burned-out element, poor thermal contact. Inadequate cooling water flow Check water pressure. Check tubing for obstructions and backpressure.