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SH-110
Dry Scroll
Vacuum Pump
Manual No. 699904311
Revision A
July 2005
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
INSTRUCTION MANUAL
MANUALE DI ISTRUZIONI
NOTICE DE MODE D'EMPLOI
BEDIENUNGSHANDBUCH
使用手册
使用説明書
사용 설명서
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Table of Contents
Related Manuals for Varian SH-110
Summary of Contents for Varian SH-110
- Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies SH-110 INSTRUCTION MANUAL MANUALE DI ISTRUZIONI Dry Scroll NOTICE DE MODE D’EMPLOI Vacuum Pump BEDIENUNGSHANDBUCH 使用手册...
- Page 2 SH-110 Dry Scroll Vacuum Pump Slo-Blo and Littelfuse are registered trademarks of Littelfuse, Inc. Copyright 2005 Vacuum Technologies...
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Page 3: Declaration Of Conformity
基于独立承担责任的原则， 特声明 は、 当社単独の責任の下、 この宣言が該当する製品 당사의 책임하에 SH-110 Vacuum Pump to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt. auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s). -
Page 4: Warranty
SH-110 Dry Scroll Vacuum Pump Warranty Warranty Replacement Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) and Adjustment months from date of shipment thereof to Customer, and Seller's liability under valid warranty claims is limited, at... -
Page 5: Table Of Contents
保守 ........12 SH-110 Typical Run Currents ... 20 Typical SH-110 Maximum Starting Current and 사용... - Page 6 SH-110 Dry Scroll Vacuum Pump This page intentionally left blank.
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Page 7: Instructions For Use
The SH-110 is a hermetic, dry scroll vacuum pump. This pump is suitable for pumping air or inert gases. The pump Total weight of the packing, SH-110 pump included, is is not intended to pump corrosive, explosive, or particu- approximately 20 kg (44 lbs). -
Page 8: Installation
WARNING ❑ Death may result from contact with If placing the SH-110 pump inside an enclosure, provide high voltages. Always take extreme care ample room to supply ambient air to both the front and and observe the accident prevention rear air intakes of the pump. -
Page 9: Istruzioni Per L'uso
La pompa a secco Scroll SH-110 è una pompa ermetica locale. adatta a pompare aria or gas inerti. Il peso dell'imballo, comprensivo della pompa SH-110, è... -
Page 10: Installazione
SH-110 Dry Scroll Vacuum Pump Installazione Manutenzione Non installare e/o utilizzare la pompa in ambienti esposti Il personale addetto alla condotta ed alla manutenzione ad agenti atmosferici (pioggia, gelo, neve), polveri, gas della pompa deve essere ben addestrato e deve avere una aggressivi, in ambienti esplosivi o con elevato rischio di approfondita conoscenza delle norme antinfortunistiche. -
Page 11: Instructions D'utilisation
La pompe SH-110, est une pompe à vide sèche et hermé- itôt le bureau de vente local. tique. Cette pompe convient pour le pompage de l'air ou Le poids total de l'emballage et de la pompe SH-110 est de gaz inertes. -
Page 12: Installation
SH-110 Dry Scroll Vacuum Pump Installation L'arrêt de la pompe ne requiert aucune manœuvre parti- culière; il faut seulement la déconnecter de l'alimentation Ne pas installer et/ou utiliser la pompe dans des milieux électrique grâce au bouton On/Off. exposés aux agents atmosphériques (pluie, gel, neige), à... -
Page 13: Gebrauchsanleitung
übernimmt Firma Vacuum Technologies keinerlei Haf- gen örtlichen Verkaufsstelle zu melden. tung. Das Verpackungsgewicht beträgt, einschließlich der Die Pumpe SH-110 ist eine hermetisch dichte trocken- Pumpe SH-110, ungefähr 20 kg. laufende Vakuumpumpe (Scrollpumpe). Diese Vorvakuumpumpe eignet sich für das Pumpen von... -
Page 14: Installation
SH-110 Dry Scroll Vacuum Pump Installation Das Ausschalten der Pumpe erfordert keine speziellen Schritte, sie braucht nur durch Betätigung des Schalters Die Pumpe darf nicht in Umgebungen installiert und/oder On/Off abgeschaltet werden. benutzt werden, die ungeschützt vor Witterungsbedin- ANMERKUNG Das Einlaßventil schließt unverzüglich gungen (Regen, Frost, Schnee), Staub und aggressiven nach Abschalten der Pumpe. -
Page 15: 使用说明
SH-110 Dry Scroll Vacuum Pump 使用说明 一般信息 贮存 当将泵运输到其它地方或进行贮存时，不应超出以下环 本设备仅可由专业人员操作和使用。操作本设备之前，使 境范围要求： 用人员应认真阅读本使用手册及由 Vacuum Technologies 提供的其它所有相关说明。Vacuum Technologies 对于因 − − 温度: 20 °C 至 +60 °C ( 4 °F 至 140 °F) 未按使用手册指导进行违规操作、未经培训人员执行不 相对湿度: 0 至 95% (无冷凝) 当操作、未获授权的设备连接、或其它与特定国家标准及 规章相违反的行为而引起的任何问题或事件， 概不负责。... -
Page 16: 维护与维修
SH-110 Dry Scroll Vacuum Pump 安装 维护与维修 不要将泵安装在易受自然天气侵害 (如下雨、下雪、结冰) 负责操作和维护泵的人员，必须接受良好的专业培训，并 的环境中，不要在多尘、周围存在腐蚀性气体、易发生爆 熟知突发事件预防及处理规程。 炸场所或易引起火灾的环境中使用本泵。 警告 接触高电压将有导致死亡的危险。 ❑ 操作期间，必须留意并符合以下环境条件。 应始终保持格外小心，并遵守预防突发 事件的规章和要求。 +5 °C 至 +40 °C (41 °F 至 104 °F) 温度: 机器处于开机运转状态时，应特别留 ❑ 相对湿度: 0 至 95% (无冷凝) 意避开移动部件和高压区。 如果在操作一定时间之后需要对泵进 ❑... -
Page 17: はじめに
SH-110 Dry Scroll Vacuum Pump はじめに 一般情報 保管 ポンプを輸送および保管する際は、以下の環境条件を 本装置は、 専門家による使用を想定して設計されていま 守ってください。 す。 ユーザーは装置を使用する前に、本取扱説明書、お よび Varian Technologies が提供するその他の情報を読 − − 20 °C ~ +60 °C ( 4 °F ~ 140 °F) 温度: んでください。 これらの説明書の指示を守らなかった 相対湿度: 0 ~ 95% (結露なきこと) 場合や未熟練者による誤用、装置に対する未認可の干... - Page 18 SH-110 Dry Scroll Vacuum Pump 設置 保守 大気中の作用物 (雨、雪、氷)、ダスト、悪性ガスにさら ポンプの操作•保守責任者は、十分な訓練を受けており されるような環境、爆発性雰囲気、または火災危険度の 事故防止規則に精通している必要があります。 高い環境下でポンプを設置したり、 使用したりしないで 警告 高電圧に触れると死亡する恐れがあ ❑ ください。 ります。 常に十分な注意を払い、事故 動作時は以下の環境条件に準拠してください： 防止規則を守ってください。 +5 °C ~ +40 °C (41 °F ~ 104 °F) 温度: 機械が起動したとき、可動部品およ ❑ び高電圧に注意してください。 相対湿度: 0 ~ 95% (結露なきこと) ポンプを長時間使用した後で保守作...
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Page 19: 사용 지침
는 공기 또는 불활성 가스의 펌핑 작업에 적합합니다. 판매 사무소로 연락하십시오. 이 펌프는 유독성, 부식성, 폭발성 또는 미립자-성형 가스 SH-110 펌프를 포함한 포장품의 총 중량은 약 20 kg 의 펌핑 작업용으로 고안되지 않았습니다. (44 lbs)입니다. 다음 내용들은 본 장비 사용시에 작업자의 안전을 보장... -
Page 20: 유지 보수
SH-110 Dry Scroll Vacuum Pump 설치 유지 보수 비, 눈, 얼음, 먼지 또는 활성 가스에 노출되거나, 폭발 또 펌프 작동 및 유지 보수 책임자는 충분한 교육을 받아야 는 화재 발생 우려가 있는 환경에서는 이 펌프를 설치하 하며, 사고 방지 지침을 철저히 인식하고 있어야 합니다. -
Page 21: Technical Information
SH-110 Dry Scroll Vacuum Pump Technical Information Table 1 Specifications Model SH-110 Dry Scroll Single Hermetic Vacuum Pump Interface dimensions See Figure 1 on page 16 Peak pumping speed 50 Hz: 90 L/m, 5.4 m /hr (3.3 cfm) 60 Hz: 110 L/m, 6.6 m /hr (4.0 cfm) -
Page 22: Interface Drawing With Dimensions
SH-110 Dry Scroll Vacuum Pump Figure 1 Interface Drawing with Dimensions SH 110 PUMPING SPEED - AIR TEST PERFORM ED IAW ISO 1607-1:1993(E) 120.00 110.00 100.00 90.00 80.00 70.00 60.00 50.00 40.00 30.00 20.00 10.00 0.00 1.E-02 1.E-01 1.E+00 1.E+01 1.E+02... -
Page 23: Unpacking And Inspection
1. Orient the shipping container with “This End Up” on top. 2. Open the box and remove the upper foam block. 3. Carefully lift the SH-110 out of the box. Save the carton and all packing materials. 4. Inspect the pump for damage. If there is shipping damage, contact the freight carrier and your local Vacuum Technologies sales office immediately. -
Page 24: Installation
SH-110 Dry Scroll Vacuum Pump Installation CAUTION Do not block the fan ducts. Blocking these ducts can cause pump overheat- Safety ing. A pump surface temperature in excess of 65 °C (150 °F) is potentially Do not remove or modify any safety or insulating equip- damaging. -
Page 25: Sh-110 Power Cord Selection
10 A capacity. looks like the plug illustrated in Figure 4. ❑ If repair or replacement of the Table 2 SH-110 Power Cord Selection cord or plug is necessary, connect the grounding wire to the grounding Country Power Cord Specification Order terminal only. -
Page 26: Run Currents
126 V 180 V 200 V 230 V 252 V 60 Hz 50 Hz Start Current Table 4 lists the typical SH-110 maximum starting current and duration. Table 4 Typical SH-110 Maximum Starting Current and Duration @ 115 V 50 Hz... -
Page 27: Mechanical Connections
Mechanical Connections Isolation Valve Cleaning the Pump The SH-110 has an integral automatic isolation valve. An Unlike conventional oil-sealed pumps, Vacuum Technol- internal timer opens the valve 10 seconds after the pump ogies dry scroll pumps do not contain fluid for the cleans- is switched ON. -
Page 28: Troubleshooting
Identify the cause of the overload. The SH-110 is equipped with an auto-reset thermal motor protector. This protector will automatically shut down the pump when it detects an overload condition, and will automatically restart the pump when the motor has cooled to... - Page 29 10 minutes prior to disassembly. exchange pumps are available to minimize downtime. The parts needed for tip seal replacement on the SH-110 are available in the kit described in Table 6. This kit con- tains seals and O-rings, and can be obtained from your Figure 6 on page 24 shows the various components Vacuum Technologies dealer.
- Page 30 SH-110 Dry Scroll Vacuum Pump 7. Carefully replace the Scroll Housing making sure to 9. Place the front cowling in place and replace the M8 line up the Locating Pins. Be sure that the Tip Seal has bolts. not fallen out of its groove.
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Page 31: Request For Return Health And Safety Certification
4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 32 9001 Request for Return R E G I S T E R E D Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...