Varian DS102 1Ph Nstruction Manual
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Varian DS102 1Ph Nstruction Manual

Dual stage rotary vane pumps u.k.
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DS102 1Ph
DS202 1Ph
DS302 1Ph
Dual Stage Rotary
Vane Pumps U.K.
Model 949-9350
Model 949-9351
Model 949-9352
87-900-943-01(E)
JANUARY 2006
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
INSTRUCTION MANUAL

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  • Page 1 DS102 1Ph DS202 1Ph DS302 1Ph Dual Stage Rotary MANUALE DI ISTRUZIONI Vane Pumps U.K. BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI INSTRUCTION MANUAL Model 949-9350 Model 949-9351 Model 949-9352 87-900-943-01(E) JANUARY 2006...
  • Page 2 DS102 – DS202 – DS302...

  • Page 5: Table Of Contents

    ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCTIONS FOR USE....................7 TECHNICAL INFORMATION ....................9 SECTION I .............................9 TECHNICAL DESCRIPTION ......................9 LUBRICATION ..........................9 VACUUM SEALS ...........................9 GAS BALLAST VALVE ........................10 ANTI-SUCKBACK DEVICE......................10 TECHNICAL DATA ........................14 DIMENSIONS ........................15 SAFETY PRECAUTIONS ......................17 TRANSPORT AND INSTALLATION....................17...

  • Page 6: Istruzioni Per L'uso

    Le pompe DS102 1Ph, DS202 1Ph, DS302 1Ph sono delle pompe rotative bistadio a palette, a tenuta in bagno d'olio, a- zionate da motore elettrico mono o trifase.
  • Page 7 ISTRUZIONI PER L’USO MANUTENZIONE ATTENZIONE! Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere un'approfon- Controllare che la tensione di alimentazione corrisponda a quel- dita conoscenza delle norme antinfortunistiche. la indicata sul cartellino del motore. Collegare la pompa all’alimentazione.

  • Page 8: Gebrauchsanleitung

    Personal, nicht autorisierten Eingriffen und Benutzung unter Mißachtung der nationalen Bestimmungen übernimmt Firma Varian keinerlei Haftung. Die Pumpen DS102 1Ph, DS202 1Ph, DS302 1Ph sind dichte ölbadgeschmierte zweistufige Flügelzellenpumpen, die von einem Ein- oder Dreiphasenstrommotor betätigt werden. Diese Hochvakuumpumpen eignen sich für das Pumpen von nicht korrosiven Gasen.
  • Page 9 GEBRAUCHSANLEITUNG WARTUNG ACHTUNG! Das für den Betrieb und die Wartung zuständige Personal soll Kontrollieren, daß Versorgungsspannung geschult sein über eine solide Kenntnis Spannungsangabe Typenschild Motors Unfallschutzvorschriften verfügen. übereinstimmt. Die Pumpe an das Versorgungsnetz anschließen. GEFAHR! Hochspannungen können bei Kontakt tödliche Folgen haben. ACHTUNG! Es ist stets mit größter Vorsicht und gemäß...

  • Page 10: Mode D'emploi

    Les pompes DS102 1Ph, DS202 1Ph, DS302 1Ph sont des pompes rotatives à deux stades à palettes, étanches en bain d'huile, actionnées par un moteur électrique mono ou triphasé.
  • Page 11 MODE D'EMPLOI MAINTENANCE ATTENTION ! Le personnel chargé de la conduite et de la maintenance de la Contrôler que la tension d'alimentation correspond à la tension pompe doit avoir reçu la formation nécessaire et posséder une indiquée sur la plaquette du moteur. connaissance approfondie des normes de prévention des acci- dents du travail.

  • Page 12: Instructions For Use

    Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards.
  • Page 13 INSTRUCTION MANUAL MAINTENANCE CAUTION Personnel responsible for pump operation and maintenance must be well-trained and must be aware of the accident preven- Check that your electrical mains voltage corresponds to that tion rules. indicated on the motor’s plate. Connect the pump to the power supply. WARNING! CAUTION Death may result from contact with high voltages.

  • Page 14: Technical Information

    TECHNICAL DESCRIPTION while air is allowed back into the stator chambers. The DS102 1Ph, DS202 1Ph and DS302 1Ph pumps are dual-stage, rotary vane pumps oil The air entering the pump after the anti-suckback...

  • Page 15: Gas Ballast Valve

    TECHNICAL INFORMATION GAS BALLAST VALVE ANTI-SUCKBACK DEVICE When the pump sucks in vapors, these condense The pump is equipped with a special anti- during compression and mix with the oil, forming suckback device to avoid air pressure rises and/or an emulsion (an aqueous vapor, for example) or a oil backflow towards the evacuated vessel when solution (organic solvent vapors, for example).
  • Page 16 TECHNICAL INFORMATION View of the pump 87-900-943-01(E)
  • Page 17 TECHNICAL INFORMATION Legend (cf. figure View of the pump) N° Description DS 102 DS202 DS302 Electric motor SR03700702 SR03700702 SR03700702 1A Electric motor 370-450W SR03700865 SR03700865 SR03700865 1B Three phase electric motor SR03700922 SR03700922 SR03700922 Rubber foot Screw Screw Screw Spacer Motor support Handle...
  • Page 18 TECHNICAL INFORMATION N° Description DS 102 DS202 DS302 Valve gasket (3) - (1) (3) - (2) (3) - (2) First stage stator SR03700261 SR03700316 SR03700495 Middle plate SR03700262 SR03700262 SR03700262 GasBallast Valve shutter (3) - (1) (3) - (2) (3) - (2) GasBallast Valve spring (3) - (1) (3) - (2)

  • Page 19: Technical Data

    TECHNICAL INFORMATION TECHNICAL DATA The following table lists the main technical data of the DS102 1Ph, DS202 1Ph and DS302 1Ph pumps. TECHNICAL DATA UNITS DS102 DS202 DS302 l/min (cfm) 114 (4) 192 (6,8) 285 (10) FREE AIR DISPLACEMENT l/min (m...

  • Page 20: Dimensions

    TECHNICAL INFORMATION DIMENSIONS MODEL UNITS DS102 inch 1,18 1,18 1,38 0,12 16,9 DS202 inch 1,18 1,18 1,38 0,12 18,4 DS302 inch 1,18 1,18 1,38 0,12 18,4 Pump dimensions 87-900-943-01(E)
  • Page 21 TECHNICAL INFORMATION Typical Performance Curves 87-900-943-01(E)

  • Page 22: Safety Precautions

    Oil must be poured into the casing through the If the temperature is not inside this range, consult special threaded plughole and NOT through the Varian technical service for the changes required. suction line. Setting the pump in position should be performed...

  • Page 23: Section Ii

    TECHNICAL INFORMATION The motor has a main on/off bipolar switch. SECTION II ELECTRICAL MOTORS The motor includes a thermal protection against overloads. If the motor is switched off by this relay, Single phase universal motors it can be started again after a few minutes. They are world wide motors, dual voltages and Consult the trouble shooting section in order to dual frequencies, and they are in accordance with...
  • Page 24 TECHNICAL INFORMATION To modify the voltage setting, change the position Single-Phase Universal Motors Voltage Setting of the voltage selector situated inside the motor electrical box. CAUTION To confirm the change of the voltage setting from Before connecting to the mains, check that your High Voltage to Low Voltage, glow the orange la- electrical mains voltage corresponds to the motor bel above the yellow label positioned on the elec-...

  • Page 25: Connections To The Inlet And Exhaust Flanges

    TECHNICAL INFORMATION CONNECTIONS TO THE INLET AND EXHAUST STARTING AND RUNNING THE PUMP FLANGES Before being put into service, in order to reach Remove the protective caps from both flanges. maximum vacuum, the pump must be left running Connect the system to be evacuated to the inlet for about an hour with the gas ballast valve open.

  • Page 26: Stopping The Pump

    TECHNICAL INFORMATION external surface temperature may be in ex- STOPPING THE PUMP cess of 60 °C. There are no special procedures for switching the pump off; it needs only to be disconnected from Failure to provide the pump with an earth the electric power by means of the bipolar switch connection may cause serious damage to op- (see section MODELS WITH SINGLE-PHASE...

  • Page 27: Caution Notes

    TECHNICAL INFORMATION CAUTION NOTES CAUTION Before putting the pump back into operation Do not clean with Alcohol the plastic or rubber after a breakdown, inspect it and check care- components of the pump. fully for any other signs of damage. Use only the strictly necessary amount of lubri- Use only tools that are in perfect working or- cant;...

  • Page 28: Lubricants

    TECHNICAL INFORMATION The recommended lubricating oil is the Varian GP Varian S.p.A. - Vacuum Technologies oil. The GP oil is a general purpose mechanical Via Varian 54 pump fluid specifically engineered to provide supe- 10040 Leinì (Torino) - Italy rior performance in high speed direct drive me- Telephone: (39) 011.9979111...
  • Page 29 Viscosity @ 100 °C cSt (SUS) 8,1 (52,7) Viscosity index Pour point °C (°F) -15 (5) Flash point °C (°F) 213 (415) Fire point °C (°F) 244 (472) Density g/cm 0,87 Varian GP oil vapor pressure curve Varian GP oil viscosity curve 87-900-943-01(E)

  • Page 30: Scheduled Maintenance Cards

    TECHNICAL INFORMATION SCHEDULED MAINTENANCE CARDS FREQUENCY PUMP STATUS (*) OPERATION MONTHLY OIL LEVEL CHECKING TWICE YEARLY CLEANING THE INLET FILTER (*) R=RUNNING S=STOPPED NOTE When the pump is equipped with: • a filter for dust on the inlet side • a condensation separator on the inlet side these items must also be maintained, by following the Manufacturer’s instructions.
  • Page 31 TECHNICAL INFORMATION Card No. Scheduled Maintenance DS102 1Ph, DS202 1Ph, DS302 1Ph Pump type: MONTHLY 5 min. Frequency: Time: Machine status: LUBRIFICATION Type of action: LUBRIFICATING OIL Item: Description Time Equipment Materials • Cleaning rags Check the oil level and top 5 min •...
  • Page 32 NOTE Before starting the procedure, check that the quality and type of oil used corresponds to the indications of Ta- ble Varian GP oil characteristics of this manual. CAUTION Take great care to avoid oily residues or dust from entering the pump and jeopardizing proper operation.
  • Page 33 TECHNICAL INFORMATION Card No. Scheduled Maintenance DS102 1Ph, DS202 1Ph, DS302 1Ph Pump type: TWICE YEARLY 10 min. Frequency: Time: Machine status: CLEANING Type of action: INLET FILTER Item: Description Time Equipment Materials • Compressed air gun Clean the suction filter.
  • Page 34 TECHNICAL INFORMATION Remove the filter (26) from the inlet flange (28). Clean the filter using an aqueous solution and dry with hot air. Put the filter back in place. CAUTION The filter element is designed to prevent solid particles in the air from entering the inside of the pump and if it is not working properly, serious damage could be caused the pump’s inner parts.

  • Page 35: Unscheduled Maintenance Cards

    TECHNICAL INFORMATION UNSCHEDULED MAINTENANCE CARDS SUBJECT FREQUENCY General Warnings Changing the oil Whenever necessary Disassembly of oil level indicator When damaged Disassembly of anti-suckback device shutter When damaged Disassembly of electric motor and joint When damaged Disassembly of discharge valve When damaged Disassembly of oil circulating pump When damaged...
  • Page 36 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: Time: Machine status: GENERAL WARNINGS Type of action: Item: Pump disassembly and reassembly require some basic operations and use of tools found in most work- shops.
  • Page 37 The Maintenance Kit, including, as well as the Gaskets Kit, the 1st and 2nd stage vanes and other parts that it may be necessary to replace when overhauling the pump completely. These parts have a life of approx. two years under conditions of normal operation. PUMP TYPE ORDER DS102 1Ph DS202 1Ph DS302 1Ph CODE GASKETS KIT...
  • Page 38 NOTE On DS102 1Ph, DS202 1Ph and DS302 1Ph pumps, fit the joint on the motor shaft after careful removal of grease from the surfaces and application of LOCTITE 242.
  • Page 39 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: AS REQUIRED Time: 30 min. Machine status: CHANGING OIL Type of action: Item: LUBRICANT ACTION AREA Materials required: Equipment required: • Varian GP oil (1 liter) •...
  • Page 40 TECHNICAL INFORMATION WARNING! If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as temperature of the outer surface may be in excess of 60 °C. NOTE The oil has to be replaced: 1) when it has become particularly dirty due to the presence of contaminants in the environments being evacuated;...
  • Page 41 TECHNICAL INFORMATION NOTE Monitor through the sight glass at the front of the pump that you are not exceeding the maximum oil level per- mitted. CAUTION For disposal of waste oil, it is strictly necessary to respect the currently applicable legislation on this matter. To achieve a good vacuum level again, run the pump for one hour with the gas ballast open.
  • Page 42 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 30 min. Machine status: DISASSEMBLY Type of action: Item: SIGHT GLASS ACTION AREA Materials required: Equipment required: • OR gaskets • Mechanical tools...
  • Page 43 TECHNICAL INFORMATION WARNING! If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as temperature of the outer surface may be in excess of 60 °C. Drain off the oil from the pump. NOTE For a description of how to drain off the oil, see the Unscheduled Maintenance Card No.
  • Page 44 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 30 min. Machine status: REPLACEMENT Type of action: Item: ANTI-SUCKBACK DEVICE SHUTTER ACTION AREA Materials required: Equipment required: • Shutter • Mechanical tools WARNING! Machine safety: disconnect all power lines.
  • Page 45 TECHNICAL INFORMATION Disconnect the flange (28) from the inlet pipe line. Remove the 6 securing screws (17) and remove the two half-plates (25) pressing the suction flange (28) into its seat. Remove the flange (28) and take out the piston (30) with the shutter (29) of the anti-suckback device, dis- engage it by exerting force on arm (101).
  • Page 46 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 30 min. Machine status: REPLACEMENT Type of action: Item: ELECTRIC MOTOR AND JOINT ACTION AREA Materials required: Equipment required: • Electric motor •...
  • Page 47 TECHNICAL INFORMATION Disconnect the motor bearing plate (8) from the support (34) by removing the four screws (4). Remove the half-joint/fan (19) from the support, together with the motor (1), the plate (8). Slacken the nut blocking the half-joint (19) to the motor shaft and take it out, using leverage between the plate (8) and the back of the joint.
  • Page 48 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 1 hour Machine status: DISASSEMBLY Type of action: Item: DISCHARGE VALVES ACTION AREA Materials required: Equipment required: • Valves (Gaskets kit) • Mechanical tools WARNING! Machine safety: disconnect all power lines.
  • Page 49 TECHNICAL INFORMATION Drain off all the oil from the pump. NOTE For a description of how to drain off the oil, see the Unscheduled Maintenance Card No. 102. Disconnect the discharge flange from its piping. Remove the nuts (3) and remove the pump casing (75). Remove the securing screw (47) holding the splash guard (49) and remove it.
  • Page 50 TECHNICAL INFORMATION Remove the two screws (47) on the valve press-bracket (46) and remove the bracket (46), the springs (50) and the shutters (51). Reassemble by proceeding in the inverse order. NOTE When reassembling, replace all the gaskets stripped down. CAUTION When reassembly is complete, proceed to fill the pump with oil following the instructions of Unscheduled Maintenance Card No.
  • Page 51 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 1 hour Machine status: DISASSEMBLY Type of action: Item: OIL CIRCULATION PUMP ACTION AREA Materials required: Equipment required: • Oil circulating pump •...
  • Page 52 TECHNICAL INFORMATION Drain off all the oil from the pump. NOTE For a description of how to drain the oil from the pump, see the Unscheduled Maintenance Card No. 102. Disconnect the discharge flange from its piping. Remove the nuts (3) and remove the casing from the pump (75). Remove the three screws (71) connecting the closing plate (70) to the side and take it out.
  • Page 53 TECHNICAL INFORMATION NOTE A magnet may be used to remove the gear-wheels. Reassemble by proceeding in the inverse order. NOTE When reassembling, replace all the gaskets you have stripped down. CAUTION When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unsched- uled Maintenance Card No.
  • Page 54 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 1 hour Machine status: DISASSEMBLY Type of action: Item: ANTI-SUCKBACK DEVICE ACTION AREA Materials required: Equipment required: • Gaskets kit • Mechanical WARNING! Machine safety: disconnect all power lines.
  • Page 55 TECHNICAL INFORMATION Drain off all the oil from the pump. NOTE For a description of how to drain the oil, see the Unscheduled Maintenance Card No. 102. Disconnect the discharge flanges from their piping. Remove the locking nuts (3) and remove the casing (75) from the pump. Remove the securing screw (47) and remove the splash guard (49).
  • Page 56 TECHNICAL INFORMATION NOTE When reassembling, replace all the gaskets stripped down. CAUTION When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unsched- uled Maintenance Card No. 102. 87-900-943-01(E)
  • Page 57 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 1 hour Machine status: DISASSEMBLY Type of action: Item: PUMP BODY ACTION AREA Materials required: Equipment required: • Gaskets kit • Mechanical tools WARNING! Machine safety: disconnect all power lines.
  • Page 58 TECHNICAL INFORMATION Drain off all the oil from the pump. NOTE For a description of how to drain off the oil, see the Unscheduled Maintenance Card No. 102. Disconnect the discharge flange from its piping. Disconnect the electric motor (1) complete with half-joint. NOTE For a description of how to disassemble the electric motor, see the Unscheduled Maintenance Card No.
  • Page 59 TECHNICAL INFORMATION Card No. Unscheduled Maintenance Pump type: DS102 1Ph, DS202 1Ph, DS302 1Ph Frequency: WHEN DAMAGED Time: 2 hours Machine status: DISASSEMBLY Type of action: Item: FUNCTIONAL BLOCK ROTORS ACTION AREA Materials required: Equipment required: • Oil shaft seal ring •...
  • Page 60 TECHNICAL INFORMATION WARNING! Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO NOT POWER ON” from the main breaker switch. When finished, remove the safety warning. WARNING! If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as temperature of the outer surface may be in excess of 60 °C.
  • Page 61 TECHNICAL INFORMATION Disassemble the discharge valves. NOTE For a description of how to disassemble the discharge valves, see the Unscheduled Maintenance Card No. 106. Detach the end plate (61) from the rest of the pump body, exerting leverage if necessary on the reference notches between the parts.

  • Page 62: Troubleshooting And Corrective Action

    TECHNICAL INFORMATION TROUBLESHOOTING AND CORRECTIVE ACTION NOTE If the pump breaks down or does not work well, first check thoroughly that all the standards rules listed in the sections relevant installation and operation are currently observed. If you cannot get sufficiently low pressure, the problem may lie with the system connected to the pump, i.e. the vacuum chamber and inlet line.
  • Page 63 TECHNICAL INFORMATION SYMPTOM PROBABLE CAUSE SUGGESTED REMEDY CARD REF. The pump is very noisy even at A) Exhaust valves damaged. Inspect the valves. steady operating conditions. B) High suction pressure, or gas Check the system and the gas ballast ballast device is open. valve (see items 4-A and 4-B).

  • Page 64: Spare Parts List

    TECHNICAL INFORMATION SPARE PARTS LIST OTHER SPARE PARTS DS102 1Ph DS202 1Ph DS302 1Ph MINOR MAINTENANCE KIT (*) 949-9370 MINOR MAINTENANCE KIT (*) 949-9371 MAJOR MAINTENANCE KIT (**) 949-9380 MAJOR MAINTENANCE KIT (**) 949-9381 MAJOR MAINTENANCE KIT (**) 949-9382 ACCESSORY ITEM ON EXHAUST Q.TY...
  • Page 65 Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com Varian GP - OIL - Scheda di sicurezza del materiale DATA REVISIONE: DICEMBRE 2002 Sostanza/Identificativo ditta NOME PRODOTTO: VARIAN GP-OIL 949-9390/949-9391 NUMERO CAS: 64742-65-0 2. Composizione/Ingredienti...
  • Page 66 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com PROCEDURE ANTINCENDIO PARTICOLARI: Quando si opera per spegnere un incendio in ambiente chiuso, indossare sempre il respiratore; la combustione incompleta di questo materiale genera monossido di...
  • Page 67 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com 10. Stabilità & Reattività STABILITÀ: Materiale stabile CONDIZIONI DA EVITARE: Esposizione continua a tempe- rature > 200° C INCOMPATIBILITÀ (MATERIALI DA EVITARE): Ossidanti potenti...
  • Page 68 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com Varian GP - OIL – Datenblatt zur Materialsicherheit REVISIONSDATUM: DEZEMBER 2002 Substanz/Herstelleridentifikation PRODUKTNAME: VARIAN GP-OIL 949-9390/949-9391 CAS-NUMMER: 64742-65-0 2. Zusammensetzung/Inhaltsstoffe ALLGEMEINER NAME: 100 % neutrales mit Lösungsmittel raffiniertes Parafinöl...
  • Page 69 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com SPEZIELLE Feuer geschlossenen LÖSCHMETHODEN: Räumen Atemgerät tragen. Bei unvollständiger Verbrennung dieses Materials entsteht Kohlenmonoxid! BESONDERE BRAND- ODER Keine EXPLOSIONSGEFAHREN: 6. Bei unvorgesehener Freisetzung BEI FREISETZUNG ZU Kleine Verluste können mit...
  • Page 70 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tel.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com 10. Stabilität und Reaktivität STABILITÄT: Das Material ist stabil ZU VERMEIDENDE BE- Kontinuierlich DINGUNGEN: Temperaturen von > 200°C aussetzen INKOMPATIBILITÄT Starke Oxidationsmittel (ZU VERMEIDENDE MATERIALIEN) GEFÄHRLICHE ZERFALLS-...
  • Page 71 Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tél.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com Varian GP - OIL - Fiche technique de sécurité sur les matériaux DATE DE RÉVISION DÉCEMBRE 2002 Substance/Identification entreprise NOM DE PRODUIT: VARIAN GP-OIL 949-9390/949-9391 NUMERO CAS : 64742-65-0 2.
  • Page 72 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tél.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com PROCÉDURES SPÉCIALES Porter un respirateur en DE LUTTE CONTRE combattant des incendies dans LES INCENDIES : des espaces fermés; la combustion incomplète de ce matériau produit de l'oxyde de...
  • Page 73 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Tél.: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com 10. Stabilité et réactivité STABILITÉ: Le matériau est stable CONDITIONS À ÉVITER: Exposition continue températures > à 200° C INCOMPATIBILITÉ (MATÉRIAUX À ÉVITER):...
  • Page 74 Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Ph: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com Varian GP - OIL - Material Safety Data Sheet REVISION DATE DECEMBER 2002 Substance/Company Identification PRODUCT NAME: VARIAN GP-OIL 949-9390/949-9391 CAS NUMBER: 64742-65-0 2. Composition/Ingredients...
  • Page 75 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Ph: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com SPECIAL FIREFIGHTING PROCEDURES: Wear breathing gear when fighting fires in enclosed spaces; incomplete combustion of this material produces carbon monoxide! UNUSUAL FIRE AND/OR...
  • Page 76 TECHNICAL INFORMATION Varian S.p.A. Via F.lli Varian, 54 10040 Leinì (TO) - Italy Ph: +39-011-9979-111 Fax:+39-011-9979-237 http://www.varianinc.com 10. Stability & Reactivity STABILITY: Material is stable CONDITIONS TO AVOID: Continuous exposure to temperatures > 200° C INCOMPATIBILITY (MATERIALS TO AVOID): Strong oxidizers...
  • Page 77 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 78 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 79 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.

This manual is also suitable for:

Ds202 1ph949-9350949-9351Ds302 1ph949-9352

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