Related Manuals for Varian HS-16
Summary of Contents for Varian HS-16
- Page 1 High Throughput INSTRUCTION MANUAL Diffusion Pumps HS-16 HS-20 HS-32 NHS-35 Part No. 699901140 Rev. A August 2003...
- Page 2 High Throughput Diffusion Pumps ® Santovac 5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC. ® Viton is a registered trademark of E. I du Pont de Nemours and Company. Copyright 2003 Varian Vacuum Technologies...
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Page 3: Table Of Contents
High Throughput Diffusion Pumps Contents Preface ........v Declaration of Conformity. - Page 4 Cold Cap Assembly ....38 HS-16 Jet Assembly ....39 HS-20 Jet Assembly .
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Page 5: Preface
Products manufactured by Seller are warranted against Varian has no control over the use of this equipment and defects in materials and workmanship for twelve (12) is not responsible for personal injury or damage resulting months from date of shipment thereof to Customer, and from its use. - Page 6 This equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events that occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference with the equipment, or any action contrary to that proved for by specific national standards.
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Page 7: Declaration Of Conformity
Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità Varian Vacuum Technologies Nous 121 Hartwell Avenue Nosotros Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité... - Page 8 High Throughput Diffusion Pumps This page intentionally left blank.
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Page 9: Diffusion Pump Hazards
High Throughput Diffusion Pumps Diffusion Pump Hazards Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended. -
Page 10: Explosion
High Throughput Diffusion Pumps Explosion Table 2 Explosive Conditions ❑ Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar), or without Explosion-Causing Prohibited Action Condition coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials Do not run pump without Overtemperature which may react with pumping fluids in a hot pump... -
Page 11: Pressurization Hazards
Varian has no control over the types of gasses wall passing through the user’s diffusion pump as these are entirely under the control of the process user and/or the hardware systems integrator. -
Page 12: High Temperatures
High Throughput Diffusion Pumps High Temperatures High Voltages ❑ ❑ Hot Surfaces: Boiler temperatures reach 530 °F Diffusion pump heaters operate at voltages high (275 °C) which can cause serious burns. Always enough to kill. Design systems to prevent personnel ensure that surfaces have cooled to near room contact with high voltages. -
Page 13: Diffusion Pump Basics
High Throughput Diffusion Pumps Diffusion Pump Basics Diffusion pumps are used where throughput for heavy gas Pump Operation loads is important. The diffusion pumps begin to work at − The diffusion pump works by heating the pump fluid to its approximately 10 Torr after a mechanical backing boiling point. - Page 14 High Throughput Diffusion Pumps...
- Page 15 High Throughput Diffusion Pumps...
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Page 16: Pump Air Speed And Throughput
The pumping function is graphically described by relating inlet pressure to both air speed and throughput. This relation- ship is shown for the large vacuum pumps in the set of graphs shown in Figure 2 through Figure 5. Figure 2 HS-16 Speed and Throughput Curves, 8.1 kW Figure 4 HS-32 Speed and Throughput Curves... -
Page 17: Physical Specifications
500 (227) Connections: Body and Foreline 1/4 FPT Quick Cool coils 1/4 FPT FORELINE COOLING COIL Figure 6 HS-16 Outline with ASA Flanges Table 6 HS-16 Flange Dimensions Units Inlet Foreline Inlet, 500 K Foreline, 100 K in (mm) 23.50 (526.4) 7.50 (168.0) -
Page 18: Hs-20: Dimensions And Weights
High Throughput Diffusion Pumps Table 7 HS-20: Dimensions and Weights Units HS-20 Height, minimum in (mm) 56 (1254) including clearance for heater access Weight lbs (kg) 600 (272) Connections: Body and Foreline 1/4 FPT Quick Cool coils 3/8 FPT Figure 7 HS-20 Outline with ASA Flanges Table 8 HS-20 Flange Dimensions Units Inlet... -
Page 19: Hs-32: Dimensions And Weights
High Throughput Diffusion Pumps Table 9 HS-32: Dimensions and Weights Units HS-32 Height, minimum in (mm) 74 (1658) including clearance for heater access Weight lbs (kg) 1500 (682) Connections: Body and Foreline 3/8 FPT Quick Cool coils 3/8 FPT Figure 8 HS-32 Outline with ASA Flanges Table 10 HS-32 Flange Dimensions Units Inlet... -
Page 20: Nhs-35: Dimensions And Weights
High Throughput Diffusion Pumps Table 11 NHS-35: Dimensions and Weights Units NHS-35 Height, minimum in (mm) 80 (1795) including clearance for heater access Weight lbs (kg) 1500 (682) Connections: Body and Foreline 3/8 FPT Quick Cool coils 3/8 FPT Foreline Cooling Coil Figure 9 NHS-35 Outline with ASA Flanges Table 12 NHS-35 Flange Dimensions... -
Page 21: Unpacking
The jet assembly should not rotate; being moved. it is held by an indexing pin at the bottom of the assembly. Varian large diffusion pumps are shipped in sturdy con- − 3. If the expected vacuum level is below 10 Torr,... -
Page 22: Cleaning A New Pump
High Throughput Diffusion Pumps Cleaning a New Pump Disassembly for Initial Cleaning This procedure involves the cleaning of the following ele- NOTE A new pump requires cleaning only ments: if the desired vacuum is below ❑ − Jet assembly 1x10 Torr. -
Page 23: System And Utility Connections
High Throughput Diffusion Pumps System and Utility Connections WARNING Utility failure can cause overheating, damage to the equipment and explosion. Design your system to protect personnel and property from these hazards. Vacuum Connections Cooling Water The pump body must be installed vertical and plumb. To connect cooling water: Check that the mating flange on the system is horizontal 1. - Page 24 High Throughput Diffusion Pumps Quick Cool Coil Connection Obtaining High Vacuum on the HS-16 and NHS-35 − The Quick Cool coil at the boiler plate must be con- When operating at low pressures (below 1x10 Torr), the nected to an open drain and the feed line must be con-...
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Page 25: Electrical Connections
84% of maximum throughput pump before starting work on the heater capacity. or its wiring. Table 13 Wiring Diagram Locations Source Voltage HS-16 Wiring HS-20 Wiring HS-32 Wiring NHS-35 Wiring Figure 13 on page 21 Figure 15 on page 23... -
Page 26: Overheating: Detection By Thermal Switches
❑ Low fluid level in the boiler Table 14 Thermal Cutout Temperatures If you determine that the pump has not overheated and Units HS-16 HS-20 HS-32 NHS-35 that the thermal switch has failed or drifted out of calibra- tion, replace the switch with the device listed for your Water Switch °F... - Page 27 440 V > 41 W 440 V > 72 W 440 V > 61 W 480 V > 55 W 480 V > 46 W 480 V > 85 W 480 V > 72 W Figure 11 HS-16 200/240/400/430/440/480 V Wiring...
- Page 28 High Throughput Diffusion Pumps Figure 12 HS-16 380/415 V Wiring...
- Page 29 High Throughput Diffusion Pumps Figure 13 HS-20 200/240/400/430/480 V Wiring...
- Page 30 High Throughput Diffusion Pumps Figure 14 HS-20 380/415 V Wiring...
- Page 31 High Throughput Diffusion Pumps Figure 15 HS-32 200 V Wiring...
- Page 32 High Throughput Diffusion Pumps Figure 16 HS-32 240 V Wiring...
- Page 33 High Throughput Diffusion Pumps Figure 17 HS-32 460 V Wiring...
- Page 34 High Throughput Diffusion Pumps Figure 18 HS-32 380/415 V Wiring...
- Page 35 High Throughput Diffusion Pumps Figure 19 HS-32 480 V Wiring...
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Page 36: Nhs-35 240/400/440 V Wiring
High Throughput Diffusion Pumps = 67.8A @ 240V = 34.6A @ 400V = 31.5A @ 410V Figure 20 NHS-35 240/400/440 V Wiring... -
Page 37: Nhs-35 380/415 V Wiring
High Throughput Diffusion Pumps Note: Pumps operated with 380 volts line voltage operate at 84% of their full power. Figure 21 NHS-35 380/415 V Wiring... -
Page 38: Nhs-35 480 V Wiring
High Throughput Diffusion Pumps Figure 22 NHS-35 480 V Wiring... -
Page 39: Initial Vacuum Test
These procedures depend on the type of vacuum gauges and leak detection equipment available. Consult with your Varian Vacuum NOTE Technologies representative for information on Varian’s extensive line of helium leak detectors. -
Page 40: Adding Or Changing Pump Fluid
High Throughput Diffusion Pumps The recommended fluid charge for each pump is given in Adding or Changing Pump Fluid Table 4 on page 6. The risk of explosion on large vacuum WARNINGS Fluids must be stored in clean, tightly closed containers diffusion pumps is increased by these and should be clearly identified in accordance with their factors:... -
Page 41: Sight Glass Assembly
High Throughput Diffusion Pumps To add or change pump fluid: 4. Remove the plug from the filling port of the pump and pour the fluid in up to the FULL COLD level on 1. Locate the fill and drain fittings in the appropriate the sight glass as shown in Figure 23. -
Page 42: Operation
High Throughput Diffusion Pumps Operation During initial installation, the newly installed pump fluid ❑ CAUTIONS Do not turn on the heater without may be subjected to degassing. This may result in foreline fluid in the pump. This may ruin pressure fluctuations that are considered normal. the heaters and damage the pump. -
Page 43: Startup Procedure
High Throughput Diffusion Pumps Startup Procedure Shutdown Procedure To start the pump: 1. Evacuate the diffusion pump using a mechanical 1. Releasing or admitting air to a WARNING roughing pump to below 0.5 Torr (0.67 mbar). The pump with a hot boiler, especially diffusion pump will not function unless the discharge when it is under vacuum, permits a pressure is less than the tolerable forepressure. -
Page 44: Maintenance
High Throughput Diffusion Pumps Maintenance Perform these periodic checks to assure trouble-free operation. This maintenance prevents costly down-time and cleaning procedures. Maintain a day-to-day log of pump and system performance to identify marked variations that require correc- tive action. Periodic Inspections The maximum interval between inspection of the pump is To perform general maintenance, do the following: established on the basis of experience. -
Page 45: Cleaning
High Throughput Diffusion Pumps Cleaning Cleaning Safety Cleaning a diffusion pump involves the use of acetone Complete cleaning of the pump may be required due to and alcohol, both of which are toxic and explosive. Take gradual deterioration of pump fluids. Removal of the careful note of the following warnings before starting a pump from the system is then necessary. -
Page 46: Disassembly And Reassembly Procedures
High Throughput Diffusion Pumps Disassembly and Reassembly Procedures Cold Cap To disassemble the cold cap, refer to Figure 24 and take To reassemble the cold cap: the following steps. 1. Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before The halo baffle is disassembled in the NOTE... -
Page 47: Jet Assemblies
If the jet coupling loosens from the jet NOTE rod during disassembly, position it so that the top of the jet coupling is flush with the bottom orifice plug as can be seen in Figure 27. Figure 25 HS-16 Jet Assembly... -
Page 48: Hs-20 Jet Assembly
High Throughput Diffusion Pumps To disassemble the jet assembly: HS-20 Jet Assembly 1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 38. 2. Unscrew the jet cap from the coupling assembly. 3. Remove the orifice plug. 4. -
Page 49: Jet Coupling Detail
High Throughput Diffusion Pumps To reassemble the jet assembly: 5. Replace the third stage jet shield. 1. Replace the fourth stage jet on the jet base. 6. Install the lower jet assembly in the pump. 2. Replace and tighten the securing screws between the 7. -
Page 50: Hs-32 Jet Assembly
High Throughput Diffusion Pumps To disassemble the jet: HS-32 Jet Assembly 1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal Cold Cap 2. Remove the cold cap (or halo baffle) as described in “Cold Cap”... - Page 51 High Throughput Diffusion Pumps To reassemble the jet: 7. Using the cross member and the appropriate lifting equipment, lower the entire jet assembly into the 1. If the center jet rod was removed or loosened during pump body, over the center jet rod. disassembly, thread the rod back into the boilerplate.
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Page 52: Nhs-35 Jet Assembly
High Throughput Diffusion Pumps To reassemble the jet: NHS-35 Jet Assembly 1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. Water-Cooled The top of the rod should be roughly 1/16" to 1/8" Cold Cap below the top surface of the inlet flange (inlet plane of the pump). -
Page 53: Heater Replacement Procedure
High Throughput Diffusion Pumps To replace a heater: Heater Replacement Procedure 1. Use an ohmmeter at the electrical box to determine Figure 30 shows the components of the heater element which heater element has failed. assembly. The heater replacement procedure is the same for all large diffusion pumps*. -
Page 54: Troubleshooting
High Throughput Diffusion Pumps Troubleshooting Leakage Outgassing If leakage is the suspected cause of poor system perfor- High-vacuum systems, even without external leakage, mance, first check the following items: can have high gas loads due to outgassing from internal surfaces or processes. The pressure in the system is a ❑... -
Page 55: Poor Pump Or System Performance
High Throughput Diffusion Pumps Poor Pump or System Performance Table 15 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump. Table 15 Troubleshooting Guide Corrective Fault Probable Cause Action Poor system pressure Leaks in system, virtual or real... -
Page 56: Replacement Parts
High Throughput Diffusion Pumps Replacement Parts Table 16 HS-16 Replacement Parts Part Number Description 79299301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 SST hex nut) L8839301 Cold cap gasket set L8840301 Cold cap nut and follower set... -
Page 57: Hs-20 Replacement Parts
High Throughput Diffusion Pumps Table 17 HS-20 Replacement Parts Part Number Description 84358301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST 660811494 Cold cap gasket F2622001 Cold cap follower, brass 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2"... -
Page 58: Hs-32 Replacement Parts
High Throughput Diffusion Pumps Table 18 HS-32 Replacement Parts Part Number Description 77252801 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST 660811494 Cold cap grommet F2622001 Cold cap follower (brass) 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2"... -
Page 59: Nhs-35 Replacement Parts
High Throughput Diffusion Pumps Table 19 NHS-35 Replacement Parts Part Number Description 81437301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST 660811494 Cold cap gasket F2622001 Cold cap follower (brass) 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2"... - Page 60 High Throughput Diffusion Pumps This page intentionally left blank.
- Page 62 Fax (39) 011 997 9 350 Fax: (39) 011 997 9 350 Fax: (31) 343 469961 Japan Brazil Varian Vacuum Technologies Varian Industria e Comercio Ltda. Customer Support and Service: Sumitomo Shibaura Building, 8th Floor Avenida Dr. Cardoso de Mello 1644 4-16-36 Shibaura North America...
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