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Table of Contents
Related Manuals for Varian SD-91
Summary of Contents for Varian SD-91
- Page 2 If a product is received at Varian in a contaminated condition, the customer will be held responsible for all costs incurred to ensure the safe handling of the product. Company Name: ------------------------------ Hereby certify that the product{s) listed below have been cleaned of all hazardous residue and that the residue remaining is of a non-hazardous nature.
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Page 3: Table Of Contents
Table of contents ..3 Warranty .. 5 Features Safety instructions Operating principle ..Technical characteristics Accessories Start-up ..27 Electrical connections ..30 Mechanical connections Maintenance .. -
Page 4: Warranty
Customer to have the product cleaned by an independent agency skilled and approved in handling and cleaning contaminated materials before the product will be accepted by Varian Associates for repair and/or replacement. -
Page 7: Safety Instructions
Otherwise, take the necessary measures with the transporting company and, if necessary, notify VARIAN. For all handling, only use the devices provided for this purpose (lifting rings, handle, etc.). - Page 8 Installation and • The machines must be connected to an electrical installation in compliance with decree 88-1056 dated 14th November 1988, as well as any local start-up electrical codes that apply. • It is important to isolate the machine from the power source before any intervention on the equipment (for maintenance purposes).
- Page 9 Purges for pumping condensable, corrosive, and hazardous gases All pumps models Purges The use of vane pumps may result in pumping gases or vapours which are Aammable or that could contaminate the oil. In this case, these products must be diluted using purges supplied with dry gases, such as nitrogen to avoid undesirable reactions.
- Page 10 Setting The gas. flow rate is adapted according to the application and the installation, taking 'the following criteria into account (flow 50 lo 300 SCCM): • When pumping high quantities of gas, a highly corrosive gas or an easily condansable gas, it is recommended lo use a high nitrogen flow rate. Caution ! It is assumed that a sufficient quantity of nitrogen is available.
- Page 11 gen pumping In certain applications, mixtures containing oxygen at different concentrations, or even pure oxygen, are used. Oils of mineral origin are combustible. Exposure to pure oxygen at high temperatures may cause them to self-ignite. In addition, they are highly oxidized during pumping and quickly lose their lubricating properties.
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Page 13: Operating Principle
Operating principle of the rotary vane pump Rotary vane pump This is a volumetric pump, with a functional part composed of: principle - A hollow cylindrical stator with inlet and exhaust valves. - A rotor mounted eccentrically inside the stator for pumping. - Two vanes sliding in the rotor, forced against the stator by centrifugal force and springs. - Page 14 ()-3 Torr ( l .33 x l 0- 3 mbor). Note : when operating a two stage vane pump continously, greater than half an hour, above l .0 Torr, the unit should be equipped with an oil mist eliminator and oil return system (Contact VARIAN).
- Page 15 Regeneration of In a pump stored with the same oil for a long time, condensed vapours may pump oil contaminate the oil bath and affect performance. This is also the case o�er pumping vapours and when the oil appears cloudy or discolored through the sight gloss.
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Page 17: Technical Characteristics
Technical characteristics Presentation of the product range A wide range Varian oil seal rotary vane pumps ore used in all vacuum technol applications. Specific solutions adopted lo various opplicotions They con be used on their own to achieve a maximum vacuum of 103 Torr (103 mbor), or in pumping assemblies, e.g. - Page 18 16.5 Flow rate Pneurop method mJ/h 3.-4 11.8 Torr/mbar Partial ultimate pressure* .5. 1 I 1.1 o-4 with Varian GP ee oil 1. l Q-2 1.5.1<>-3 / 2.10- 3 pressure Torr/mbar Ultimate 2.1 Q-1 with gas ballast closed Ultimate pressure Torr/mbar 1.5.10-2 / 2.10-2...
- Page 19 Flow rote Pneurop method 10.2 12.5 16.5 l l.8 7.5.10-s / 1. 1 < Torr/mbor Partial ultimate pressure* with Varian GS type oil 1.1 Q-2 u.1 < r J / 2.1 o· J Ultimate pressure Torr/mbor 2.10-1 with gos ballast closed Torr/mbor Ultimate pressure 1.5.10·2 / 2.10·2...
- Page 20 Table of recommended oils In the vane pum p s , we recommend to use only the VARIAN oils in the table Recommended oils below: Vapour Flash po int/ Total Viscosity self-ignition ultimate tension APPLICATION ° pressure' temperature (est) (mbar) (mbar) 213•c...
- Page 21 Dimensions Filling Inlet Exhaust Bubbler CP Series DN25 ISOKF � :,,I 9. 3 'Drain 1 4 x 8 mm diam. holes 3/8G Dim. Pump type inch 10.6 11.5...
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Page 22: Accessories
Accessories NAME PART NUMBER LOCATION FUNCTIONS Oil mist • Separates oil droplets and articles contained eliminator P1110301 Exhaust � in exhaust gases emitted by t e pump. OME 25 S • Separates oil droplets and articles contained High pressure oil mist in exhaust goses emitted by t e pump. -
Page 23: Start-Up
(TM. Montedison Trademark). At delivery, there is some oil in the functional block. � Our pumps ore tested in the factory with Varian oil: it is recommended to use the some oil during operation. To change the type of oil, refer to the Maintenance Chapter, "replacement of type of oil"... - Page 24 Start-up Preliminary precautions • The performance and operating safety of this product can only /4,.,. ill be guaranteed if it is operated according to normal conditions of use. • The vacuum pump is also a compressor: incorrect operation may be dangerous.
- Page 25 Start-up • When using a three phase motor, check the direction of rotation of the motor (see electrical connections 27). start-up chap. page • Check the oil level (See page 24). • Start-up the pump. • Allow the pump to run for one hour at ultimate vacuum: During this operation, make sure that the oil circuit is operating.
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Page 26: Electrical Connections
EMC (Electromagnetic compatibility) performance and safety of the product. Varian cannot be held responsible for consequences resulting from such on intervention. • Before any maintenance intervention on a product performed by a maintenance operator who hos not been trained on safety regulations (EMC, electrical safety, chemical pollution, etc.), isolate the product from its various energy sources... - Page 27 External motor protection, electrical protection Characteristics, connection, The information below is given as a recommendation. protection The user must comply with the electrical standards or recommendations (IEC, VDE, UL, CSA, etc.) applicable in the country in which the pump is used. The use of electrical protection for the pump motor makes it possible to protect: - The motor: in the event of excess voltage or rotor blocking, the resulting excess current may destroy the coil and possibly the start-up system (for a single-phase motor)
- Page 28 Hz· 380/480 V 60 Hz Parallel coupling Serial coupling Summary tables of various The characteristics and ratings of fuses ond circuit breaker associated with standard VARIAN pump motors, to 21 m3/h, single-phase or three-phase. types of motors Single-phase motor Current at ·start-up...
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Page 29: Mechanical Connections
Provide a minimum gap of 25 mm around the pump. The vents on the pump and the motor should be checked regularly to ensure that they are not blocked. VARIAN pumps are designed for operation at an ambient temperature between ° ° °... - Page 30 Changing position of inlet Depending on the types of accessories used and the pumping conditions, these orifices con be fitted vertically on the pump or horizontally as shown and exhaust fittings on the diagram below. • Note: The pump is supplied in configuration A. •...
- Page 31 For normal operation, the maintenance of VARIAN SD, CD, CP series pumps General precautions only require regular oil changes. � Before any draining or maintenance operation, check the pumping conditions of the installation: potential toxicity, corrosion or radioacitivity of pumped gases.
- Page 32 Troubleshooting and corrective actions Corrective actions Causes Incidents Check the cower suoolv. • Incorrect motor nnwer suoolv. The pump is not running Reheat the pump and its oil. • Temperature too low. Disassemble the motor and try • Gumming of seals after to run the fan manually.
- Page 33 Incidents Causes Corrective actions o· Ultimate pressure obtained: a few 10· 2 Torr (l 2 mbor) The vacuum pump does not produce a vacuum (continued) • Gos ballast adjustment button Close. open. " • Re,Joce. nched Q.� _____ _, '" - c �...
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Page 35: Maintenance
Maintenance Maintenance frequency An incorrect ultimate vacuum or a reduction in pumping speed ore signs that the oil hos deteriorated. The periodic inspection of the state of the oil is performed by comparison with a sample of new oil in order to check the level of contamination or deterioration of the lubricant. - Page 37 Replacement of front seal In the event of on external oil leak on the pump, it is necessary to change the shaft seal on the motor side. You will need: • a front seal replacement kit 46), (see page - a screwdriver, - a 3, 4 and mm Allen wrench.
- Page 38 Disassembling the pump Disassembling the motor � Remove the motor cover. block � Remove the motor attachment screws. Disassembling the fan Remove the fan fastening screw and the support washer. Remove the key. Replacing the front seal See page 36. Disassembling the gas �...
- Page 40 Disassembling the � Remove the 4 nuts (and washers). Release the Range in the axis. rear flange Disassembling the Remove the stator by sliding it along the rotor. HP stator and the rotor (two-stage pumps) Release the rotor and the vanes. Disassembling the Insert two screwdrivers in the notches and release the flange in the axis.
- Page 41 Cleanin g com p onents Cleaning metal components Solvents ore required to clean components. Standard precautions should be token in compliance with the manufacturer's instructions. After use in mineral or synthetic oil, clean the metal components with o AXAREL(l) CARECLEAN(2), mineral products based solvent such as PREMAClfAN131, NAPHTEOl.14).
- Page 42 Replacement of shaft seals Specific tools • S ific assembly mandrel. • A support plate (or washer). Recommended tools • A Rot screwdriver �. Extracting a shaft seal from With the Range Rot, the seal is extracted using o screwdriver, resting on the plate its housing (or washer} so as not to damage the seal housing.
- Page 43 Reassembling the pump • Component preparation Rest the frame on o Flot surface in order to raise the pump. • All surfaces in contact ore cooled with oil. • Observe o nominal clomping torque of 0.8 mdoN (5.8 ftlbs) for the reassembly of the functional block.
- Page 45 Tools and consumable products Special precautions • Read the warning at the beginning of the maintenonce chapter. 39). • Before disossembling the pump, drain it (see page • All the seals and faulty ports should be replaced, provide for a seal kit or a maintenance kit.
- Page 46 121 Hartwell Avenue Lexington, MA 02173 All products sold by Varian and returned by customer are subject to Varian Vacuum Products standard terms and conditions of sole including, but not limited to, the warranty and damages and liability provisions set forth...
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