Related Manuals for Varian NHS-35
Summary of Contents for Varian NHS-35
- Page 1 Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421-3133 NHS-35 (781) 861-7200 (800) 8-VARIAN Diffusion Pump Instruction Manual Manual No. 6999-01-135 Revision G April 2000...
- Page 3 Hong Kong Spain Tel: (852) 26206173 Brazil Varian Iberica Fax: (852) 26206338 Avda Pedro Diez 25 Varian Industria e Comercio Ltda. India Avenida Dr. Cardoso de Mello 1644 28019 Madrid Vila Olimpia Varian India PVT LTD Spain Sao Paulo 04548 005...
- Page 5 WARRANTY Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion of the purchase price of the Product.
- Page 7 Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved. It is the sole responsibility of users of Varian equipment to comply with all local, state, and federal safety requirements (laws and regulations) applicable to their system. Employ the services of an industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.
- Page 8 SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL.
- Page 9 THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient water and backup power to effect a safe shutdown under worst case conditions.
- Page 10 Hazard Suggested Corrective Action a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C) pump can cause an explosion.
- Page 11 Prohibited Action Explosion-Causing Condition Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures powders, or reactive materials Remove, defeat, or override safety counter- Overtemperature, overpressure, more measures such as pressure and thermal combustible mixtures switches and valve sequencer interlocks Machine or weld without removing all oil Source of ignition or solvent residue in pump...
- Page 12 d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corrosive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death.
- Page 13 i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tissues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of liquified nitro- gen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid may produce the same effect.
- Page 14 WARNING _____________ Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive.
- Page 15 WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. Check weight of equipment before lifting and do not stand under equip- ment being moved.
-
Page 17: Table Of Contents
Table of Contents Section Page Safety Considerations ............Section I –... - Page 19 380/415V Wiring Diagram – NHS-35 Diffusion Pump ......1-11 480V Wiring Diagram – NHS-35 Diffusion Pump ....... 1-12 Sight Glass Assembly .
-
Page 21: Section I - Installation
OPERATING SPECIFICATIONS Model Part Number NHS-35 Diffusion Pump 240 V 480 V 380/415 V 400 V 440 V with ASA flanges &... -
Page 22: Speed And Throughput Curves - Nhs-35 Diffusion Pump
Installation Figure 1-1. Speed and Throughput Curves – NHS-35 Diffusion Pump... -
Page 23: Physical Specifications
Installation PHYSICAL SPECIFICATIONS (See Figure 1-2) Flange dimensions (inches): Inlet Foreline Inlet Foreline 35"ASA 6"ASA ISO-1000-F ISO-200-K* 41.75 44.09 9.45 7.72 35.00 7.72 Thickness 1.12 0.75 1.12 0.47 Bolt Circle 38.5 42.913 – No. of Holes – Size of Holes 0.87 0.81 0.550... -
Page 24: Physical Specifications - Nhs-35 Diffusion Pump
Installation (optional) Figure 1-2. Physical Specifications – NHS-35 Diffusion Pump (with ASA Flanges) -
Page 25: Unpacking
Pumps are factory-packaged to permit prolonged storage in suitably protected areas without special precautions. WARNING When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. -
Page 26: Section Drawing - Nhs-35 Diffusion Pump
Installation Figure 1-3. Section Drawing – NHS-35 Diffusion Pump... - Page 27 Installation WARNING Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents. When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use near a high-temperature source. Ventilate work- ing area with a blower and use in large, well-ventilated room.
-
Page 28: Utility And System Connections
Installation UTILITY AND SYSTEM CONNECTIONS 1-6-1 Safety Considerations and Interlocks Large pumps are equipped with two thermal switches. One is mounted at the body cooling coils, the other at the center of the boiler plate (at the bottom of the pump). These thermal switches are supplied normally closed. -
Page 29: Water Cooling Connections
Installation Water Requirements 4 gallons per minute at 60° to 80°F inlet temperature pressure drop across series curcuit of cold trap and body – 40 PSI. Figure 1-4. Water Cooling Connections If the water supply pressure is low, it may be necessary to connect the different sections of cooling coils in parallel. - Page 30 Installation Figure 1-5. 240/400/440V Wiring Diagram – NHS-35 Diffusion Pump 1-10...
- Page 31 Installation Figure 1-6. 380/415V Wiring Diagram – NHS-35 Diffusion Pump 1-11...
-
Page 32: 480V Wiring Diagram - Nhs-35 Diffusion Pump
Installation Figure 1-7. 480V Wiring Diagram – NHS-35 Diffusion Pump 1-12... - Page 33 Installation Make connections to the terminals in the junction box (at the foreline). The use of flexible conduit is recommended to facilitate removal of the pump for service. The pump should not be operated at more than 5% over the rated voltage. Make connections in accordance with the wiring diagram provided with each pump.
-
Page 34: Adding Pump Fluid
(usually 10 to 50 microns (1.33 to 6.65 Pa)). If it does not, examine for leakage. If leakage is suspected, follow standard procedures for leak testing. These will depend on the type of vacuum gauges and/or leak detection equipment available. The most effective are Varian’s helium leak detectors. ADDING PUMP FLUID WARNING... -
Page 35: Sight Glass Assembly
Once the pump is running, the oil level should be in the FULL HOT operating range as indicated on the sight glass assembly. It is not recommended that Santovac 5 Diffusion Pump Fluid be used with the NHS-35. Figure 1-8. Sight Glass Assembly... - Page 36 Installation 1-16...
-
Page 37: Section Ii - Operation
SECTION II OPERATION During initial installation, the newly installed pump fluid may be subjected to a degassing process. This may result in foreline pressure fluctuations and “bursts”. Such fluctuations are considered normal. START-UP PROCEDURE WARNING _____________ The following conditions increase the risk of explosion: •... -
Page 38: Shutdown Procedure
Operation Switch on the power to the diffusion pump heater. Check inlet and forepressure performance by means of the system instrumentation. During operation, the gas load at the inlet of the diffusion pump should not exceed the maximum throughput capability of the pump. This means that the pressure at the inlet flange should not (except in transient conditions) exceed approximately 1 x 10 Torr .0133 Pa. -
Page 39: Section Iii - Maintenance
SECTION III MAINTENANCE GENERAL Diffusion pumps generally require little attention when correctly operated. However, it is advisable to perform some periodic checks to insure continued trouble-free operation. By simple preventive main- tenance, costly down-time and cleaning procedures can be avoided. A day-to-day log of pump and system performance will indicate the condition of the pump and marked variations will show the need for corrective action. -
Page 40: Cleaning
Maintenance Check the total heater input and balance of load if a multi-phase heater is used. Check to insure that cooling water flow is unobstructed and not below specified quantities. CLEANING Complete cleaning of the pump may be periodically required because of the gradual deterioration of some pump fluids. -
Page 41: Disassembling And Reassembly The Cold Cap
Maintenance Thoroughly clean the pump body interior using acetone followed by an alcohol rinse. Dry with clean, dry, oil-free compressd air or heat gun. Thoroughly clean the jet assembly using acetone, wipe all surfaces with alcohol, and dry with clean, dry, oil-free compressed air or heat gun. Install the jet in the pump body. -
Page 42: Disassembling And Reassembling The Jet Assembly
Maintenance DISASSEMBLING AND REASSEMBLING THE JET ASSEMBLY To disassemble the jet assembly: Disassemble the cold cap water line feedthrough compression seals by removing the nut, follower, gasket, and female coupling located at the side of the pump. Remove the nut which secures the cold cap to the jet assembly. Lift out the cold cap. -
Page 43: External Fittings - Cold Cap Assembly
Maintenance Coat the boiler studs with anti-seize compound such as FEL-PRO-C-5A or common milk of magnesia. Assemble the new unit (heater element, clamping plate, and heater shield). Support the heating unit by the clamping plate, line up the holes with the boiler studs, and push the unit up against the boiler plate. - Page 44 Maintenance REPLACEABLE PARTS The following is a list of replaceable parts for the Varian NHS-35 Diffusion Pump. Part Number Description 81437301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST 660811494 Cold cap gasket (see Figure 3-2)
-
Page 45: Section Iv - Troubleshooting
SECTION IV TROUBLESHOOTING LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to the incidence of leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance. Inlet and foreline connections. - Page 46 Troubleshooting Table 4-1 Fault Probable Cause Corrective Action Poor system pressure Leaks in system, virtual or real Locate and repair. High process gas load Measure gas load, eliminate cause. System dirty Clean system to reduce outgassing. Poor ultimate pressure Contaminated pump fluid Examine and replace.
- Page 47 In compliance with Federal OSHA Safety Standard 1910.1200, Hazard Communications “Right to Know” , Varian is enforcing that standard to preclude the potential health risk to its service person- nel that can occur when receiving, disassembling, or repairing potentially contaminated products.
- Page 49 121 Hartwell Avenue Lexington, MA 02421 All products sold by Varian and returned by customer are subject to Varian Vacuum Products standard terms and conditions of sale including, but not limited to, the warranty and damages and liability provi- sions set forth in the warranty.
Need help?
Do you have a question about the NHS-35 and is the answer not in the manual?
Questions and answers