Subscribe to Our Youtube Channel
Related Manuals for Varian HS-32
Summary of Contents for Varian HS-32
- Page 1 Varian Vacuum Technologies 121 Hartwell Avenue HS-32 Lexington, MA 02421-3133 (781) 861-7200 (800) 8-VARIAN Diffusion Pump Instruction Manual Manual No. 6999-01-132 Revision G May 2000...
-
Page 2: Sales And Service Offices
Hong Kong Spain Tel: (852) 26206173 Brazil Varian Iberica Fax: (852) 26206338 Avda Pedro Diez 25 Varian Industria e Comercio Ltda. India Avenida Dr. Cardoso de Mello 1644 28019 Madrid Vila Olimpia Varian India PVT LTD Spain Sao Paulo 04548 005... - Page 3 SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL.
- Page 4 WARNING Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive.
- Page 5 Hot oils can cause serious burns. Wear protective gloves and long sleeved, loose fitting, heat resistant garments when draining pump oil. WARNING When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel.
-
Page 6: Cleaning A New Pump
Pumps are factory-packaged to permit prolonged storage in suitably protected areas without special precautions. WARNING When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. -
Page 7: Utility And System Connections
Installation WARNING Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents. When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use near a high-temperature source. Ventilate work- ing area with a blower and use in large, well-ventilated room. - Page 8 Installation These thermal switches are supplied NORMALLY CLOSED. The thermal switches have been designed so that a cooling water failure or low oil level in the boiler will result in an increase in temperature, causing the NORMALLY CLOSED contacts of the switches to open. When the problem has been corrected and the temperature lowered, the thermal switch will automati- cally reset itself.
- Page 9 Installation The temperature at the discharged cooling water should not exceed 130°F (54°C). If the water supply pressure is low, it may be necessary to connect the different sections of cooling coils in parallel. This should be done if the cooling water discharge temperature exceeds 130°F (54°C). The cooling water discharge should, if possible, be connected to an open drain so that cooling water flow can readily be checked.
- Page 10 (usually 10 to 50 microns (1.33 to 6.65 Pa)). If it does not, examine for leakage. If leakage is suspected, follow standard procedures for leak testing. These will depend on the type of vacuum gauges and/or leak detection equipment available. The most effective are Varian’s helium leak detectors. 1-16...
-
Page 11: Adding Pump Fluid
(75 inch-pounds maximum). Lubricate the O-ring with pump fluid before installation. Once the pump is running, the oil level should be in the FULL HOT operating range as indicated on the sight glass assembly. It is not recommended that SantoVac 5 Diffusion Pump Fluid be used with the HS-32. 1-17... -
Page 12: Operation
SECTION II OPERATION During initial installation, the newly installed pump fluid may be subjected to a degassing process. This may result in foreline pressure fluctuations and “bursts”. Such fluctuations are considered normal. START-UP PROCEDURE WARNING The following conditions increase the risk of explosion: •... -
Page 13: Shutdown Procedure
Operation Turn on the cooling water supply to the pump body and check that adequate flow is provided by examining the amount of water discharged at the visual drain points. Switch on the power to the diffusion pump heater. Check inlet and forepressure performance by means of the system instrumentation. During operation, the gas load at the inlet of the diffusion pump should not exceed the maximum throughput capability of the pump. -
Page 14: Maintenance
SECTION III MAINTENANCE GENERAL Diffusion pumps generally require little attention when correctly operated. However, it is advisable to perform some periodic checks to insure continued trouble-free operation. By simple preventive maintenance, costly down-time and cleaning procedures can be avoided. A day- to-day log of pump and system performance will indicate the condition of the pump and marked vari- ations will show the need for corrective action. - Page 15 Maintenance When the pump is cold, check that the heaters are bolted snugly to the boiler plate and that all heater terminal connections are tightly fastened inside the junction box. Check the total heater input and balance of load if a multi-phase heater is used. Check to insure that cooling water flow is unobstructed and not below specified quantities.
-
Page 16: Heater Replacement
Maintenance DISASSEMBLING AND REASSEMBLING THE JET ASSEMBLY To disassemble the jet assembly: Disassemble the cold cap water line feedthrough compression seals by removing the nut, follower, gasket, and female coupling located at the side of the pump. (See figure 3-2 for a section drawing of a typical jet assembly) Remove the block which secures the cold cap to the jet assembly. - Page 17 Maintenance Remove the heater cover and insulation from the bottom of the diffusion pump. Remove the nuts holding the clamping plate. Lower the entire heating unit (heater element, clamping plate and heater shield, see Figure 3-3) until it is off the mounting studs. Coat the boiler studs with anti-seize compound such as FEL-PRO-C-5A or common milk of magnesia.
- Page 18 In compliance with Federal OSHA Safety Standard 1910.1200, Hazard Communications “Right to Know” , Varian is enforcing that standard to preclude the potential health risk to its service person- nel that can occur when receiving, disassembling, or repairing potentially contaminated products.
- Page 19 121 Hartwell Avenue Lexington, MA 02421 All products sold by Varian and returned by customer are subject to Varian Vacuum Products standard terms and conditions of sale including, but not limited to, the warranty and damages and liability provi- sions set forth in the warranty.
Need help?
Do you have a question about the HS-32 and is the answer not in the manual?
Questions and answers